Patent US4981071A successfully refreshed from Google Patents.
US4981071A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Machine element with coating
Assignee: Leybold AG
•
Filing: 1989-01-04
•
Granted: 1991-01-01
•
Expires: 2009-01-04
Abstract
Abstract On a machine element of a metallic material, for example, a piston or a piston rod (7, 7') for a shock absorber for a motor vehicle, with at least one hard-material coating deposited on the machine element, the hard-material coating essentially consists of an alloy of silicon and carbon, preferably of Si x C 1-x , x having a value of from 0 to 1. The deposition of the hard-material coating occurs on the cathode or the anode of a plasma CVD unit at a pressure of the gas or gas mixture in the deposition chamber (1) of between 10 -4 and 20 millibars.
Inventors
- 👤 Knut Enke
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 04:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/32; C23C16/325
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
166 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coat deposited directly onto the metallic substrate, said coat being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and the hard-material coating including at least one additional coating deposited over the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous mixture of carbon and silicon having a proportion of carbon to silicon different from that of the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous mixture of carbon and silicon having a proportion of carbon to silicon different from that of the base coating.
Claim 2
Dependent Claim
166 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coat deposited directly onto the metallic substrate, said coat being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and the hard-material coating including at least one additional coating deposited over the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous mixture of carbon and silicon having a proportion of carbon to silicon different from that of the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous mixture of carbon and silicon having a proportion of carbon to silicon different from that of the base coating.
Claim 3
Dependent Claim
44 words
The invention according to claim 1 wherein the coatings are deposited on the first machine element by plasma CVD using plasma derived from a monomer gas which contains both carbon and silicon or from a mixture of monomer gases which contains carbon and silicon.
Claim 4
Dependent Claim
129 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coat deposited directly onto the metallic substrate, said coat being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and the hard-material coating including at least one additional coating deposited over the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous carbon; wherein the additional coating deposited over the base coating is formed essentially of amorphous carbon.
Claim 5
Dependent Claim
129 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coat deposited directly onto the metallic substrate, said coat being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and the hard-material coating including at least one additional coating deposited over the base coating; wherein the additional coating deposited over the base coating is formed essentially of an amorphous carbon; wherein the additional coating deposited over the base coating is formed essentially of amorphous carbon.
Claim 6
Dependent Claim
64 words
The invention according to claim 3 wherein the base coating is deposited on the first machine element by plasma CVD using plasma derived from a monomer gas which contains both carbon and silicon or from a mixture of monomer gases which contains carbon and silicon and the additional coating is deposited by plasma CVD using plasma derived from a monomer gas which contains carbon.
Claim 7
Dependent Claim
107 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the plasma is produced with inductive excitation.
Claim 8
Dependent Claim
107 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the plasma is produced with inductive excitation.
Claim 9
Dependent Claim
35 words
The invention according to claim 5, wherein said gas or mixture of gases contains hydrogen and at least one halogen, the ratio of hydrogen to halogen being high enough to prevent etching of the substrate.
Claim 10
Dependent Claim
124 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the pressure of the gas or gas mixture in the deposition chamber of the plasma CVD unit ranges from 10 -4 to 20 millibars.
Claim 11
Dependent Claim
124 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the pressure of the gas or gas mixture in the deposition chamber of the plasma CVD unit ranges from 10 -4 to 20 millibars.
Claim 12
Dependent Claim
132 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and further comprising a step of bombarding the machine element before the step of depositing the coating, said step of bombarding being accomplished using insert gas ions which are not incorporated into the coating.
Claim 13
Dependent Claim
132 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and further comprising a step of bombarding the machine element before the step of depositing the coating, said step of bombarding being accomplished using insert gas ions which are not incorporated into the coating.
Claim 14
Dependent Claim
23 words
A process as defined in claim 8, wherein the inert gas is selected from the group consisting of argon, nitrogen, oxygen and hydrogen.
Claim 15
Dependent Claim
132 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the step of depositing the coating on the machine element includes supporting the machine element on a workpiece holder in the plasma CVD unit and applying a radio-frequency to said workpiece holder.
Claim 16
Dependent Claim
132 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the step of depositing the coating on the machine element includes supporting the machine element on a workpiece holder in the plasma CVD unit and applying a radio-frequency to said workpiece holder.
Claim 17
Dependent Claim
26 words
A process as defined in claim 10, wherein the first machine element is supported on a grounded workpiece holder during the depositing of the first coating.
Claim 18
Dependent Claim
116 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the potential difference between the plasma and the first machine element is at least 100 volts.
Claim 19
Dependent Claim
116 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein the potential difference between the plasma and the first machine element is at least 100 volts.
Claim 20
Dependent Claim
106 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein plasma is produced with capacitive excitation.
Claim 21
Dependent Claim
106 words
A process for making a machine assembly, said process comprising: depositing a hard-material coating on a metallic-material substrate of a first machine element, said depositing including connecting the first machine element to the cathode or to the anode of a plasma CVD unit and applying a first coating to the first machine element by plasma CVD using plasma derived from a monomer gas which contains carbon and silicon or from a mixture of monomer gases which contains carbon and silicon; assembling the first machine element with the hard-material coating thereof in sliding engagement with a second machine element; and wherein plasma is produced with capacitive excitation.
Claim 22
Dependent Claim
132 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coating deposited directly onto the metallic substrate, said coating being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and said hard-material coating further including an outer coating applied over the base coating, said outer coating being formed essentially of another amorphous mixture of silicon and carbon according to the formula Si y C 1-y where the value of y is not equal to the value of x.
Claim 23
Dependent Claim
132 words
A machine assembly comprising: first and second machine elements slidingly engaging one another; said first machine element comprising: a substrate of a metallic material; and a hard-material coating deposited on said substrate and slidingly engaging the second machine element; the hard-material coating including a base coating deposited directly onto the metallic substrate, said coating being essentially formed of an amorphous mixture of silicon and carbon according to the formula: Si.sub.x C.sub.1-x, wherein x has a value greater than 0 and less than 1; and said hard-material coating further including an outer coating applied over the base coating, said outer coating being formed essentially of another amorphous mixture of silicon and carbon according to the formula Si y C 1-y where the value of y is not equal to the value of x.
Claim 24
Dependent Claim
103 words
A machine assembly comprising: a machine element of a metallic material and; a hard-material coating deposited on the machine element and comprising a plurality of layered coatings, including: an inward coating deposited on the machine element and being essentially formed of an amorphous mixture of silicon and carbon; and at least one outward coating deposited over the inward coating, said outward coating being essentially formed of another amorphous mixture of silicon and carbon of a different composition from that of the inward coating or of amorphous carbon; and said hand-material coating being in sliding engagement with a second machine element of the assembly.
Claim 25
Dependent Claim
103 words
A machine assembly comprising: a machine element of a metallic material and; a hard-material coating deposited on the machine element and comprising a plurality of layered coatings, including: an inward coating deposited on the machine element and being essentially formed of an amorphous mixture of silicon and carbon; and at least one outward coating deposited over the inward coating, said outward coating being essentially formed of another amorphous mixture of silicon and carbon of a different composition from that of the inward coating or of amorphous carbon; and said hand-material coating being in sliding engagement with a second machine element of the assembly.
Claim 26
Dependent Claim
14 words
The invention according to claim 15 wherein said coatings is applied by plasma CVD.
References Cited (Backward Citations)
US3124854A
Cited
US3193399A
Cited
DE1671018A1
Cited
US3533436A
Cited
US3683965A
Cited
US3822928A
Cited
US3810602A
Cited
US3834416A
Cited
US3857682A
Cited
US4074671A
Cited
DE2616339A1
Cited
US4096325A
Cited
US4136365A
Cited
GB1583349A
Cited
US4615298A
Cited
DE8012995U1
Cited
US4798770A
Cited
US4525417A
Cited
EP0087836A1
Cited
US4452686A
Cited
US4450787A
Cited
US4856758A
Cited
US4647472A
Cited
US4767336A
Cited
US4583492A
Cited
US4564533A
Cited
US4636401A
Cited
US4759947A
Cited
US4608943A
Cited
US4685487A
Cited
US4626447A
Cited
US4683809A
Cited
DE3538261A1
Cited
US4762730A
Cited
DE3624467A1
Cited
DE3733117A1
Cited
DE3706218A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-12-31 | 1994-07-02 | 1995-01-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-12-31 | 1998-07-02 | 1999-01-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-12-31 | 2002-07-02 | 2003-01-01 | $7700.00 | Window Closed / Lapsed |