US7157036B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method to reduce adhesion between a conformable region and a pattern of a mold
Assignee: Canon Nanotechnologies Inc
•
Filing: 2003-06-17
•
Granted: 2007-01-02
•
Expires: 2023-06-17
Abstract
Abstract The present invention provides a method to reduce adhesion between a conformable region on a substrate and a pattern of a mold, which selectively comes into contact with the conformable region. The method features forming a conformable material on the substrate and contacting the conformable material with the surface. A conditioned layer is formed from the conformable material. The conditioned layer has first and second sub-portions, with the first sub-portion being solidified and the second sub-portion having a first affinity for the surface and a second affinity for the first sub-portion. The first affinity is greater than the second affinity. In this fashion, upon separation of the mold from the conditioned layer, a subset of the second sub-portion maintains contact with the mold, thereby reducing the probability that a pattern formed in the conditioned layer becomes compromised. These and other embodiments are described herein.
Inventors
- 👤 Byung Jin Choi
- 👤 Frank Y. Xu
- 👤 Nicholas A. Stacey
- 👤 Van Xuan Hong Truskett
- 👤 Michael P. C. Watts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:55
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
127 words
A method of reducing adhesion forces between a conformable material on a substrate and a mold having an initial pattern, said method comprising: forming said conformable material on said substrate by depositing, upon said substrate, a conformable composition having a polymerizable compound and non-ionic sufactant molecules, with said non-ionic surfactant molecules being concentrated in a first region of said conformable material with said polymerizable compound being concentrated in a second region of said conformable composition; contacting said conformable material with said mold; and solidifying said polymerizable compound, defining solidified material with said first region being positioned between said second region and said mold and a subset of said non-ionic surfactant molecules having an affinity for said mold that is greater than an affinity for said solidified material.
Claim 2
Independent Claim
127 words
A method of reducing adhesion forces between a conformable material on a substrate and a mold having an initial pattern, said method comprising: forming said conformable material on said substrate by depositing, upon said substrate, a conformable composition having a polymerizable compound and non-ionic sufactant molecules, with said non-ionic surfactant molecules being concentrated in a first region of said conformable material with said polymerizable compound being concentrated in a second region of said conformable composition; contacting said conformable material with said mold; and solidifying said polymerizable compound, defining solidified material with said first region being positioned between said second region and said mold and a subset of said non-ionic surfactant molecules having an affinity for said mold that is greater than an affinity for said solidified material.
Claim 3
Dependent Claim
15 words
The method as recited in claim 1 further including conditioning said mold to be hydrophilic.
Claim 4
Dependent Claim
26 words
The method as recited in claim 1 further including conditioning said mold by exposing said mold to a mixture of isopropyl alcohol and said non-ionic surfactant.
Claim 5
Dependent Claim
26 words
The method as recited in claim 1 wherein forming said conformable material further includes depositing a plurality of drops of said conformable composition upon said substrate.
Claim 6
Dependent Claim
24 words
The method as recited in claim 1 wherein forming said conformable material further includes depositing said conformable composition upon said substrate employing spin-coating techniques.
Claim 7
Dependent Claim
34 words
The method as recited in claim 1 further including sequentially contacting said conformable composition a sufficient number of times to accurately reproduce, in said conformable composition, a recorded pattern complementary to said initial pattern.
Claim 8
Dependent Claim
34 words
The method as recited in claim 1 wherein forming said conformable material further includes forming said conformable composition from isobornyl acrylate, n-hexyl acrylate, ethylene glycol diacrylate and 2-hydroxy-2-methyl-1-phenyl-propan-1-one and R 1 R 2 .
Claim 9
Independent Claim
110 words
A method of reducing adhesion forces between a substrate and a mold having a patterned region with a surface, said method comprising: forming a conformable material on said substrate; contacting said conformable material with said surface; and forming a conditioned layer from said conformable material having a first and second sub-portions, with said first sub-portion being solidified and said second sub-portion including a plurality of molecules, a subset of which forms hydrogen bonds with said surface generating and defining a first affinity for said surface, with the molecules of said subset having a second affinity for said first sub-portion, such that said first affinity is greater than said second affinity.
Claim 10
Independent Claim
110 words
A method of reducing adhesion forces between a substrate and a mold having a patterned region with a surface, said method comprising: forming a conformable material on said substrate; contacting said conformable material with said surface; and forming a conditioned layer from said conformable material having a first and second sub-portions, with said first sub-portion being solidified and said second sub-portion including a plurality of molecules, a subset of which forms hydrogen bonds with said surface generating and defining a first affinity for said surface, with the molecules of said subset having a second affinity for said first sub-portion, such that said first affinity is greater than said second affinity.
Claim 11
Dependent Claim
20 words
The method as recited in claim 8 further including conditioning said mold to be hydrophilic before contacting said conformable material.
Claim 12
Dependent Claim
30 words
The method as recited in claim 8 further including conditioning said mold by exposing said mold to a mixture of isopropyl alcohol and a surfactant before contacting said conformable material.
Claim 13
Dependent Claim
26 words
The method as recited in claim 8 wherein forming said conformable material further includes depositing a plurality of drops of said conformable composition upon said substrate.
Claim 14
Dependent Claim
24 words
The method as recited in claim 8 wherein forming said conformable material further includes depositing said conformable composition upon said substrate employing spin-coating techniques.
Claim 15
Dependent Claim
34 words
The method as recited in claim 8 further including sequentially contacting said conformable composition a sufficient number of times to accurately reproduce, in said conformable composition, a recorded pattern complementary to said initial pattern.
Claim 16
Dependent Claim
34 words
The method as recited in claim 8 wherein forming said conformable material further includes forming said conformable composition from isobornyl acrylate, n-hexyl acrylate, ethylene glycol diacrylate and 2-hydroxy-2-methyl-1-phenyl-propan-1-one and R 1 R 2 .
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-01-01 | 2010-07-03 | 2011-01-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-01-01 | 2014-07-03 | 2015-01-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-01-01 | 2018-07-03 | 2019-01-02 | $7700.00 | Window Closed / Lapsed |