US5318870A
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US
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Method of patterning a phenolic polymer film without photoactive additive through exposure to high energy radiation below 225 nm with subsequent organometallic treatment and the associated imaged article
Assignee: Massachusetts Institute of Technology
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Filing: 1992-07-31
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Granted: 1994-06-07
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Expires: 2012-07-31
Abstract
Abstract A phenolic resist without photoadditives achieves enhanced sensitivity when exposed to patterned short wavelength radiation to form a highly crosslinked barrier layer in the exposed regions of the resist surface. The complementary surface regions are silylated in a silicon-containing reagent, and the exposed regions are readily removed by a oxygen RIE plasma. The laser exposure is a reciprocal process allowing precise control. Pattern definition is enhanced by limiting the exposure and the silylation to the surface of the resist.
Inventors
- 👤 Mark A. Hartney
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:22
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/265; Y; Y10; Y10S; Y10S430/00; Y10S430/146
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
146 words
A method of patterning a substrate comprising the steps of depositing a film of phenolic polymer on the substrate, said film being a surface coating compound which is free of photoactive additive, exposing a pattern in the film to high energy radiation having a wavelength below approximately 225 nanometers creating a pattern of exposed and nonexposed regions, the exposed regions in the film having reduced permeability due to crosslinking within the polymer, diffusing an organometallic agent into the film which is absorbed into the nonexposed regions such that a metal is deposited creating an etch resistant barrier therein, and etching the film to selectively remove portions of the film in said exposed regions, absence of a photoadditive enhancing diffusivity in unexposed regions of the film and crosslinking in exposed regions whereby said etching produces a surface pattern of enhanced definition in a low temperature microlithographic process.
Claim 2
Independent Claim
146 words
A method of patterning a substrate comprising the steps of depositing a film of phenolic polymer on the substrate, said film being a surface coating compound which is free of photoactive additive, exposing a pattern in the film to high energy radiation having a wavelength below approximately 225 nanometers creating a pattern of exposed and nonexposed regions, the exposed regions in the film having reduced permeability due to crosslinking within the polymer, diffusing an organometallic agent into the film which is absorbed into the nonexposed regions such that a metal is deposited creating an etch resistant barrier therein, and etching the film to selectively remove portions of the film in said exposed regions, absence of a photoadditive enhancing diffusivity in unexposed regions of the film and crosslinking in exposed regions whereby said etching produces a surface pattern of enhanced definition in a low temperature microlithographic process.
Claim 3
Dependent Claim
40 words
The method of claim 1, wherein said step of depositing a film is achieved by forming the phenolic polymer film on the substrate in a plasma chamber, said phenolic polymer film including functionality for crosslinking upon exposure to ultraviolet radiation.
Claim 4
Dependent Claim
31 words
The method of claim 1, wherein said high energy radiation is absorbed by the film such that crosslinking occurs only within a depth of substantially under 0.2 microns of the surface.
Claim 5
Dependent Claim
25 words
The method of claim 3, wherein the step of etching includes controlling parameters of the plasma etch to achieve steep side walls of exposed features.
Claim 6
Dependent Claim
113 words
A resist film formed of a phenolic polymeric base material having a thickness of under approximately five microns and not including a photoactive compound, said resist film having a pattern of crosslinked regions and a complementary pattern of uncrosslinked regions with an etch barrier metal selectively incorporated in said uncrosslinked regions, said crosslinked regions being localized at the surface thereof by exposure to high energy radiation at less than approximately 225 nanometers wavelength in a dose effective to prevent incorporation of the barrier metal therein, absence of photoactive compound rendering said film diffusive to the etch barrier metal and more sensitive to said radiation thereby enhancing definition of said crosslinked and uncrosslinked regions.
Claim 7
Dependent Claim
113 words
A resist film formed of a phenolic polymeric base material having a thickness of under approximately five microns and not including a photoactive compound, said resist film having a pattern of crosslinked regions and a complementary pattern of uncrosslinked regions with an etch barrier metal selectively incorporated in said uncrosslinked regions, said crosslinked regions being localized at the surface thereof by exposure to high energy radiation at less than approximately 225 nanometers wavelength in a dose effective to prevent incorporation of the barrier metal therein, absence of photoactive compound rendering said film diffusive to the etch barrier metal and more sensitive to said radiation thereby enhancing definition of said crosslinked and uncrosslinked regions.
Claim 8
Dependent Claim
28 words
A resist film according to claim 5, wherein said etch barrier metal is incorporated by diffusion of a reagent through only a surface portion of said complementary pattern.
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