US6936194B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Functional patterning material for imprint lithography processes
Assignee: Canon Nanotechnologies Inc
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Filing: 2002-09-05
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Granted: 2005-08-30
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Expires: 2022-09-05
Abstract
Abstract The present invention provides a method for forming an optical coupling device on a substrate by disposing a material onto the substrate that is polymerizable in response to actinic radiation. A stack of the material is formed by contacting the material with a template having a stepped-recess formed therein. The material is then solidified into an optically transparent body with a surface having a plurality of steps by subjecting the stack to actinic radiation. To that end, the material may comprise an acrylate component selected from a set of acrylates consisting essentially of ethylene dio diacrylate, t-butyl acrylate, bisphenol A diacrylate, acrylate terminated polysiloxane, polydifluoromethylene diacrylate, perfluoropolyether diacrylates and chlorofluorodiacrylates. Alternatively, the material may include a silylated component selected from a group consisting essentially of (3-acryloxypropyltristrimethylsiloxy) silane.
Inventors
- 👤 Michael P. C. Watts
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:23
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B82; B82Y; B82Y10/00; B82Y40/00; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/138; B29; B29L; B29L2011/00; B29L2011/0016; G02B2006/12133; G02B2006/12147
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
72 words
A method of forming an optical coupling device on a substrate, said method including: forming a stress relief layer on said substrate producing, on said stress relief layer, an optically transparent body with a surface having a plurality of steps by disposing a material onto said stress relief layer, contacting said material with a template having a stepped recess formed therein and solidifying said material by exposing said material to actinic radiation.
Claim 2
Independent Claim
72 words
A method of forming an optical coupling device on a substrate, said method including: forming a stress relief layer on said substrate producing, on said stress relief layer, an optically transparent body with a surface having a plurality of steps by disposing a material onto said stress relief layer, contacting said material with a template having a stepped recess formed therein and solidifying said material by exposing said material to actinic radiation.
Claim 3
Dependent Claim
44 words
The method as recited in claim 1 wherein producing further includes disposing said material with an acrylate component selected from a set of acrylates consisting essentially of ethylene diol diacrylate, t-butyl acrylate, bisphenol A diacrylate, acrylate terminated polysiloxane, polydifluoromethylene diacrylate, perfluoropolyether diacrylates and chlorofluorodiacrylates.
Claim 4
Dependent Claim
27 words
The method as recited in claim 1 wherein producing further includes disposing said material with a silylated component selected from a group consisting essentially of (3-acryloxypropyltristrimethylsiloxy) silane.
Claim 5
Dependent Claim
16 words
The method as recited in claim 1 further including fabricating said substrate from optically transparent material.
Claim 6
Dependent Claim
31 words
The method as recited in claim 1 wherein forming further includes fabricating said stress relief layer from rubbers of a set of rubbers consisting essentially of polysiloxane rubber and fluorosilocane rubber.
Claim 7
Dependent Claim
28 words
The method as recited in claim 1 wherein producing further includes disposing, on said stress relief layer, said material consisting essentially of ethylene diol diacrylate and an initiator.
Claim 8
Dependent Claim
26 words
The method as recited in claim 1 wherein producing further includes disposing, on said stress relief layer, said material consisting essentially of 1,3-bis(3-methacryloxypropyl)tetramethyldisiloxane and an initiator.
Claim 9
Dependent Claim
31 words
The method as recited in claim 1 wherein producing further includes disposing, on said stress relief layer, said material consisting essentially of (3-acryloxypropyl)tris(tri-methoxysiloxy)-silane, ethylene dio diacrylate, t-butyl acrylate, and an initiator.
Claim 10
Dependent Claim
31 words
The method as recited in claim 1 wherein producing further includes disposing, on said stress relief layer, said material consisting essentially of acrylate terminated poly siloxane, t-butyl acrylate, and an initiator.
Claim 11
Dependent Claim
28 words
The method as recited in claim 1 wherein producing further includes disposing, on said stress relief layer, said material consisting essentially of bisphenol A diacrylate, and an initiator.
Claim 12
Independent Claim
89 words
A method of forming an optical coupling device on a substrate, said method including: forming said substrate with a stress relief layer; disposing a material onto said stress relief layer that is polymerizable in response to actinic radiation; forming a plurality of spaced-apart stacks of said material by contacting said material with a template have a stepped-recess formed therein; and solidifying said plurality of spaced-apart stacks of said material into an optically transparent body with a surface having a plurality of steps by subjecting said stacks to actinic radiation.
Claim 13
Independent Claim
89 words
A method of forming an optical coupling device on a substrate, said method including: forming said substrate with a stress relief layer; disposing a material onto said stress relief layer that is polymerizable in response to actinic radiation; forming a plurality of spaced-apart stacks of said material by contacting said material with a template have a stepped-recess formed therein; and solidifying said plurality of spaced-apart stacks of said material into an optically transparent body with a surface having a plurality of steps by subjecting said stacks to actinic radiation.
Claim 14
Dependent Claim
43 words
The method as recited in claim 11 wherein disposing said material on said stress relief layer further includes disposing said material on said stress relief layer, being formed from rubbers of a set of rubbers consisting essentially of polysiloxane rubber and fluorosilocane rubber.
Claim 15
Dependent Claim
16 words
The method as recited in claim 12 further including fabricating said substrate from optically transparent material.
Claim 16
Dependent Claim
44 words
The method as recited in claim 13 wherein disposing further includes disposing said material with an acrylate component selected from a set of acrylates consisting essentially of ethylene dio diacrylate, t-butyl acrylate, bisphenol A diacrylate, acrylate terminated polysiloxane, polydifluoromethylene diacrylate, perfluoropolyether diacrylates and chlorofluorodiacrylates.
Claim 17
Dependent Claim
27 words
The method as recited in claim 13 wherein disposing further includes disposing said material with a silylated component selected from a group consisting essentially of (3-acryloxypropyltristrimethylsiloxy) silane.
Claim 18
Independent Claim
104 words
A method of forming an optical coupling device on a substrate, said method including: forming, on said substrate, a stress relief layer formed from rubbers of a set of rubbers consisting essentially of polysiloxane rubber and fluorosilocane rubber; disposing a material, onto said stress relief layer, that is polymerizable in response to actinic radiation; forming a plurality of spaced-apart stacks of said material by contacting said material with a template having a stepped-recess formed therein; and solidifying said plurality of spaced-apart stacks of material into an optically transparent body with a surface having a plurality of steps by subjecting said stacks to actinic radiation.
Claim 19
Independent Claim
104 words
A method of forming an optical coupling device on a substrate, said method including: forming, on said substrate, a stress relief layer formed from rubbers of a set of rubbers consisting essentially of polysiloxane rubber and fluorosilocane rubber; disposing a material, onto said stress relief layer, that is polymerizable in response to actinic radiation; forming a plurality of spaced-apart stacks of said material by contacting said material with a template having a stepped-recess formed therein; and solidifying said plurality of spaced-apart stacks of material into an optically transparent body with a surface having a plurality of steps by subjecting said stacks to actinic radiation.
Claim 20
Dependent Claim
28 words
The method as recited in claim 16 wherein disposing further includes depositing said material from a set of materials consisting essentially of ethylene dio diacrylate and an initiator.
Claim 21
Dependent Claim
26 words
The method as recited in claim 16 wherein disposing further includes depositing said material from a set of materials consisting essentially of 1,3-bis(3-methacryloxypropyl)tetramethyldisiloxane and an initiator.
Claim 22
Dependent Claim
31 words
The method as recited in claim 16 wherein disposing further includes depositing said material from a set of materials consisting essentially of (3-acryloxypropyl)tris(tri-methoxysiloxy)-silane, ethylene dio diacrylate, t-butyl acrylate, and an initiator.
Claim 23
Dependent Claim
31 words
The method as recited in claim 16 wherein disposing further includes depositing said material from a set of materials consisting essentially of acrylate terminated poly siloxane, t-butyl acrylate, and an initiator.
Claim 24
Dependent Claim
28 words
The method as recited in claim 16 wherein disposing further includes depositing said material from a set of materials consisting essentially of bisphenol A diacrylate, and an initiator.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2008-08-29 | 2009-02-28 | 2009-08-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-08-29 | 2013-02-28 | 2013-08-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-08-29 | 2017-02-28 | 2017-08-30 | $7700.00 | Window Closed / Lapsed |