US6128085A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Reflectance spectroscopic apparatus with toroidal mirrors
Assignee: N&K Technology Inc
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Filing: 1999-10-19
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Granted: 2000-10-03
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Expires: 2019-10-19
Abstract
Abstract An apparatus uses reflectance spectrophotometry to characterize a sample having any number of thin films. The apparatus uses two toroidal mirrors in an optical relay to direct light reflected by the sample to a spectroscopic device. A computer then analyzes the reflected spectrum to characterize the optical properties of the sample. The optical relay allows a range of angles of reflection from the sample, and has no chromatic aberration. The optical relay is also arranged so that the non-chromatic aberration is minimized. For polarization-based measurements polarizing elements can be used in the apparatus and the spectroscopic device can be a spectroscopic ellipsometer. The sample is mounted on a movable stage so that different areas of the sample may be characterized. Furthermore, a deflector and a viewer are used to allow the operator of the apparatus to view the region of the sample under study.
Inventors
- 👤 Dale Buermann
- 👤 Abdul Rahim Forouhi
- 👤 Michael J. Mandella
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:43
CPC Classifications
G; G01; G01J; G01J3/00; G01J3/12; G01B; G01B11/00; G01B11/02; G01B11/06; G01B11/0616; G01B11/0625; G01B11/0641; G01J3/02; G01J3/0205; G01J3/0208; G01J3/28; G01J3/42; G01J4/00
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
89 words
An apparatus for characterizing optical properties of a sample, the apparatus comprising: a) a light source for generating light in a broadband optical beam, b) optics positioned to image the light source on the sample, c) a first toroidal mirror positioned to collect the light reflected by a measurement area of the sample, d) a second toroidal mirror positioned to receive the light and to image the measurement area on an entrance aperture of a spectroscopic device, and e) a polarizing means for selecting a polarization of the light.
Claim 2
Independent Claim
89 words
An apparatus for characterizing optical properties of a sample, the apparatus comprising: a) a light source for generating light in a broadband optical beam, b) optics positioned to image the light source on the sample, c) a first toroidal mirror positioned to collect the light reflected by a measurement area of the sample, d) a second toroidal mirror positioned to receive the light and to image the measurement area on an entrance aperture of a spectroscopic device, and e) a polarizing means for selecting a polarization of the light.
Claim 3
Dependent Claim
24 words
The apparatus of claim 1, wherein said polarizing means comprises a polarizer positioned in the path of the light reflected by the measurement area.
Claim 4
Dependent Claim
25 words
The apparatus of claim 1, wherein said polarizing means comprises a first polarizer positioned in the path of the light in the broadband optical beam.
Claim 5
Dependent Claim
26 words
The apparatus of claim 3, wherein said polarizing means further comprises a second polarizer positioned in the path of the light reflected by the measurement area.
Claim 6
Dependent Claim
27 words
The apparatus of claim 3, wherein said polarizing means further comprises a rotatable polarization analyzer positioned in the path of the light reflected by the measurement area.
Claim 7
Dependent Claim
22 words
The apparatus of claim 1, wherein the broadband optical beam has wavelengths lying in a range between 190 nm and 1100 nm.
Claim 8
Dependent Claim
37 words
The apparatus of claim 1, wherein the light reflected by the measurement area of the sample has a plurality of angles of reflection from the sample, the angles lying in the range between 0 and 89 degrees.
Claim 9
Dependent Claim
13 words
The apparatus of claim 1, wherein the spectroscopic device is a spectroscopic ellipsometer.
Claim 10
Independent Claim
93 words
An apparatus for characterizing optical properties of a sample using spectroscopy, the apparatus comprising: a) a light source for generating light in a broadband optical beam, b) optics positioned to cause the broadband optical beam to strike the sample, c) a spectroscopic device having an entrance aperture, d) an optical relay for collecting the light reflected by a measurement area of the sample and for directing the light to the entrance aperture, the optical relay comprising first and second toroidal mirrors, and e) a polarizing means for selecting a polarization of the light.
Claim 11
Independent Claim
93 words
An apparatus for characterizing optical properties of a sample using spectroscopy, the apparatus comprising: a) a light source for generating light in a broadband optical beam, b) optics positioned to cause the broadband optical beam to strike the sample, c) a spectroscopic device having an entrance aperture, d) an optical relay for collecting the light reflected by a measurement area of the sample and for directing the light to the entrance aperture, the optical relay comprising first and second toroidal mirrors, and e) a polarizing means for selecting a polarization of the light.
Claim 12
Dependent Claim
24 words
The apparatus of claim 9, wherein said polarizing means comprises a polarizer positioned in the path of the light reflected by the measurement area.
Claim 13
Dependent Claim
25 words
The apparatus of claim 9, wherein said polarizing means comprises a first polarizer positioned in the path of the light in the broadband optical beam.
Claim 14
Dependent Claim
26 words
The apparatus of claim 11, wherein said polarizing means further comprises a second polarizer positioned in the path of the light reflected by the measurement area.
Claim 15
Dependent Claim
27 words
The apparatus of claim 11, wherein said polarizing means further comprises a rotatable polarization analyzer positioned in the path of the light reflected by the measurement area.
Claim 16
Dependent Claim
22 words
The apparatus of claim 9, wherein the broadband optical beam has wavelengths lying in a range between 190 nm and 1100 nm.
Claim 17
Dependent Claim
37 words
The apparatus of claim 9, wherein the light reflected by the measurement area of the sample has a plurality of angles of reflection from the sample, the angles lying in the range between 0 and 89 degrees.
Claim 18
Dependent Claim
13 words
The apparatus of claim 9, wherein the spectroscopic device is a spectroscopic ellipsometer.
References Cited (Backward Citations)
US5184191A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-10-03 | 2004-04-03 | 2004-10-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-10-03 | 2008-04-03 | 2008-10-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-10-03 | 2012-04-03 | 2012-10-03 | $7700.00 | Window Closed / Lapsed |