US5504369A — Apparatus for performing wafer level testing of i…

Claim 1

Independent Claim 251 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice having an upper surface, each of said plurality of integrated circuit dice having a first edge at the upper surface and having a second edge at the upper surface, said plurality of integrated circuit dice being formed on said semiconductor substrate in a plurality of rows separated by a plurality of row dicing lanes and in a plurality of columns separated by a plurality of column dicing lanes; and a first wafer conductor, the first wafer conductor having a first portion formed overlying a first one of the plurality of dice located in a first one of the plurality of columns wherein the first portion crosses both the first edge and the second edge of the first one of the plurality of dice, the first wafer conductor having a second portion formed in a first one of the plurality of row dicing lanes, and the first wafer conductor having a third portion formed overlying a second one of the plurality of dice located in a second one of the plurality of columns wherein the third portion crosses both the first edge and the second edge of the second one of the plurality of dice; whereby electrical contact can be made to the first one of the plurality of dice and the second one of the plurality of dice by way of the first wafer conductor for providing a signal for purposes of testing.

Claim 2

Dependent Claim 251 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice having an upper surface, each of said plurality of integrated circuit dice having a first edge at the upper surface and having a second edge at the upper surface, said plurality of integrated circuit dice being formed on said semiconductor substrate in a plurality of rows separated by a plurality of row dicing lanes and in a plurality of columns separated by a plurality of column dicing lanes; and a first wafer conductor, the first wafer conductor having a first portion formed overlying a first one of the plurality of dice located in a first one of the plurality of columns wherein the first portion crosses both the first edge and the second edge of the first one of the plurality of dice, the first wafer conductor having a second portion formed in a first one of the plurality of row dicing lanes, and the first wafer conductor having a third portion formed overlying a second one of the plurality of dice located in a second one of the plurality of columns wherein the third portion crosses both the first edge and the second edge of the second one of the plurality of dice; whereby electrical contact can be made to the first one of the plurality of dice and the second one of the plurality of dice by way of the first wafer conductor for providing a signal for purposes of testing.

Claim 3

Dependent Claim 33 words

A semiconductor wafer as in claim 1, wherein the semiconductor wafer further comprises: a wafer contact pad formed on said semiconductor substrate, said wafer contact pad being coupled to said first wafer conductor.

Claim 4

Dependent Claim 39 words

A semiconductor wafer as in claim 2, wherein the semiconductor wafer further comprises: a plurality of redundant wafer contact pads formed on said semiconductor substrate, said plurality of redundant wafer contact pads being coupled to said first wafer conductor.

Claim 5

Dependent Claim 23 words

A semiconductor wafer as in claim 2, wherein each of said plurality of integrated circuit dice comprises: a predetermined number of bonding pads.

Claim 6

Dependent Claim 31 words

A semiconductor wafer as in claim 4, wherein fewer than said predetermined number of bonding pads on each of said plurality of integrated circuit dice are used for purposes of testing.

Claim 7

Dependent Claim 32 words

A semiconductor wafer as in claim 5, wherein each of the fewer than said predetermined number of bonding pads on each of said plurality of integrated circuit dice comprises: a mini-pad contact.

Claim 8

Dependent Claim 55 words

A semiconductor wafer as in claim 4, wherein the semiconductor wafer further comprises: a current limiting element having a first terminal coupled to said first wafer conductor and having a second terminal coupled to at least one of the predetermined number of bonding pads on the first one of the plurality of integrated circuit dice.

Claim 9

Dependent Claim 20 words

A semiconductor wafer as in claim 1, wherein each of said plurality of integrated circuit dice is a data processor.

Claim 10

Dependent Claim 20 words

A semiconductor wafer as in claim 8, wherein during testing, each data processor executes a plurality of data processor instructions.

Claim 11

Dependent Claim 15 words

A semiconductor wafer as in claim 7, wherein said current limiting element comprises: a resistor.

Claim 12

Dependent Claim 70 words

A semiconductor wafer as in claim 1, further comprising: a second wafer conductor; a first plurality of redundant wafer contact pads formed on said semiconductor substrate, said first plurality of redundant wafer contact pads being coupled to said first wafer conductor; and a second plurality of redundant wafer contact pads formed on said semiconductor substrate, said second plurality of redundant wafer contact pads being coupled to said second wafer conductor.

Claim 13

Dependent Claim 23 words

A semiconductor wafer as in claim 11, wherein said second wafer conductor supplies a test signal to said plurality of integrated circuit dice.

Claim 14

Independent Claim 495 words

An apparatus for performing wafer level testing, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice having an upper surface, each of said plurality of integrated circuit dice having a first edge at the upper surface and having a second edge at the upper surface, said plurality of integrated circuit dice being formed on said semiconductor substrate and being separated by a plurality of dicing lanes, each of said plurality of integrated circuit dice having a plurality of bonding pads; a first plurality of wafer contact pads formed on said semiconductor substrate; a first wafer conductor coupled to said first plurality of wafer contact pads and coupled to a first predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice, said first wafer conductor having a first linear segment running a full length of a first one of the plurality of dicing lanes, having a second linear segment running the full length of a second one of the plurality of dicing lanes, having a third linear segment overlying a first one of the plurality of dice wherein the third linear segment crosses both the first edge and the second edge of the first one of the plurality of dice, and having a fourth linear segment overlying a second one of the plurality of dice wherein the fourth linear segment crosses both the first edge and the second edge of the second one of the plurality of dice, wherein for the first wafer conductor the first linear segment is parallel to the second linear segment, the third linear segment is parallel to the fourth linear segment, and the first linear segment is perpendicular to the third linear segment; a second plurality of wafer contact pads formed on said semiconductor substrate; and a second wafer conductor coupled to said second plurality of wafer contact pads and coupled to a second predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice, said second wafer conductor having a first linear segment running the full length of a third one of the plurality of dicing lanes, having a second linear segment running the full length of a fourth one of the plurality of dicing lanes, having a third linear segment overlying the first one of the plurality of dice wherein the third linear segment crosses both the first edge and the second edge of the first one of the plurality of dice, and having a fourth linear segment overlying the second one of the plurality of dice wherein the fourth linear segment crosses both the first edge and the second edge of the second one of the plurality of dice, wherein for the second wafer conductor the first linear segment is parallel to the second linear segment, the third linear segment is parallel to the fourth linear segment, and the first linear segment is perpendicular to the third linear segment.

Claim 15

Independent Claim 495 words

An apparatus for performing wafer level testing, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice having an upper surface, each of said plurality of integrated circuit dice having a first edge at the upper surface and having a second edge at the upper surface, said plurality of integrated circuit dice being formed on said semiconductor substrate and being separated by a plurality of dicing lanes, each of said plurality of integrated circuit dice having a plurality of bonding pads; a first plurality of wafer contact pads formed on said semiconductor substrate; a first wafer conductor coupled to said first plurality of wafer contact pads and coupled to a first predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice, said first wafer conductor having a first linear segment running a full length of a first one of the plurality of dicing lanes, having a second linear segment running the full length of a second one of the plurality of dicing lanes, having a third linear segment overlying a first one of the plurality of dice wherein the third linear segment crosses both the first edge and the second edge of the first one of the plurality of dice, and having a fourth linear segment overlying a second one of the plurality of dice wherein the fourth linear segment crosses both the first edge and the second edge of the second one of the plurality of dice, wherein for the first wafer conductor the first linear segment is parallel to the second linear segment, the third linear segment is parallel to the fourth linear segment, and the first linear segment is perpendicular to the third linear segment; a second plurality of wafer contact pads formed on said semiconductor substrate; and a second wafer conductor coupled to said second plurality of wafer contact pads and coupled to a second predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice, said second wafer conductor having a first linear segment running the full length of a third one of the plurality of dicing lanes, having a second linear segment running the full length of a fourth one of the plurality of dicing lanes, having a third linear segment overlying the first one of the plurality of dice wherein the third linear segment crosses both the first edge and the second edge of the first one of the plurality of dice, and having a fourth linear segment overlying the second one of the plurality of dice wherein the fourth linear segment crosses both the first edge and the second edge of the second one of the plurality of dice, wherein for the second wafer conductor the first linear segment is parallel to the second linear segment, the third linear segment is parallel to the fourth linear segment, and the first linear segment is perpendicular to the third linear segment.

Claim 16

Dependent Claim 51 words

An apparatus as in claim 13, wherein a first power supply voltage is applied to said first plurality of wafer contact pads, and a second power supply voltage is applied to said second plurality of wafer contact pads, in order to perform a test of the plurality of integrated circuit dice.

Claim 17

Dependent Claim 13 words

An apparatus as in claim 14, wherein the test is a burn-in test.

Claim 18

Dependent Claim 19 words

An apparatus as in claim 15, wherein each of said plurality of integrated circuit dice is a data processor.

Claim 19

Dependent Claim 188 words

An apparatus as in claim 14, wherein the apparatus further comprises: a third wafer contact pad formed on said semiconductor substrate; a third wafer conductor coupled to said third wafer contact pad and to said plurality of integrated circuit dice, said third wafer conductor being formed overlying the upper surface of at least one of the plurality of integrated circuit dice, said third wafer conductor conducting a reset signal; a fourth wafer contact pad formed on said semiconductor substrate; a fourth wafer conductor coupled to said fourth wafer contact pad and to said plurality of integrated circuit dice, said fourth wafer conductor being formed overlying the upper surface of the at least one of the plurality of integrated circuit dice, said fourth wafer conductor conducting a clock signal; a fifth wafer contact pad formed on said semiconductor substrate; and a fifth wafer conductor coupled to said fifth wafer contact pad and to said plurality of integrated circuit dice, said fifth wafer conductor being formed overlying the upper surface of the at least one of the plurality of integrated circuit dice, said fifth wafer conductor conducting a data signal.

Claim 20

Dependent Claim 73 words

An apparatus as in claim 17, wherein the apparatus further comprises: a sixth wafer contact pad formed on said semiconductor substrate; and a sixth wafer conductor coupled to said sixth wafer contact pad and to said plurality of integrated circuit dice, said sixth wafer conductor being formed overlying the upper surface of the at least one of the plurality of integrated circuit dice, said sixth wafer conductor conducting a third power supply voltage.

Claim 21

Dependent Claim 120 words

An apparatus as in claim 13, wherein the apparatus further comprises: a first plurality of resistive elements, each of said first plurality of resistive elements having a first electrode which is coupled to said first wafer conductor, and having a second electrode which is coupled to the first predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice; and a second plurality of resistive elements, each of said second plurality of resistive elements having a first electrode which is coupled to said second wafer conductor, and having a second electrode which is coupled to the second predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice.

Claim 22

Dependent Claim 31 words

An apparatus as in claim 13, wherein the first predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice comprises: a first mini-pad contact.

Claim 23

Dependent Claim 31 words

An apparatus as in claim 20, wherein the second predetermined one of the plurality of bonding pads on each of said plurality of integrated circuit dice comprises: a second mini-pad contact.

Claim 24

Dependent Claim 24 words

An apparatus as in claim 13, wherein each of said plurality of integrated circuit dice comprises: a storage circuit for storing test result information.

Claim 25

Dependent Claim 45 words

An apparatus as in claim 13, wherein each of said plurality of integrated circuit dice comprises: a storage means for storing a value, the value representing a unique location on said semiconductor substrate, each of said plurality of integrated circuit dice otherwise being logically identical.

Claim 26

Dependent Claim 98 words

An apparatus as in claim 13, wherein the apparatus further comprises: a test fixture; said test fixture comprising: a bottom plate for holding said semiconductor substrate; a top plate; coupling means for physically coupling the top plate to the bottom plate while said semiconductor substrate is held between the top plate and the bottom plate; an edge connector coupled to one of the bottom and top plates; first conductive means for electrically coupling said first wafer contact pad to the edge connector; and second conductive means for electrically coupling said second wafer contact pad to the edge connector.

Claim 27

Dependent Claim 32 words

An apparatus as in claim 24, wherein said first conductive means includes a first pin, said second conductive means includes a second pin, and said coupling means includes a plurality of screws.

Claim 28

Dependent Claim 182 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice being formed on said semiconductor substrate; a bonding pad contact being formed on a first one of the plurality of integrated circuit dice, said bonding pad contact providing bonding contact to the first one of the plurality of integrated circuit dice after singulation of the semiconductor wafer; a mini-pad contact being formed on the first one of the plurality of integrated circuit dice, said mini-pad contact being coupled to said bonding pad contact, said mini-pad contact providing bonding contact to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer; and a wafer conductor, coupled to the first one of the plurality of integrated circuit dice by way of the mini-pad contact before singulation of the semiconductor wafer, the wafer conductor providing a signal to the first one of the plurality of integrated circuit dice in order to perform a test on the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer.

Claim 29

Dependent Claim 182 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of integrated circuit dice being formed on said semiconductor substrate; a bonding pad contact being formed on a first one of the plurality of integrated circuit dice, said bonding pad contact providing bonding contact to the first one of the plurality of integrated circuit dice after singulation of the semiconductor wafer; a mini-pad contact being formed on the first one of the plurality of integrated circuit dice, said mini-pad contact being coupled to said bonding pad contact, said mini-pad contact providing bonding contact to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer; and a wafer conductor, coupled to the first one of the plurality of integrated circuit dice by way of the mini-pad contact before singulation of the semiconductor wafer, the wafer conductor providing a signal to the first one of the plurality of integrated circuit dice in order to perform a test on the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer.

Claim 30

Dependent Claim 41 words

A semiconductor wafer as in claim 26, wherein the first one of the plurality of integrated circuit dice comprises: a storage circuit for storing a result of the test performed on the first one of the plurality of integrated circuit dice.

Claim 31

Dependent Claim 18 words

A semiconductor wafer as in claim 27, wherein said storage circuit comprises: at least one non-volatile memory cell.

Claim 32

Dependent Claim 17 words

A semiconductor wafer as in claim 27, wherein the result of the test includes a pass/fail indicator.

Claim 33

Dependent Claim 25 words

A semiconductor wafer as in claim 29, wherein the result of the test includes failure information when the pass/fail indicator indicates that the test failed.

Claim 34

Dependent Claim 18 words

A semiconductor wafer as in claim 30, wherein the failure information includes which portion of the test failed.

Claim 35

Dependent Claim 148 words

A semiconductor wafer as in claim 26, wherein the signal is a first power supply signal, and wherein the semiconductor wafer further comprises: a second wafer conductor, coupled to the first one of the plurality of integrated circuit dice, said second wafer conductor providing a second power supply voltage to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer; and a third wafer conductor, coupled to the first one of the plurality of integrated circuit dice, said third wafer conductor providing a test initiation signal to the first one of the plurality of integrated circuit dice, the test initiation signal initiating a test on the first one of the plurality of integrated circuit dice, the test being performed before singulation of the semiconductor wafer, the test producing a test result for the first one of the plurality of integrated circuit dice.

Claim 36

Dependent Claim 16 words

A semiconductor wafer as in claim 32, wherein the test initiation signal is a reset signal.

Claim 37

Dependent Claim 50 words

A semiconductor wafer as in claim 32, further comprising: a fourth wafer conductor, coupled to the first one of the plurality of integrated circuit dice, said fourth wafer conductor providing a clock signal to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer.

Claim 38

Dependent Claim 50 words

A semiconductor wafer as in claim 34, further comprising: a fifth wafer conductor, coupled to the first one of the plurality of integrated circuit dice, said fifth wafer conductor providing a data signal to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer.

Claim 39

Dependent Claim 52 words

A semiconductor wafer as in claim 35, further comprising: a sixth wafer conductor, coupled to the first one of the plurality of integrated circuit dice, said sixth wafer conductor providing a third power supply voltage to the first one of the plurality of integrated circuit dice before singulation of the semiconductor wafer.

Claim 40

Dependent Claim 22 words

A semiconductor wafer as in claim 26, wherein the first one of the plurality of integrated circuit dice is a data processor.

Claim 41

Dependent Claim 13 words

A semiconductor wafer as in claim 26, wherein the test is a built-in-self-test.

Claim 42

Dependent Claim 269 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of data processors being formed on said semiconductor substrate; and a first wafer conductor, coupled to said plurality of data processors, said first wafer conductor providing a first power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; a second wafer conductor, coupled to said plurality of data processors, said second wafer conductor providing a second power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; a third wafer conductor, coupled to said plurality of data processors, said third wafer conductor providing a first signal to said plurality of data processors, the first signal initiating a test on each of said plurality of data processors, the test being performed before singulation of the semiconductor wafer, the test producing a test result on each of said plurality of data processors; a fourth wafer conductor, coupled to said plurality of data processors, said fourth wafer conductor providing a second signal to said plurality of data processors before singulation of the semiconductor wafer; a fifth wafer conductor, coupled to said plurality of data processors, said fifth wafer conductor providing a data signal to said plurality of data processors before singulation of the semiconductor wafer; and a sixth wafer conductor, coupled to said plurality of data processors, said sixth wafer conductor providing a third power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; wherein each of said plurality of data processors comprises: at least one non-volatile memory cell for storing the test result.

Claim 43

Dependent Claim 269 words

A semiconductor wafer, comprising: a semiconductor substrate having an upper major surface; a plurality of data processors being formed on said semiconductor substrate; and a first wafer conductor, coupled to said plurality of data processors, said first wafer conductor providing a first power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; a second wafer conductor, coupled to said plurality of data processors, said second wafer conductor providing a second power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; a third wafer conductor, coupled to said plurality of data processors, said third wafer conductor providing a first signal to said plurality of data processors, the first signal initiating a test on each of said plurality of data processors, the test being performed before singulation of the semiconductor wafer, the test producing a test result on each of said plurality of data processors; a fourth wafer conductor, coupled to said plurality of data processors, said fourth wafer conductor providing a second signal to said plurality of data processors before singulation of the semiconductor wafer; a fifth wafer conductor, coupled to said plurality of data processors, said fifth wafer conductor providing a data signal to said plurality of data processors before singulation of the semiconductor wafer; and a sixth wafer conductor, coupled to said plurality of data processors, said sixth wafer conductor providing a third power supply voltage to said plurality of data processors before singulation of the semiconductor wafer; wherein each of said plurality of data processors comprises: at least one non-volatile memory cell for storing the test result.

Claim 44

Dependent Claim 17 words

A semiconductor wafer as in claim 39, wherein the result of the test includes a pass/fail indicator.

Claim 45

Dependent Claim 25 words

A semiconductor wafer as in claim 39, wherein the result of the test includes failure information when the pass/fail indicator indicates that the test failed.

Claim 46

Dependent Claim 18 words

A semiconductor wafer as in claim 41, wherein the failure information includes which portion of the test failed.

Claim 47

Dependent Claim 15 words

A semiconductor wafer as in claim 39, wherein the first signal is a reset signal.

Claim 48

Dependent Claim 15 words

A semiconductor wafer as in claim 39, wherein the second signal is a clock signal.

Claim 49

Dependent Claim 19 words

A semiconductor wafer as in claim 39, wherein each of said plurality of data processors has a unique identifier.

Claim 50

Dependent Claim 28 words

A semiconductor wafer as in claim 45, wherein each unique identifier for each of said plurality of data processors corresponds to a predetermined location on the semiconductor wafer.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1999-04-02	1999-10-02	2000-04-02	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2003-04-02	2003-10-02	2004-04-02	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2007-04-02	2007-10-02	2008-04-02	$7700.00	Window Closed / Lapsed

Apparatus for performing wafer level testing of integrated circuit dice

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