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US5455455A Expired / Lapsed US ⏱️ 0.0 years remaining

Methods for producing packaged integrated circuit devices and packaged integrated circuit devices produced thereby

Assignee: Fotonation Ltd
•
Filing: 1992-09-14
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Granted: 1995-10-03
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Expires: 2012-09-14
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Abstract

Abstract A method for producing integrated circuit devices including the steps of producing a plurality of integrated circuits on a wafer, each of the integrated circuits including a multiplicity of pads and thereafter slicing the wafer, thereby to define a plurality of integrated circuit elements, and wherein the step of slicing exposes sectional surfaces of the multiplicity of pads. Apparatus for carrying out the method and integrated circuit devices are also described.

Inventors

  • 👤 Peirre Badehi

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 12:43
CPC Classifications
H; H10; H10W; H10W90/00; H10P; H10P54/00; H10W72/00; H10W72/01; H10W72/0198; H10W72/60; H10W72/834; H10W90/20; H10W90/288

Claims Analysis

Total Claims: 51
Claim 1
Independent Claim 111 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits on a wafer having first and second planar surfaces, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on said edges and on said first and second planar surfaces with generally the same protective sealant and waferwise attaching to said protective sealant adjacent both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit devices.
Claim 2
Independent Claim 111 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits on a wafer having first and second planar surfaces, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on said edges and on said first and second planar surfaces with generally the same protective sealant and waferwise attaching to said protective sealant adjacent both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit devices.
Claim 3
Dependent Claim 20 words
A method according to claim 1 and wherein the step of slicing exposes sectional surfaces of said multiplicity of pads.
Claim 4
Dependent Claim 38 words
A method according to claim 2 and wherein the step of slicing cuts pads associated with a pair of adjacent integrated circuits, thereby to simultaneously define electrical contact regions for both of said pair of adjacent integrated circuits.
Claim 5
Dependent Claim 40 words
A method according to claim 1 and also comprising the steps of providing a conductive layer over sliced edges of the integrated circuits and electrically separating portions of the conductive layer communicating with separate ones of said multiplicity of pads.
Claim 6
Dependent Claim 30 words
A method according to claim 4 and wherein an electrical insulative layer is present along the sliced edges of said integrated circuits before the step of providing a conductive layer.
Claim 7
Dependent Claim 27 words
A method according to claim 4 and wherein said step of providing a conductive layer comprises forming a conductive coating over non-edge portions of the integrated circuit.
Claim 8
Dependent Claim 13 words
A method according to claim 1 and wherein said protective sealant comprises epoxy.
Claim 9
Dependent Claim 29 words
A method according to claim 1 and wherein a thermal contact to a heat sink is formed on at least one outer planar surface of said integrated circuit devices.
Claim 10
Dependent Claim 23 words
A method according to claim 1 and also comprising the step of providing an integrally formed ground plane in said integrated circuit devices.
Claim 11
Dependent Claim 28 words
A method according to claim 1 and wherein a plurality of wafers bearing integrated circuits are joined together in a stacked arrangement to provide multi-layer integrated circuit devices.
Claim 12
Dependent Claim 24 words
A method according to claim 1 and also comprising the step of mounting the integrated circuit devices along their edges onto a mounting element.
Claim 13
Dependent Claim 22 words
A method according to claim 1 and wherein said protective material is transparent to radiation which is used for erasing EPROM devices.
Claim 14
Dependent Claim 23 words
A method according to claim 1 and also comprising anti-corrosion treatment of electrical contacts of said integrated circuit devices including exposed pad edges.
Claim 15
Dependent Claim 12 words
An integrated circuit device constructed according to the method of claim 1.
Claim 16
Dependent Claim 27 words
An integrated circuit device according to claim 14 and wherein said integrated circuit device includes a plurality of semiconductor portions which are mutually isolated from each other.
Claim 17
Dependent Claim 28 words
An integrated circuit device according to claim 14 and comprising at least one semiconductor element which is mechanically and electrically isolated from the exterior surface of the device.
Claim 18
Dependent Claim 28 words
An integrated circuit device according to claim 1 and also comprising an integrally formed thermal contact to a heat sink on an outer planar surface of the device.
Claim 19
Dependent Claim 16 words
An integrated circuit device according to claim 1 and also comprising an integrally formed ground plane.
Claim 20
Dependent Claim 36 words
An integrated circuit device according to claim 14 and wherein conductive strips are formed on the outside surface of said integrated circuit device for interconnecting said exposed sections of conductive pads at a plurality of edges.
Claim 21
Independent Claim 102 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits having planar surfaces on a wafer, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on their edges and on their planar surfaces with generally the same protective sealant, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit elements, and wherein the step of slicing exposes sectional surfaces of said multiplicity of pads.
Claim 22
Independent Claim 102 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits having planar surfaces on a wafer, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on their edges and on their planar surfaces with generally the same protective sealant, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit elements, and wherein the step of slicing exposes sectional surfaces of said multiplicity of pads.
Claim 23
Dependent Claim 58 words
A method according to claim 20 and wherein the step of slicing cuts a plurality of pads including some which communicate with one of a pair of adjacent integrated circuits and others which communicate with another of the pair of adjacent integrated circuits, thereby to define electrical contact regions for both of said pair of adjacent integrated circuits.
Claim 24
Dependent Claim 13 words
A method according to claim 20 and wherein said protective sealant comprises epoxy.
Claim 25
Independent Claim 124 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits on a wafer having first and second planar surfaces, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on said edges with epoxy and waferwise bonding onto both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit devices, and wherein prior to said slicing step, the integrated circuits are surrounded on their planar surfaces by said layer of protective material and on their edges by said epoxy.
Claim 26
Independent Claim 124 words
A method of producing packaged integrated circuit devices comprising the steps of: producing a plurality of integrated circuits on a wafer having first and second planar surfaces, each of the integrated circuits comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said integrated circuits on said edges with epoxy and waferwise bonding onto both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; and thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged integrated circuit devices, and wherein prior to said slicing step, the integrated circuits are surrounded on their planar surfaces by said layer of protective material and on their edges by said epoxy.
Claim 27
Dependent Claim 20 words
A method according to claim 23 and wherein the step of slicing exposes sectional surfaces of said multiplicity of pads.
Claim 28
Dependent Claim 38 words
A method according to claim 24 and wherein the step of slicing cuts pads associated with a pair of adjacent integrated circuits, thereby to simultaneously define electrical contact regions for both of said pair of adjacent integrated circuits.
Claim 29
Dependent Claim 58 words
A method according to claim 23 and wherein the step of slicing cuts a plurality of pads including some which communicate with one of a pair of adjacent integrated circuits and others with communication with another of the pair of adjacent integrated circuits, thereby to define electrical contact regions for both of said pair of adjacent integrated circuits.
Claim 30
Dependent Claim 41 words
A method according to claim 23 and also comprising the steps of providing a conductive layer over sliced edges of the packaged integrated circuits and electrically separating portions of the conductive layer communicating with separate ones of said multiplicity of pads.
Claim 31
Dependent Claim 31 words
A method according to claim 27 and wherein an electrical insulative layer is present along the sliced edges of said packaged integrated circuits before the step of providing a conductive layer.
Claim 32
Dependent Claim 29 words
A method according to claim 27 and wherein said step of providing a conductive layer comprises forming a conductive coating also over non-edge portions of the packaged integrated circuit.
Claim 33
Dependent Claim 22 words
A method according to claim 23 and wherein said separating step includes the steps of scribing and subsequent etching of the wafer.
Claim 34
Dependent Claim 33 words
A method according to claim 23 and wherein said slicing step is carried out at locations whereby the silicon substrate is not exposed at the sliced edges of the resulting packaged integrated circuits.
Claim 35
Dependent Claim 30 words
A method according to claim 23 and wherein a thermal contact to a heat sink is formed on at least one outer planar surface of said packaged integrated circuit devices.
Claim 36
Dependent Claim 23 words
A method according to claim 23 and also comprising the step of providing an integrally formed ground plane in said integrated circuit devices.
Claim 37
Dependent Claim 29 words
A method according to claim 23 and wherein a plurality of wafers bearing integrated circuits are joined together in a stacked arrangement to provide packaged multi-layer integrated circuit devices.
Claim 38
Dependent Claim 25 words
A method according to claim 23 and also comprising the step of mounting the packaged integrated circuit devices along their edges onto a mounting element.
Claim 39
Dependent Claim 22 words
A method according to claim 23 and wherein said protective material is transparent to radiation which is used for erasing EPROM devices.
Claim 40
Dependent Claim 23 words
A method according to claim 23 and also comprising anti-corrosion treatment of electrical contacts of said integrated circuit devices including exposed pad edges.
Claim 41
Independent Claim 141 words
A method of producing packaged semiconductor devices comprising the steps of: producing a plurality of semiconductor elements on a wafer having first and second planar surfaces, each of the semiconductor elements comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said semiconductor elements at said edges and said first and second planar surfaces with generally the same protective sealant and waferwise attaching to said protective sealant adjacent both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged semiconductor element devices, each comprising a mechanically protective and electrically insulative package having a plurality of exposed cross-sections of said pads exposed at edges thereof; and providing electrical connections between said exposed cross-sections and external circuitry.
Claim 42
Independent Claim 141 words
A method of producing packaged semiconductor devices comprising the steps of: producing a plurality of semiconductor elements on a wafer having first and second planar surfaces, each of the semiconductor elements comprising a multiplicity of pads; separating the integrated circuits from each other so as to define edges thereof and generally surrounding said semiconductor elements at said edges and said first and second planar surfaces with generally the same protective sealant and waferwise attaching to said protective sealant adjacent both of said surfaces a layer of protective material, thereby producing a waferwise sandwich; thereafter slicing the waferwise sandwich, thereby to define a plurality of prepackaged semiconductor element devices, each comprising a mechanically protective and electrically insulative package having a plurality of exposed cross-sections of said pads exposed at edges thereof; and providing electrical connections between said exposed cross-sections and external circuitry.
Claim 43
Dependent Claim 13 words
A method according to claim 38 and wherein said protective sealant comprises epoxy.
Claim 44
Dependent Claim 106 words
An integrated circuit device comprising: a packaged integrated circuit assembly comprising a semiconductor substrate having at least first and second patterned metal layers formed over said semiconductor substrate, defining therewith semiconductor circuit elements having edges, said semiconductor substrate being generally surrounded along its edges and over said first and second patterned metal layers by generally the same protective sealant, said integrated circuit assembly having top and bottom surfaces formed of electrically insulative and mechanically protective material and electrically insulative edge surfaces defined by said protective sealant and having exposed sections of conductive pads formed by at least one of said first and second patterned metal layers.
Claim 45
Dependent Claim 106 words
An integrated circuit device comprising: a packaged integrated circuit assembly comprising a semiconductor substrate having at least first and second patterned metal layers formed over said semiconductor substrate, defining therewith semiconductor circuit elements having edges, said semiconductor substrate being generally surrounded along its edges and over said first and second patterned metal layers by generally the same protective sealant, said integrated circuit assembly having top and bottom surfaces formed of electrically insulative and mechanically protective material and electrically insulative edge surfaces defined by said protective sealant and having exposed sections of conductive pads formed by at least one of said first and second patterned metal layers.
Claim 46
Dependent Claim 25 words
An integrated circuit device according to claim 40 and wherein said integrated circuit assembly comprises a plurality of semiconductor chips bonded together in stacked arrangement.
Claim 47
Dependent Claim 26 words
An integrated circuit device according to claim 41 and wherein said plurality of semiconductor chips are mutually insulated from each other within said integrated circuit assembly.
Claim 48
Dependent Claim 34 words
An integrated circuit device according to claim 40 and also comprising conductive strips formed on the outer surface of the integrated circuit device and in electrical communication with said exposed sections of conductive pads.
Claim 49
Dependent Claim 22 words
An integrated circuit device according to claim 43 and wherein said conductive strips extend along the edges of said integrated circuit device.
Claim 50
Dependent Claim 23 words
An integrated circuit device according to claim 44 and wherein said conductive strips extend also to planar surfaces of said integrated circuit device.
Claim 51
Dependent Claim 41 words
An integrated circuit device according to claim 40 and wherein conductive strips are formed on the outside surface of said integrated circuit device for interconnecting said exposed sections of conductive pads of a plurality of dies, thereby providing electrical interconnection therebetween.

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3.5 Years (Year 4) 1998-10-02 1999-04-03 1999-10-03 $2000.00 Window Closed / Lapsed
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