Cryopump water drain

Claim 2

A cryopump having a cryogenic refrigerator and cryopumping surfaces cooled by the refrigerator for condensing gases thereon, the cryopump comprising: a vacuum housing enclosing cryopumping surfaces and having a frontal opening; a liquid accumulator to which the cryopump housing is mounted at its frontal opening such that the housing is angled and cryopumping surfaces are angled to drain liquid released therefrom to the accumulator; an exhaust port located at a base of the accumulator; and a pressure relief valve coupled to the exhaust port for exhausting fluids released by the cryopumping surfaces after warming.

Claim 3

A cryopump according to claim 1, further comprising a filter standpipe coupled to the exhaust port for removing debris.

Claim 4

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly under neath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas tube being located away from the drain hole and having side ports for directing liquid towards the drain hole.

Claim 5

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly under neath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas tube being located away from the drain hole and having side ports for directing liquid towards the drain hole.

Claim 6

A cryopump according to claim 3, wherein the drain filter assembly comprises: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port.

Claim 7

A cryopump according to claim 4, further comprising: an adhesion rod extending downwardly from the conically shaped screen into the filter standpipe, the adhesion rod having a surface tension wherein liquid flowing through the screen adheres to the adhesion rod, preventing liquid from passing through the sides of the filter standpipe onto the lower surface of the vacuum vessel.

Claim 8

A cryopump according to claim 5 further comprising; a cap placed over the conically shaped screen; a plurality of support rods each having an upper end and a lower end, the upper ends being coupled to the cap; a plurality of bolt rods having an upper end and a lower end, the lower ends being secured to the bottom of the vacuum vessel; and an annulus element surrounding the filter standpipe, wherein the lower ends of the plurality of support rods are secured to one side of the annulus and the upper ends of the plurality of bolt rods are secured at an opposite side.

Claim 9

A cryopump according to claim 3, wherein the drain hole has a downwardly directed lip ensuring that substantially all liquid falls from the radiation shield.

Claim 10

A cryopump according to claim 3, wherein the purge gas tube has at least two holes therein for emitting purge gas into the vacuum vessel.

Claim 11

A cryopump having a cryogenic refrigerator and cryopumping surfaces cooled by the refrigerator for condensing gases, the cryopump comprising: a radiation shield surrounding the cyropumping surfaces, the radiation shield having a funnel shaped bottom surface for collecting liquids released from the cryopumping surfaces; a drain hole at the bottom of the funneled radiation shield for removing liquid; a purge gas tube extending upwardly through the radiation shield for emitting purge gas, the purge gas tube being located away from the drain hole and having side parts for directing liquid towards the drain hole; an exhaust port for receiving substantially all liquid released from the drain hole; and a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopanel surfaces after warming.

Claim 12

A cryopump having a cryogenic refrigerator and cryopumping surfaces cooled by the refrigerator for condensing gases, the cryopump comprising: a radiation shield surrounding the cyropumping surfaces, the radiation shield having a funnel shaped bottom surface for collecting liquids released from the cryopumping surfaces; a drain hole at the bottom of the funneled radiation shield for removing liquid; a purge gas tube extending upwardly through the radiation shield for emitting purge gas, the purge gas tube being located away from the drain hole and having side parts for directing liquid towards the drain hole; an exhaust port for receiving substantially all liquid released from the drain hole; and a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopanel surfaces after warming.

Claim 17

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris form the liquid, the drain filter assembly comprising: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas directing liquid towards the drain hole.

Claim 18

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris form the liquid, the drain filter assembly comprising: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas directing liquid towards the drain hole.

Claim 19

A cryopump according to claim 12, further comprising: an adhesion rod extending downwardly from the conically shaped screen into the filter standpipe, the adhesion rod having a surface tension wherein liquid flowing through the screen adheres to the adhesion rod, preventing liquid from passing through the sides of the filter standpipe onto the lower surface of the vacuum vessel.

Claim 20

A cryopump according to claim 13 further comprising: a cap placed over the conically shaped screen; a plurality of support rods each having an upper end and a lower end, the upper ends being coupled to the cap; a plurality of bolt rods having an upper end and a lower end, the lower ends being secured to the bottom of the vacuum vessel; and an annulus element surround the filter standpipe, wherein the lower ends of the plurality of support rods are secured to one side of the annulus and the upper ends of the plurality of bolt rods are secured at an opposite side.

Claim 21

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cyropumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield, the drain hole having a downwardly directed lip ensuring that substantially all liquid falls from the radiation shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas directing liquid towards the drain hole.

Claim 22

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cyropumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield, the drain hole having a downwardly directed lip ensuring that substantially all liquid falls from the radiation shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas in the vessel, the purge gas directing liquid towards the drain hole.

Claim 23

A cryopump according to claim 15, wherein the drain filter assembly comprises: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port.

Claim 24

A cryopump according to claim 16, further comprising: an adhesion rod extending downwardly from the conically shaped screen into the filter standpipe, the adhesion rod having a surface tension wherein liquid flowing through the screen adheres to the adhesion rod, preventing liquid from passing through the sides of the filter standpipe onto the lower surface of the vacuum vessel.

Claim 25

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole int he shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube, having at least two holes therein, extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas into the vacuum vessel, the purge gas directing liquid towards the drain hole.

Claim 26

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole int he shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid; a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces; and a purge gas tube, having at least two holes therein, extending upwardly from a bottom surface of the vacuum vessel through the bottom surface of the sloped radiation shield for emitting purge gas into the vacuum vessel, the purge gas directing liquid towards the drain hole.

Claim 27

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid, the drain filter assembly comprising: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port; and a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces.

Claim 28

A cryopump comprising: a vacuum vessel; a refrigerator; cryopumping surfaces cooled by the refrigerator for condensing gases in the vessel; an exhaust port in a base of the vacuum vessel; a radiation shield surrounding the cryopumping surfaces, the radiation shield having a funneled bottom surface sloping towards a drain hole in the shield; a drain filter assembly underneath the drain hole for transferring liquid to the exhaust port and removing debris from the liquid, the drain filter assembly comprising: a conically shaped screen controlling the flow of liquid released from the cryopumping surfaces; and a filter standpipe underneath the conically-shaped screen extending upwardly from the exhaust port; and a pressure relief valve coupled to the exhaust port for exhausting gases released by the cryopumping surfaces.

Claim 29

A cryopump according to claim 19, further comprising: an adhesion rod extending downwardly from the conically shaped screen into the filter standpipe, the adhesion rod having a surface tension wherein liquid flowing through the screen adheres to the adhesion rod, preventing liquid form passing through the sides of the filter standpipe onto the lower surface of the vacuum vessel.