US4718240A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cryopump regeneration method and apparatus
Assignee: Azenta Inc
•
Filing: 1987-01-07
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Granted: 1988-01-12
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Expires: 2007-01-07
Abstract
Abstract A cryopump is regenerated by means of an ejector pump which draws gas from the cryopump as the pump is warmed. The ejector is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation.
Inventors
- 👤 Bruce R. Andeen
- 👤 Robert C. Pandorf
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:31
CPC Classifications
F; F04; F04B; F04B37/00; F04B37/06; F04B37/08; F04B37/085; Y; Y10; Y10S; Y10S417/00; Y10S417/901
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
47 words
A method of regenerating a cryopump comprising warming the cryopump to evaporate or release previously condensed or adsorbed gases and simultaneously evacuating the cryopump with an ejector pump such that the evaporated or released gases are rapidly removed from the cryopump as they are evaporated or released.
Claim 2
Independent Claim
47 words
A method of regenerating a cryopump comprising warming the cryopump to evaporate or release previously condensed or adsorbed gases and simultaneously evacuating the cryopump with an ejector pump such that the evaporated or released gases are rapidly removed from the cryopump as they are evaporated or released.
Claim 3
Independent Claim
54 words
A method of regenerating a cryopump comprising warming the entire cryopump to evaporate or release previously condensed or adsorbed gases and simultanesouly evacuating the cryopump with an ejector pump actuated by a substantially inert fluid such that the evaporated or released gases are rapidly removed from the cyropump as they are evaporated or released.
Claim 4
Independent Claim
54 words
A method of regenerating a cryopump comprising warming the entire cryopump to evaporate or release previously condensed or adsorbed gases and simultanesouly evacuating the cryopump with an ejector pump actuated by a substantially inert fluid such that the evaporated or released gases are rapidly removed from the cyropump as they are evaporated or released.
Claim 5
Dependent Claim
11 words
The method of claim 2 wherein the inert fluid is nitrogen.
Claim 6
Dependent Claim
13 words
The method of claim 3 further comprising purging the cryopump with nitrogen gas.
Claim 7
Dependent Claim
14 words
The method of claim 2 further comprising purging the cryopump with an inert gas.
Claim 8
Dependent Claim
54 words
A vacuum system comprising: a cryopump for evacuating a chamber; an ejector pump in direct communication with the cryopump through a valve for removing gas from the cryopump during regeneration; and a source of pressurized, substantially inert gas in communication with the ejector pump for use as the actuating fluid in the ejector pump.
Claim 9
Dependent Claim
54 words
A vacuum system comprising: a cryopump for evacuating a chamber; an ejector pump in direct communication with the cryopump through a valve for removing gas from the cryopump during regeneration; and a source of pressurized, substantially inert gas in communication with the ejector pump for use as the actuating fluid in the ejector pump.
Claim 10
Dependent Claim
15 words
A vacuum system as claimed in claim 6 wherein the substantially inert gas is nitrogen.
Claim 11
Dependent Claim
22 words
A vacuum system as claimed in claim 7 further comprising means for applying nitrogen gas to the cryopump to purge the cryopump.
Claim 12
Dependent Claim
19 words
A vacuum system as claimed in claim 6 further comprising means for applying a purge gas to the cryopump.
Claim 13
Independent Claim
55 words
A method of regenerating a cryopump comprising warming the entire cryopump to evaporate or release previously condensed or absorbed gases and simultaneosuly evacuating the cryopump with an ejector vacuum pump such that the evaporated or released gases are rapidly removed from the cryopump as they are evaporated or released and mixed with an inert gas.
Claim 14
Independent Claim
55 words
A method of regenerating a cryopump comprising warming the entire cryopump to evaporate or release previously condensed or absorbed gases and simultaneosuly evacuating the cryopump with an ejector vacuum pump such that the evaporated or released gases are rapidly removed from the cryopump as they are evaporated or released and mixed with an inert gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-01-11 | 1991-07-13 | 1992-01-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-01-11 | 1995-07-13 | 1996-01-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-01-11 | 1999-07-13 | 2000-01-12 | $7700.00 | Window Closed / Lapsed |