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US5222329A
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Acoustical method and system for detecting and controlling chemical-mechanical polishing (CMP) depths into layers of conductors, semiconductors, and dielectric materials
Assignee: Micron Technology Inc
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Filing: 1992-03-26
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Granted: 1993-06-29
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Expires: 2012-03-26
Abstract
Abstract A method and system for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal of the selected material, such as tungsten, at the material-underlayer interface. In accordance with this novel method and system, the selected material such as a surface metallization layer is polished to initiate removal thereof in the direction of the material-underlayer interface. A microphone is positioned at a predetermined distance from the wafer to sense acoustical waves generated when the depth of material removal reaches a certain determinable distance from the interface to thereby generate output detection signals. These output detection signals are amplified and then applied to a spectrum analyzer which operates to analyze the sound intensity-versus-frequency characteristic of the acoustical waves received by the microphone. The spectrum analyzer operates to drive a CMP computer which in turn controls the operation of a CMP polishing machine. The CMP polishing motor terminates polishing of the selected material a predetermined time after a desired output signals are received from the spectrum analyzer. The present invention is also directed to a method and system or measuring the thickness of certain materials by comparing acoustical signals in a spectrum analyzer with frequency characteristics of known materials of certain layer thicknesses.
Inventors
- 👤 Chris C. Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:45
CPC Classifications
B; B24; B24B; B24B37/00; B24B37/005; B24B37/013; B24B49/00; B24B49/003; B24B49/02; B24B49/04; G; G01; G01B; G01B17/00; G01B17/02; G01B17/025; G05; G05B; G05B19/00; G05B19/02; G05B19/18; G05B19/406; G05B19/4065
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
91 words
A method for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal at the material-underlayer interface, which comprises the steps of: a. polishing said material to initiate removal thereof toward said interface, b. sensing acoustical waves generated when a thickness of said selected material reaches a certain value, c. generating a detection signal in response to the sensed waves, and d. processing said detection signal to terminate said polishing when said material is removed from said supported underlayer.
Claim 2
Independent Claim
91 words
A method for controlling the depth of removal by polishing of a selected material on a supporting underlayer where it is desired to terminate removal at the material-underlayer interface, which comprises the steps of: a. polishing said material to initiate removal thereof toward said interface, b. sensing acoustical waves generated when a thickness of said selected material reaches a certain value, c. generating a detection signal in response to the sensed waves, and d. processing said detection signal to terminate said polishing when said material is removed from said supported underlayer.
Claim 3
Dependent Claim
24 words
The method defined in claim 1 wherein the sensing of said acoustical waves comprises positioning a microphone a predetermined distance from said material-underlayer interface.
Claim 4
Dependent Claim
67 words
The method defined in claim 2 wherein the processing of said detection signals includes: a. amplifying said detection signals received from said microphone, b. analyzing a frequency spectrum and sound intensity versus frequency characteristic of acoustical waves received from said interface to thereby generate output control signals, and c. utilizing said output control signals to terminate polishing of said selected material when said material/underlayer interface is reached.
Claim 5
Dependent Claim
52 words
The method defined in claim 3 wherein the utilization of said control signals to terminate polishing of said selected material includes the steps of: a. applying said control signals to a chemical-mechanical polishing (CMP) computer, and b. processing output signals from said chemical mechanical polishing computer to control a chemical-mechanical polishing machine.
Claim 6
Dependent Claim
46 words
The method defined in claim 1 wherein said selected material is selected from the group consisting of tungsten, titanium, tantalum, molybdenum, aluminum, titanium nitride, and titanium, and said underlayer is selected from the group consisting of borophosphosilicate glass, polycrystalline silicon, silicon dioxide, silicon nitride, and tetraethylorthosilicate.
Claim 7
Independent Claim
126 words
A system for controlling the depth of removal by polishing of a selected material on a supporting underlayer wherein said selected material and said supporting underlayer define a material-underlayer interface and where it is desired to terminate removal at the material-underlayer interface, including in combination: a. means for polishing said material to initiate removal thereof toward said interface, b. means adjacent to said polishing means for sensing acoustical waves generated when the thickness of said selected material reaches a certain value, c. means coupled to the means for sensing for generating a detection signal in response to the sensed waves, and d. means coupled to said generating means for processing said detection signal to terminate said polishing when said material is removed from said supporting underlayer.
Claim 8
Independent Claim
126 words
A system for controlling the depth of removal by polishing of a selected material on a supporting underlayer wherein said selected material and said supporting underlayer define a material-underlayer interface and where it is desired to terminate removal at the material-underlayer interface, including in combination: a. means for polishing said material to initiate removal thereof toward said interface, b. means adjacent to said polishing means for sensing acoustical waves generated when the thickness of said selected material reaches a certain value, c. means coupled to the means for sensing for generating a detection signal in response to the sensed waves, and d. means coupled to said generating means for processing said detection signal to terminate said polishing when said material is removed from said supporting underlayer.
Claim 9
Dependent Claim
26 words
The system defined in claim 6 wherein said means for sensing of said acoustical waves comprises a microphone located a predetermine distance from said material-underlayer interface.
Claim 10
Dependent Claim
85 words
The system defined in claim 7 wherein said means for processing of said detection signals includes: a. means for amplifying said detection signals received from said microphone, b. means coupled to said amplifying means for analyzing a frequency spectrum and sound intensity versus frequency characteristic of acoustical waves received from said microphone to thereby generate output control signals, and c. means coupled to said analyzing means for utilizing said output control signals to terminate polishing of said selected material when said material/underlayer interface is reached.
Claim 11
Dependent Claim
48 words
The system defined in claim 8 wherein said utilizing means includes: a. means for applying said control signals to a chemical-mechanical polishing computer, and b. means connected to said computer for processing output signals from said computer to control a polishing motor used, in polishing said selected material.
Claim 12
Dependent Claim
38 words
The system defined in claim 9 wherein said means for sensing said acoustical waves comprises a microphone located a predetermined distance from said material/underlayer interface and which is operated in the range of 20 Hertz to 20,000 Hertz.
Claim 13
Dependent Claim
41 words
The system defined in claim 9 wherein said means for sensing acoustical waves comprises a contact acoustical transducer such as a piezoelectric transducer attached to a wafer backside or wafer holder which holds the wafer in place during a CMP process.
Claim 14
Dependent Claim
38 words
The system defined in claim 6 wherein said means for sensing said acoustical waves comprises a microphone located a predetermined distance from said material/underlayer interface and which is operated in the range of 20 Hertz to 20,000 Hertz.
Claim 15
Dependent Claim
41 words
The system defined in claim 6 wherein said means for sensing acoustical waves comprises a contact acoustical transducer such as a piezoelectric transducer attached to a wafer backside or wafer holder which holds the wafer in place during a CMP process.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-06-28 | 1996-12-28 | 1997-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-06-28 | 2000-12-28 | 2001-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-06-28 | 2004-12-28 | 2005-06-29 | $7700.00 | Window Closed / Lapsed |