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Method of depositing hard wear-resistant coatings on substrates

Assignee: OC Oerlikon Balzers AG
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Filing: 1980-08-01
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Granted: 1982-08-24
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Expires: 2000-08-01
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Abstract

Abstract A method of depositing hard, wear-resistant coatings on workpieces and utility articles by evaporating a metal such as titanium in a reactive atmosphere. To make the coating hard as far as possible, wear resistant, and less susceptible to oxidation, the deposition is effected in an atmosphere containing nitrogen, oxygen and carbon, with the atomic number proportion of O to C ranging between 0.5 and 1.5. An evaporation by means of a low voltage arc discharge and the use of CO as the residual gas atmosphere are particularly advisable.

Inventors

  • 👤 Helmut Kaufmann

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 02:44
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/0021

Claims Analysis

Total Claims: 5
Claim 1
Independent Claim 84 words
A method of depositing a hard wear-resistant coating onto a substrate comprising: evaporating a metal in a nitrogen containing residual gas atmosphere to form the coating on the substrate; and simultaneously forming an electric gas discharge in the atmosphere to activate the residual gas; wherein the atmosphere simultaneously contains nitrogen, oxygen and carbon with the atomic number proportion of oxygen to carbon being between about 0.5 to 1.5; and wherein the metal is selected from the group which consists of titanium, zirconium and hafnium.
Claim 2
Independent Claim 84 words
A method of depositing a hard wear-resistant coating onto a substrate comprising: evaporating a metal in a nitrogen containing residual gas atmosphere to form the coating on the substrate; and simultaneously forming an electric gas discharge in the atmosphere to activate the residual gas; wherein the atmosphere simultaneously contains nitrogen, oxygen and carbon with the atomic number proportion of oxygen to carbon being between about 0.5 to 1.5; and wherein the metal is selected from the group which consists of titanium, zirconium and hafnium.
Claim 3
Dependent Claim 14 words
A method according to claim 1, wherein the residual gas atmosphere contains carbon monoxide.
Claim 4
Dependent Claim 32 words
A method according to claim 1, including applying a biasing voltage to the substrate, the metal and a cathode to produce a low voltage electric arc discharge in the residual gas atmosphere.
Claim 5
Dependent Claim 12 words
A method according to claim 1, including replacing the residual gas atmosphere.

References Cited (Backward Citations)

US3925187A Cited
US3988955A Cited
US3900592A Cited
JPS527831A Cited
JPS527879A Cited
US4226082A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1985-08-23 1986-02-22 1986-08-24 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1989-08-23 1990-02-22 1990-08-24 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1993-08-23 1994-02-22 1994-08-24 $7700.00 Window Closed / Lapsed

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