US3900592A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for coating a substrate to provide a titanium or zirconium nitride or carbide deposit having a hardness gradient which increases outwardly from the substrate
Assignee: Airco Inc
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Filing: 1973-07-25
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Granted: 1975-08-19
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Expires: 1993-07-25
Abstract
Abstract A method for coating a substrate with titanium nitride or titanium carbide or zirconium nitride or zirconium carbide is described wherein physical vapor deposition in a vacuum is used, and wherein the substrate is biased by an electrical potential and the composition of the deposit is changed by introducing a gas during the deposition to produce a hardness gradient in the deposit which increases outwardly from the substrate.
Inventors
- 👤 Kurt D Kennedy
- 👤 Glen R Scheuermann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:05
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/02; C23C14/027; C23C14/0021; Y; Y10; Y10T; Y10T428/00; Y10T428/24; Y10T428/24942; Y10T428/24983
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
126 words
A METHOD FOR COATING A SUBSTRATE WITH A NITRIDE OR CARBIDE OF TITANIUM OR ZIRCONIUM, COMPRISING, PLACING THE SUBSTRATE IN AN EVACUATED ENVIRONMENT, EVAPORATING TITANIUM OR ZIRCONIUM FROM A CRUCIBLE IN THE EVACUATED ENVIRONMENT TO PRODUCE A VAPOR AND CAUSING THE VAPOR TO DEPOSIT ON THE SUBSTRATE INITIALLY AS TITANIUM OR ZIRCONIUM, APPLYING AN ELECTRICAL POTENTIAL DURING DEPOSITION SUFFICIENT TO PRODUCE A VOLTAGE DIFFERENCE OF AT LEAST 200 VOLTS BETWEEN THE SUBSTRATE AND THE CRUCIBLE, AND INTRODUCING A REACTANT GAS WITH A GRADUALLY INCREASING PARTIAL PRESSURE TO THE VAPOR TO CHANGE THE COMPOSITION OF THE DEPOSIT FROM ITS INITIAL COMPOSITION TO INCREASING NITRIDE OR CARBIDE IN THE DIRECTION OUTWARDLY FROM THE SUBSTRATE TO PRODUCE A HARDNESS GRADIENT IN THE DEPOSIT WHICH INCREASES OUTWARDLY FROM THE SUBSTRATE.
Claim 2
Independent Claim
126 words
A METHOD FOR COATING A SUBSTRATE WITH A NITRIDE OR CARBIDE OF TITANIUM OR ZIRCONIUM, COMPRISING, PLACING THE SUBSTRATE IN AN EVACUATED ENVIRONMENT, EVAPORATING TITANIUM OR ZIRCONIUM FROM A CRUCIBLE IN THE EVACUATED ENVIRONMENT TO PRODUCE A VAPOR AND CAUSING THE VAPOR TO DEPOSIT ON THE SUBSTRATE INITIALLY AS TITANIUM OR ZIRCONIUM, APPLYING AN ELECTRICAL POTENTIAL DURING DEPOSITION SUFFICIENT TO PRODUCE A VOLTAGE DIFFERENCE OF AT LEAST 200 VOLTS BETWEEN THE SUBSTRATE AND THE CRUCIBLE, AND INTRODUCING A REACTANT GAS WITH A GRADUALLY INCREASING PARTIAL PRESSURE TO THE VAPOR TO CHANGE THE COMPOSITION OF THE DEPOSIT FROM ITS INITIAL COMPOSITION TO INCREASING NITRIDE OR CARBIDE IN THE DIRECTION OUTWARDLY FROM THE SUBSTRATE TO PRODUCE A HARDNESS GRADIENT IN THE DEPOSIT WHICH INCREASES OUTWARDLY FROM THE SUBSTRATE.
Claim 3
Dependent Claim
19 words
A method according to claim 1 wherein the reactant gas is nitrogen in order to produce a nitride coating.
Claim 4
Dependent Claim
19 words
A method according to claim 1 wherein the reactant gas is methane in order to produce a carbide coating.
Claim 5
Dependent Claim
19 words
A method according to claim 1 wherein the reactant gas is acetylene in order to produce a carbide coating.
Claim 6
Dependent Claim
16 words
A method according to claim 1 wherein the substrate is biased negative with respect to ground.
Claim 7
Dependent Claim
13 words
A method according to claim 1 wherein the substrate is heated during deposition.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-08-18 | 1979-02-17 | 1979-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-08-18 | 1983-02-17 | 1983-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-08-18 | 1987-02-17 | 1987-08-19 | $7700.00 | Window Closed / Lapsed |