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Electron beam recording comprising polymer of 1-methylvinyl methyl ketone

Assignee: RCA Corp
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Filing: 1975-08-14
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Granted: 1977-04-19
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Expires: 1995-08-14
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Abstract

Abstract Recording medium comprising a film of a polymer of 1-methylvinyl methyl ketone on a support is suitable for recording information with electron beams. This recording medium has high resolution and good sensitivity.

Inventors

  • 👤 Aaron William Levine
  • 👤 Michael Kaplan

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 15:38
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/143

Claims Analysis

Total Claims: 8
Claim 1
Independent Claim 70 words
In a method of recording information whereby a modulated beam of electrons is scanned across a surface of a resist material which becomes more soluble in a developer solvent when impinged upon by the beam of electrons and the resist material is developed with the developer solvent so as to remove the solubilized portions thereof, the improvement which comprises employing as the resist material a polymer of 1-methylvinyl methyl ketone.
Claim 2
Dependent Claim 70 words
In a method of recording information whereby a modulated beam of electrons is scanned across a surface of a resist material which becomes more soluble in a developer solvent when impinged upon by the beam of electrons and the resist material is developed with the developer solvent so as to remove the solubilized portions thereof, the improvement which comprises employing as the resist material a polymer of 1-methylvinyl methyl ketone.
Claim 3
Dependent Claim 15 words
A method according to claim 1 wherein the polymer is a 1-methylvinyl methyl ketone homopolymer.
Claim 4
Dependent Claim 22 words
A method according to claim 1 wherein the polymer is a copolymer of 1-methylvinyl methyl ketone and a comonomer having vinyl unsaturation.
Claim 5
Dependent Claim 22 words
A method according to claim 3 wherein the polymer is a copolymer of 1-methylvinyl methyl ketone and an acrylate or methacrylate monomer.
Claim 6
Dependent Claim 18 words
A method according to claim 4 wherein the copolymer is derived from 1-methylvinyl vinyl ketone and ethyl acrylate.
Claim 7
Dependent Claim 15 words
A method according to claim 1 wherein the polymer is on an electrically conductive substrate.
Claim 8
Dependent Claim 15 words
A method according to claim 1 wherein the polymer has an electrically conductive layer thereon.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1980-04-18 1980-10-18 1981-04-19 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1984-04-18 1984-10-18 1985-04-19 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1988-04-18 1988-10-18 1989-04-19 $7700.00 Window Closed / Lapsed

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