US3935332A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Development of poly(1-methyl-1-cyclopentene-SO2) electron beam resist
Assignee: RCA Corp
•
Filing: 1975-01-09
•
Granted: 1976-01-27
•
Expires: 1995-01-09
Abstract
Abstract Three developer solvents 2-methylcyclohexanone, 3-methylcyclohexanone, and a mixture of acetonyl acetate and acetone, improve the resolution of electron beam exposed films of poly(1-methyl-1-cyclopentene-SO2) copolymers.
Inventors
- 👤 Eugene Samuel Poliniak
- 👤 Richard Joseph Himics
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:16
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/30; G03F7/32; G03F7/325; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
94 words
In a method of recording information whereby a modulated beam of electrons is scanned across the surface of a film of resist material which becomes more soluble in a developer solvent where impinged upon by the beam of electrons and the resist material is developed with the developer solvent so as to remove the solubilized portions thereof, the improvement which comprises employing as the resist material a film of a copolymer of SO 2 and 1-methyl-1-cyclopentene and developing with a solvent selected from the group consisting of 2-methylcyclohexanone, 3-methylcyclohexanone, and acetonyl acetate in acetone.
Claim 2
Dependent Claim
94 words
In a method of recording information whereby a modulated beam of electrons is scanned across the surface of a film of resist material which becomes more soluble in a developer solvent where impinged upon by the beam of electrons and the resist material is developed with the developer solvent so as to remove the solubilized portions thereof, the improvement which comprises employing as the resist material a film of a copolymer of SO 2 and 1-methyl-1-cyclopentene and developing with a solvent selected from the group consisting of 2-methylcyclohexanone, 3-methylcyclohexanone, and acetonyl acetate in acetone.
Claim 3
Dependent Claim
12 words
A method according to claim 1 wherein the developer solvent is 2-methylcyclohexanone.
Claim 4
Dependent Claim
12 words
A method according to claim 1 wherein the developer solvent is 3-methylcyclohexanone.
Claim 5
Dependent Claim
19 words
A method according to claim 1 wherein the developer solvent contains 30% by volume of acetonyl acetate in acetone.
Claim 6
Dependent Claim
15 words
A method according to claim 1 wherein the resist film is about 1 micron thick.
Claim 7
Dependent Claim
23 words
A method according to claim 1 wherein the copolymer has a molecular weight in the range of from about 100,000 to about 500,000.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1979-01-26 | 1979-07-28 | 1980-01-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1983-01-26 | 1983-07-28 | 1984-01-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1987-01-26 | 1987-07-28 | 1988-01-27 | $7700.00 | Window Closed / Lapsed |