US3930155A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Ion microprobe analyser
Assignee: Hitachi Ltd
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Filing: 1974-01-17
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Granted: 1975-12-30
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Expires: 1994-01-17
Abstract
Abstract An ion microprobe analyser in which a specimen to be analysed is irradiated with primary ions of non-reactive gas and the mass-tocharge ratio and intensity of secondary ions emitted from the specimen are measured for the qualitative and quantitative analysis of elements constituting the specimen. In the analyser, means for directing a reactive gas toward a desired spot on the surface of the specimen to be analysed is provided so as to eliminate serious limitations and undesirable side effects due to the use of the reactive gas atmosphere thereby improving the sensitivity and quantitativity of analysis.
Inventors
- 👤 Ichiro Kanomata
- 👤 Hiroshi Doi
- 👤 Hifumi Tamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:30
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/26; H01J49/28; H01J49/32; H01J49/322; H01J37/00; H01J37/252; H01J49/02; H01J49/10; H01J49/14; H01J49/142
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
101 words
An ion microprobe analyser comprising an ion gun for emitting a primary ion beam of non-reactive gas, at least one ion lens for focusing said primary ion beam to irradiate a desired analysed spot on the surface of a specimen with said primary ion beam, mass spectrometric means for analysing the mass-to-charge ratio of a secondary ion beam emitted from the specimen due to irradiation with said primary ion beam, means for detecting the result of analysis by said mass spectrometric means, and means for supplying a chemically reactive gas toward the desired analysed spot on the surface of said specimen.
Claim 2
Dependent Claim
101 words
An ion microprobe analyser comprising an ion gun for emitting a primary ion beam of non-reactive gas, at least one ion lens for focusing said primary ion beam to irradiate a desired analysed spot on the surface of a specimen with said primary ion beam, mass spectrometric means for analysing the mass-to-charge ratio of a secondary ion beam emitted from the specimen due to irradiation with said primary ion beam, means for detecting the result of analysis by said mass spectrometric means, and means for supplying a chemically reactive gas toward the desired analysed spot on the surface of said specimen.
Claim 3
Dependent Claim
17 words
An ion microprobe analyser as claimed in claim 1, wherein means is provided for heating said specimen.
Claim 4
Dependent Claim
32 words
An ion microprobe analyser as claimed in claim 1, wherein means for discharging said reactive gas is disposed in the vicinity of said desried analysed spot on the surface of said specimen.
Claim 5
Dependent Claim
67 words
An ion microprobe analyser as claimed in claim 1, wherein partitions each provided with an aperture having a small evacuating conductance are disposed between the space surrounding said specimen and said ion lens and between the space surrounding said specimen and said mass spectrometric means respectively, and differential pumping means are provided for the differential evacuation of said space surrounding said specimen and said mass spectrometric means.
Claim 6
Dependent Claim
75 words
An ion microprobe analyser as claimed in claim 1, wherein a casing is disposed in the vicinity of said specimen in such a manner that it surrounds said specimen and confines The reactive gas therein, said reactive gas supplying means being connected to said casing to supply the reactive gas into said casing, and a primary ion beam inlet opening and a secondary ion beam outlet opening are bored in the wall of said casing.
Claim 7
Dependent Claim
24 words
An ion microprobe analyser as claimed in claim 5, wherein said casing for confining said reactive gas therein is provided with gas discharging means.
Claim 8
Dependent Claim
24 words
An ion microprobe analyser as claimed in claim 1, wherein said reactive gas supplying means is a nozzle connected to a reactive gas source.
Claim 9
Dependent Claim
24 words
An ion microprobe analyser as claimed in claim 2, wherein said reactive gas supply means is a nozzle connected to a reactive gas source.
Claim 10
Dependent Claim
24 words
An ion microprobe analyser as claimed in claim 4, wherein said reactive gas supplying means is a nozzle connected to a reactive gas source.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-12-29 | 1979-06-30 | 1979-12-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-12-29 | 1983-06-30 | 1983-12-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-12-29 | 1987-06-30 | 1987-12-30 | $7700.00 | Window Closed / Lapsed |