US3665182A
Expired / Lapsed
US
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Elemental analyzing apparatus
Assignee: Kratos Analytical Ltd
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Filing: 1969-08-18
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Granted: 1972-05-23
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Expires: 1989-08-18
Abstract
Abstract A compact instrument for solid surface analysis comprising a compact ion generator, a movable target support, an energy analyzer and an ion detector mounted together on a flange adapted to form the end wall of a vacuum chamber.
Inventors
- 👤 Robert F Goff
- 👤 David P Smith
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:05
CPC Classifications
H; H01; H01J; H01J49/00; H01J49/02; H01J49/10; H01J49/14; H01J49/142; H01J49/26; H01J49/28; H01J49/282; H01J49/44; H01J49/46; H01J49/48
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
358 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinetic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein said ion generating means comprises: a compact ion generator including, a filament for producing electrons, a highly transparent grid adjacent to said filament and defining therewith an ionization region, said grid having an electrical potential for accelerating said electrons to a kinetic energy sufficient to ionize noble gas atoms within said ionization region, a repeller encircling said filament and said ionization region having an electrical potential for diverting electrons into said ionization region, an extractor plate including an extractor aperture therein located adjacent to said ionization region and about said beam axis, said extractor plate being electrically biased to attract ions from said ionization region and direct said ions toward said sample, and a first anode plate including a first aperture therein located adjacent to said extractor apertuRe and about a said beam axis, said first anode plate being electrically biased for collimating, modulating and focusing the extracted primary ions into a collimated beam of primary ions directed toward said sample.
Claim 2
Dependent Claim
358 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinetic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein said ion generating means comprises: a compact ion generator including, a filament for producing electrons, a highly transparent grid adjacent to said filament and defining therewith an ionization region, said grid having an electrical potential for accelerating said electrons to a kinetic energy sufficient to ionize noble gas atoms within said ionization region, a repeller encircling said filament and said ionization region having an electrical potential for diverting electrons into said ionization region, an extractor plate including an extractor aperture therein located adjacent to said ionization region and about said beam axis, said extractor plate being electrically biased to attract ions from said ionization region and direct said ions toward said sample, and a first anode plate including a first aperture therein located adjacent to said extractor apertuRe and about a said beam axis, said first anode plate being electrically biased for collimating, modulating and focusing the extracted primary ions into a collimated beam of primary ions directed toward said sample.
Claim 3
Dependent Claim
137 words
A compact elemental analyzing apparatus of claim 1 wherein said energy analyzer comprises, an entrance diaphragm located adjacent to said target support and having an entrance slit therein, said entrance slit positioned to receive primary ions scattered from a said sample at a predetermined angle relative to the beam of primary ions prior to bombarding said sample, curved electrostatic analyzer plates having an electrical potential thereon to transmit scattered primary ions having a predetermined energy value, an exit diaphragm located adjacent to said analyzer plates, and having an exit slit therein, said exit slit positioned to receive ions transmitted by said analyzer plates, biasing means operatively connected to said entrance diaphragm and to said exit diaphragm for biasing said entrance diaphragm to a first predetermined potential and for biasing said exit diaphragm to a second predetermined potential.
Claim 4
Dependent Claim
7 words
a support frame secured to said flange,
Claim 5
Dependent Claim
7 words
a support frame secured to said flange,
Claim 6
Dependent Claim
15 words
a tubular housing supported by said frame and adapted to support a compact ion generator,
Claim 7
Dependent Claim
15 words
a tubular housing supported by said frame and adapted to support a compact ion generator,
Claim 8
Dependent Claim
74 words
A compact elemental analyzing apparatus of claim 2 wherein the ion generator means further comprises, deflection plates located adjacent to said ion generating means and positioned on opposing sides of a said primary ion beam, deflector power supply means operatively connected to said deflection plates for charging said plates and affording deflection of the path of said primary ion beam to control the location on said sample being bombarded by said primary ion beam.
Claim 9
Dependent Claim
64 words
A compact elemental analyzing apparatus of claim 3 wherein said target support comprises, rotatable means having spaced surface portions for supporting a plurality of individual samples thereon, said rotatable means located to position a sample in a predetermined location to intercept a said ion beam, and advancement means operatively connected to said rotatable means for advancing and positioning successive samples in said predetermined location.
Claim 10
Dependent Claim
77 words
a multi-positionable target support secured to said frame and located adjacent to said tubular housing to position successive samples within a predetermined target location, including a. rotatable means having spaced surface portions for supporting a plurality of individual samples thereon, said rotatable means located to position a sample in a predetermined location to intercept a said ion beam, b. advancement means operatively connected to said rotatable means for advancing and positioning successive samples in said predetermined location,
Claim 11
Dependent Claim
77 words
a multi-positionable target support secured to said frame and located adjacent to said tubular housing to position successive samples within a predetermined target location, including a. rotatable means having spaced surface portions for supporting a plurality of individual samples thereon, said rotatable means located to position a sample in a predetermined location to intercept a said ion beam, b. advancement means operatively connected to said rotatable means for advancing and positioning successive samples in said predetermined location,
Claim 12
Dependent Claim
34 words
an energy analyzer supported by said frame and having an entrance positioned adjacent to said target support and extending adjacently along said tubular housing for transmitting ions therethrough which have a predetermined energy, and
Claim 13
Dependent Claim
34 words
an energy analyzer supported by said frame and having an entrance positioned adjacent to said target support and extending adjacently along said tubular housing for transmitting ions therethrough which have a predetermined energy, and
Claim 14
Dependent Claim
71 words
A compact elemental analyzing apparatus of claim 4 wherein said compact ion generator further comprises, a second anode plate including a second aperture therein, said second anode plate located adjacent to said first anode plate wherein said second aperture is located adjacent to said first aperture and about said beam axis, said second anode plate electrically biased to additionally collimate and focus the beam of primary ions directed toward said sample.
Claim 15
Dependent Claim
71 words
ion detector means supported by said frame and positioned adjacent to said tubular housing and said energy analyzer for converting the transmitted ions into an electrical signal, wherein the primary ions from said compact ion generator are directed to bombard a first sample from which the scattered primary ions are received and transmitted to said ion detector means for indicating the surface elemental composition of the sample by said electrical signal.
Claim 16
Dependent Claim
71 words
ion detector means supported by said frame and positioned adjacent to said tubular housing and said energy analyzer for converting the transmitted ions into an electrical signal, wherein the primary ions from said compact ion generator are directed to bombard a first sample from which the scattered primary ions are received and transmitted to said ion detector means for indicating the surface elemental composition of the sample by said electrical signal.
Claim 17
Dependent Claim
326 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinetic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein said energy analyzer comprises, an entrance diaphragm located adjacent to said target support and having an entrance slit therein, said entrance slit being positioned to receive primary ions sCattered from a said sample at a predetermined angle relative to the beam of primary ions prior to bombarding said sample, curved electrostatic analyzer plates having an electrical potential thereon to transmit scattered primary ions having a predetermined energy value, an exit diaphragm located adjacent to said analyzer plates and having an exit slit therein, said exit slit positioned to receive ions transmitted by said analyzer plates, biasing means operatively connected to said entrance diaphragm and to said exit diaphragm for biasing said entrance diaphragm to a first predetermined potential and for biasing said exit diaphragm to a second predetermined potential.
Claim 18
Dependent Claim
326 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinetic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein said energy analyzer comprises, an entrance diaphragm located adjacent to said target support and having an entrance slit therein, said entrance slit being positioned to receive primary ions sCattered from a said sample at a predetermined angle relative to the beam of primary ions prior to bombarding said sample, curved electrostatic analyzer plates having an electrical potential thereon to transmit scattered primary ions having a predetermined energy value, an exit diaphragm located adjacent to said analyzer plates and having an exit slit therein, said exit slit positioned to receive ions transmitted by said analyzer plates, biasing means operatively connected to said entrance diaphragm and to said exit diaphragm for biasing said entrance diaphragm to a first predetermined potential and for biasing said exit diaphragm to a second predetermined potential.
Claim 19
Dependent Claim
73 words
A compact elemental analyzing apparatus of claim 6 wherein the ion generator means further comprises, deflection plates located adjacent to said ion generating means and positioned on opposing sides of a said primary ion beam, deflector power supply means operatively connected to said deflection plates for charging said plates affording deflection of the path of said primary ion beam to control the location on said sample being bombarded by said primary ion beam.
Claim 20
Dependent Claim
65 words
A compact elemental analyzing apparatus of claim 7 wherein said target support comprises, rotatable means having spaced surface portions for supporting a plurality of individual samples thereon, said rotatable means being located to position a sample in a predetermined location to intercept a said ion beam, and advancement means operatively connected to said rotatable means for advancing and positioning successive samples in said predetermined location.
Claim 21
Dependent Claim
170 words
A compact elemental analyzing apparatus of claim 8 wherein said ion generating means comprises, a compact ion generator including, a filament for producing electrons, a highly transparent grid adjacent to said filament and defining therewith an ionization region, said grid having an electrical potential for accelerating said electrons to a kinetic energy sufficient to ionize noble gas atoms within said ionization region, a repeller encircling said filament and said ionization region having an electrical potential for diverting electrons into said ionization region, an extractor plate including an extractor aperture therein located adjacent to said ionization region and about said beam axis, said extractor plate being electrically biased to attract ions from said ionization region and direct said ions toward said sample, and a first anode plate including a first aperture therein located adjacent to said extractor aperture and about a said beam axis, said first anode plate being electrically biased for collimating, modulating and focusing the extracted primary ions into a collimated beam of primary ions directed toward said sample.
Claim 22
Dependent Claim
71 words
A compact elemental analyzing apparatus of claim 9 wherein said compact ion generator further comprises, a second anode plate including a second aperture therein, said second anode plate located adjacent to said first anode plate wherein said second aperture is located adjacent to said first aperture and about said beam axis, said second anode plate electrically biased to additionally collimate and focus the beam of primary ions directed toward said sample.
Claim 23
Dependent Claim
200 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinEtic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein the improvement comprises,
Claim 24
Dependent Claim
200 words
A compact elemental analyzing apparatus adapted to fit within an evacuable chamber containing a noble gas and having particular utility in determining the elemental composition of a solid surface by measuring the energy and the quantity of primary ions scattered from elements forming said solid surface and received by an energy analyzer positioned adjacent to said surface to thereby selectively identify said elements and determine the quantity of each said element respectively, said apparatus including in combination a target support for supporting in a predetermined location a sample to be elementally analyzed, an ion generating means for producing a beam of primary ions having known mass and substantially the same known kinEtic energy and for directing said primary ions along a beam axis toward said sample, an energy analyzer for transmitting scattered primary ions which have a second known kinetic energy value less than the original kinetic energy of said primary ions to measure the energy lost as a result of collision with said surface to identify the atomic mass of the element scattering said primary ions, and ion detector means to receive the transmitted primary ions for converting the received ions into an electrical signal, wherein the improvement comprises,
Claim 25
Independent Claim
139 words
The method of determining the elemental composition of a solid surface by measuring the energy and quantity of primary ions developed by an ion generator and scattered from a surface to be analyzed, the improvement comprising the steps of a. positioning in an evacuatable chamber an ion generating means, a sample to be analyzed, an energy analyzer, and an ion detector, b. evacuating the active gases in said chamber to a predetermined active gas pressure of less than about 10 8 Torr, c. discontinuing the evacuation of said chamber, d. back-filling said chamber with a noble gas to a partial pressure sufficient to support generation of an ion beam of a predetermined purity of said noble gas, and e. generating an ion beam of said noble gas by means of said ion generating means to analyze a said surface.
Claim 26
Independent Claim
139 words
The method of determining the elemental composition of a solid surface by measuring the energy and quantity of primary ions developed by an ion generator and scattered from a surface to be analyzed, the improvement comprising the steps of a. positioning in an evacuatable chamber an ion generating means, a sample to be analyzed, an energy analyzer, and an ion detector, b. evacuating the active gases in said chamber to a predetermined active gas pressure of less than about 10 8 Torr, c. discontinuing the evacuation of said chamber, d. back-filling said chamber with a noble gas to a partial pressure sufficient to support generation of an ion beam of a predetermined purity of said noble gas, and e. generating an ion beam of said noble gas by means of said ion generating means to analyze a said surface.
Claim 27
Dependent Claim
38 words
The method of claim 12 further including the step of gettering the interior of a said chamber after it has been evacuated to said predetermined active gas pressure to chemically adsorb substantially all active gases in said chamber.
Claim 28
Dependent Claim
19 words
The method of claim 12 wherein the evacuating of said chamber comprises the step of cryogenically pumping said chamber.
Claim 29
Dependent Claim
47 words
The method of claim 12 wherein said energy analyzer inserted within said chamber has conductive entrance and exit diaphragms formed with slits and wherein said method further comprises the step of positively biasing said diaphragms to restrict the noise level afforded by sputtered and extraneous scattered ions.
References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-05-23 | 1975-11-22 | 1976-05-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-05-23 | 1979-11-22 | 1980-05-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-05-23 | 1983-11-22 | 1984-05-23 | $7700.00 | Window Closed / Lapsed |