US3800264A
Expired / Lapsed
US
⏱️ 0.0 years remaining
High temperature transducers and housing including fabrication methods
Assignee: Kulite Semiconductor Products Inc
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Filing: 1972-03-14
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Granted: 1974-03-26
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Expires: 1992-03-14
Abstract
Abstract A dielectrically isolated pressure transducer comprises a silicon diaphragm having on a surface thereof at least one piezoresistive sensor mounted in close proximity with a dielectric insulator, the diaphragm is secured about a non-active peripheral area to an annular ring housing by a glass bond fabricated from a glass material having a low melting temperature when compared to ordinary glass.
Inventors
- 👤 A Kurtz
- 👤 J Mallon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 18:44
CPC Classifications
G; G01; G01L; G01L9/00; G01L9/0041; G01L9/0051; G01L9/0052; G01L9/0055
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
193 words
In a pressure transducer of the type employing a silicon diaphragm having located on a surface thereof at least one piezoresistive sensing element, said diaphragm of said pressure transducer having an active area determined by the location of said piezoresistive element and a non-active area about the periphery thereof to provide a diaphragm clamping surface, in combination therewith, apparatus for providing a housing for said diaphragm, comprising, a. a first annular ring member fabricated from a material having a given temperature expansion coefficient, b. a first glass bond securing said diaphragm about the nonactive area thereof to said first annular member with said sensing element surrounded by and enclosed within the opening of said annular ring, c. a second annular member fabricated from a material having a substantially higher coefficient of expansion than said material utilized in said first annular ring member, d. a second glass bond securing said first annular ring member to said second annular member in a manner such that said openings of each member are communicating to thereby form a composite housing assembly for said transducer which serves to provide thermal matching for said diaphragm at elevated temperature operation.
Claim 2
Dependent Claim
193 words
In a pressure transducer of the type employing a silicon diaphragm having located on a surface thereof at least one piezoresistive sensing element, said diaphragm of said pressure transducer having an active area determined by the location of said piezoresistive element and a non-active area about the periphery thereof to provide a diaphragm clamping surface, in combination therewith, apparatus for providing a housing for said diaphragm, comprising, a. a first annular ring member fabricated from a material having a given temperature expansion coefficient, b. a first glass bond securing said diaphragm about the nonactive area thereof to said first annular member with said sensing element surrounded by and enclosed within the opening of said annular ring, c. a second annular member fabricated from a material having a substantially higher coefficient of expansion than said material utilized in said first annular ring member, d. a second glass bond securing said first annular ring member to said second annular member in a manner such that said openings of each member are communicating to thereby form a composite housing assembly for said transducer which serves to provide thermal matching for said diaphragm at elevated temperature operation.
Claim 3
Dependent Claim
16 words
The apparatus according to claim 1 wherein said second annular member is fabricated from a metal.
Claim 4
Dependent Claim
15 words
The apparatus according to claim 1 wherein said first annular ring is fabricated from silicon.
Claim 5
Dependent Claim
15 words
The apparatus according to claim 1 wherein said first annular ring is fabricated from quartz.
Claim 6
Dependent Claim
26 words
The apparatus according to claim 1 wherein said first and second glass bonds are fabricated from a solder-glass having a lower melting point than ordinary glass.
Claim 7
Dependent Claim
121 words
In combination: a. a pressure transducer comprising a silicon disc-like diaphragm having located on a first surface thereof at least one dielectric insulating member, said insulating member having a piezoresistive sensor element on a surface thereof, to thereby form a composite transducer structure wherein said sensor is dielectrically isolated from said diaphragm, b. an annular housing generally cylindrical in shape having an open top surface of a diameter less than the diameter of said disc, and c. a glass bond coupling said disc to said housing and located about the periphery of said disc, with said sensor being located within the area defined by said open top end of said housing, said glass being of the type that devitrifies during curing.
Claim 8
Dependent Claim
121 words
In combination: a. a pressure transducer comprising a silicon disc-like diaphragm having located on a first surface thereof at least one dielectric insulating member, said insulating member having a piezoresistive sensor element on a surface thereof, to thereby form a composite transducer structure wherein said sensor is dielectrically isolated from said diaphragm, b. an annular housing generally cylindrical in shape having an open top surface of a diameter less than the diameter of said disc, and c. a glass bond coupling said disc to said housing and located about the periphery of said disc, with said sensor being located within the area defined by said open top end of said housing, said glass being of the type that devitrifies during curing.
Claim 9
Dependent Claim
15 words
The combination according to claim 6 wherein said annular housing is fabricated from a metal.
Claim 10
Dependent Claim
22 words
The combination according to claim 6 wherein said glass bond comprises a solder glass having a lower melting temperature than ordinary glass.
Claim 11
Dependent Claim
49 words
The combination according to claim 6 wherein said pressure transducer further includes, a. at least one platinum contact deposited on the same surface of said diaphragm as said piezoresistive sensor, and contacting said sensor and directed therefrom to the periphery of said disc to form a contact area thereat.
Claim 12
Dependent Claim
23 words
The combination according to claim 6 wherein said annular ring housing has a plurality of wire accommodating slots in a side surface thereof.
Claim 13
Dependent Claim
144 words
In combination: a. a pressure transducer comprising a silicon disc-like diaphragm having on a surface thereof at least one dielectrically isolated piezoresistive sensing device, b. an annular housing member fabricated from a material having a relatively high coefficient of expansion with temperature, said housing having a central aperture of a diameter less than the diameter of said disc-like diaphragm, c. means, including a annular ring having a central continuous aperture of relatively the same diameter as said housing aperture positioned between said housing member and said pressure transducer to secure said housing member to said pressure transducer with said central apertures communicating, said disc being secured about a peripheral Area thereof with said piezoresistive sensing device surrounded by said central aperture, said annular ring serving further to provide thermal matching between said diaphragm and said annular housing member due to its lower expansion coefficient.
Claim 14
Dependent Claim
144 words
In combination: a. a pressure transducer comprising a silicon disc-like diaphragm having on a surface thereof at least one dielectrically isolated piezoresistive sensing device, b. an annular housing member fabricated from a material having a relatively high coefficient of expansion with temperature, said housing having a central aperture of a diameter less than the diameter of said disc-like diaphragm, c. means, including a annular ring having a central continuous aperture of relatively the same diameter as said housing aperture positioned between said housing member and said pressure transducer to secure said housing member to said pressure transducer with said central apertures communicating, said disc being secured about a peripheral Area thereof with said piezoresistive sensing device surrounded by said central aperture, said annular ring serving further to provide thermal matching between said diaphragm and said annular housing member due to its lower expansion coefficient.
Claim 15
Dependent Claim
14 words
The combination according to claim 11 wherein said annular housing is fabricated from kovar.
Claim 16
Dependent Claim
14 words
The combination according to claim 11 wherein said annular ring is fabricated from silicon.
Claim 17
Dependent Claim
14 words
The combination according to claim 11 wherein said annular ring is fabricated from quartz.
Claim 18
Dependent Claim
53 words
The combination according to claim 11 wherein said means to secure said housing member to said pressure transducer includes first and second glass bonds, said first bond located between said annular ring and the periphery of said disc, said second bond located between the periphery of said annular housing and said annular ring.
Claim 19
Dependent Claim
71 words
In combination: a. a silicon diaphragm having located on a surface thereof a dielectric insulating member and a piezoresistive sensing element positioned on said insulating member, to thereby assure isolation between said element and said diaphragm, b. a housing of a cylindrical configuration having a central aperture, c. high temperature bonding means securing said diaphragm to said housing with said element located within the open area formed by said central aperture.
Claim 20
Dependent Claim
71 words
In combination: a. a silicon diaphragm having located on a surface thereof a dielectric insulating member and a piezoresistive sensing element positioned on said insulating member, to thereby assure isolation between said element and said diaphragm, b. a housing of a cylindrical configuration having a central aperture, c. high temperature bonding means securing said diaphragm to said housing with said element located within the open area formed by said central aperture.
Claim 21
Dependent Claim
17 words
The combination according to claim 16 wherein said high temperature bonding means is fabricated from a glass.
Claim 22
Dependent Claim
14 words
The combination according to claim 16 wherein said housing is fabricated from a metal.
Claim 23
Dependent Claim
15 words
The combination according to claim 16 wherein said housing is fabricated from an insulating material.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-03-25 | 1977-09-24 | 1978-03-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-03-25 | 1981-09-24 | 1982-03-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-03-25 | 1985-09-24 | 1986-03-26 | $7700.00 | Window Closed / Lapsed |