Patent US3236707A successfully refreshed from Google Patents.
US3236707A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electrical circuitry and method
Assignee: Unisys Corp
•
Filing: 1963-05-24
•
Granted: 1966-02-22
•
Expires: 1983-05-24
Abstract
No abstract record available.
Inventors
- 👤 Stanley J Lins
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 05:38
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/04; C23C14/048; C23F; C23F1/00; C23F1/02; H; H05; H05K; H05K3/00; H05K3/02; Y; Y10; Y10S; Y10S428/00; Y10S428/901
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
87 words
A METHOD OF FABRICATING MICROELECTRONIC CIRCUITS IN SITU IN A VACUUM CHAMBER COMPRISING: DEPOSITING A FIRST FILM OF ALUMINUM ON A GLASS SUBSTRATE; DEPOSITING A SECOND FILM OF A MATERIAL, SELECTED FROM THE CLASS CONSISTING OF TRIPHENYLSILLANOL AND DIPHENYLSILANDOIAL, ON SAID FIRST FILM; REMOVING SELECTED AREAS OF SAID SECOND FILM, DEFINING THE REVERSE IMAGE OF A DESIRED CIRCUIT PATTERN, BY EXPOSING SAID SELECTED AREAS TO INFRA-RED RADIATION, THEREBY EXPOSING CORRESPONDING AREAS OF SAID FIRST FILMS; AND REMOVING SAID EXPOSED AREAS OF SAID FIRST FILM BY GAS ETCHING.
Claim 2
Independent Claim
87 words
A METHOD OF FABRICATING MICROELECTRONIC CIRCUITS IN SITU IN A VACUUM CHAMBER COMPRISING: DEPOSITING A FIRST FILM OF ALUMINUM ON A GLASS SUBSTRATE; DEPOSITING A SECOND FILM OF A MATERIAL, SELECTED FROM THE CLASS CONSISTING OF TRIPHENYLSILLANOL AND DIPHENYLSILANDOIAL, ON SAID FIRST FILM; REMOVING SELECTED AREAS OF SAID SECOND FILM, DEFINING THE REVERSE IMAGE OF A DESIRED CIRCUIT PATTERN, BY EXPOSING SAID SELECTED AREAS TO INFRA-RED RADIATION, THEREBY EXPOSING CORRESPONDING AREAS OF SAID FIRST FILMS; AND REMOVING SAID EXPOSED AREAS OF SAID FIRST FILM BY GAS ETCHING.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1969-02-21 | 1969-08-23 | 1970-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1973-02-21 | 1973-08-23 | 1974-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1977-02-21 | 1977-08-23 | 1978-02-22 | $7700.00 | Window Closed / Lapsed |