US3113896A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam masking for etching electrical circuits
Assignee: SPACE TECHNOLOGY LAB Inc
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Filing: 1961-01-31
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Granted: 1963-12-10
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Expires: 1981-01-31
Abstract
No abstract record available.
Inventors
- 👤 Horace T Mann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 01:34
CPC Classifications
C; C08; C08F; C08F2/00; C08F2/46; B; B82; B82Y; B82Y10/00; B82Y40/00; C23; C23F; C23F1/00; C23F1/02; H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; H01J37/3175; H05; H05K; H05K3/00; H05K3/02; H05K3/06; H05K3/061; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31752; H01J2237/31754; H01J2237/31777; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0179; H05K2203/00; H05K2203/09; H05K2203/092; H05K3/0073; H05K3/0082; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/949; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49156
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
135 words
A METHOD OF FORMING A PATTERN OF ELECTRICALLY CONDUCTIVE ELEMENTS, SAID METHOD COMPRISING COATING A SUBSTRATE WITH AN ELECTRICALLY CONDUCTIVE LAYER, CONTINUOUSLY DEPOSITING VAPOR MOLECULES, OF A POLYMERIZABLE SUBSTANCE ON SAID COATED SUBSTRATE WITHIN A VACUUM CHAMBER, CONCURRENTLY EXPOSING SAID CONDUCTIVE LAYER TO A PATTERN OF ELECTRONS OF SUFFICIENT ENERGY TO CAUSE POLYMERIZATION OF SAID CONTINUOUSLY DEPOSITED VAPOR MOLECULES ON AREAS OF SAID CONDUCTIVE LAYER IMPINGED BY SAID ELECTRONS, THEREBY TO FORM A POLYMERIZED FILM PATTERN ON SAID CONDUCTIVE LAYER, AND REMOVING AREAS OF SAID CONDUCTIVE LAYER FREE FROM SAID POLYMERIZED FILM TO A CHEMICAL AGENT IN WHICH LAYER AND POLYMERIZED FILM TO A CHEMICAL AGENT IN WHICH THE MATERIAL OF SAID CONDUCTIVE LAYER IS SOLUBLE AND IN WHICH SAID POLYMERIZED FILM IS INSOLUBLE, THEREBY TO LEAVE A PATTERN OF CONDUCTIVE ELEMENTS ON SAID SUBSTRATE.
Claim 2
Independent Claim
135 words
A METHOD OF FORMING A PATTERN OF ELECTRICALLY CONDUCTIVE ELEMENTS, SAID METHOD COMPRISING COATING A SUBSTRATE WITH AN ELECTRICALLY CONDUCTIVE LAYER, CONTINUOUSLY DEPOSITING VAPOR MOLECULES, OF A POLYMERIZABLE SUBSTANCE ON SAID COATED SUBSTRATE WITHIN A VACUUM CHAMBER, CONCURRENTLY EXPOSING SAID CONDUCTIVE LAYER TO A PATTERN OF ELECTRONS OF SUFFICIENT ENERGY TO CAUSE POLYMERIZATION OF SAID CONTINUOUSLY DEPOSITED VAPOR MOLECULES ON AREAS OF SAID CONDUCTIVE LAYER IMPINGED BY SAID ELECTRONS, THEREBY TO FORM A POLYMERIZED FILM PATTERN ON SAID CONDUCTIVE LAYER, AND REMOVING AREAS OF SAID CONDUCTIVE LAYER FREE FROM SAID POLYMERIZED FILM TO A CHEMICAL AGENT IN WHICH LAYER AND POLYMERIZED FILM TO A CHEMICAL AGENT IN WHICH THE MATERIAL OF SAID CONDUCTIVE LAYER IS SOLUBLE AND IN WHICH SAID POLYMERIZED FILM IS INSOLUBLE, THEREBY TO LEAVE A PATTERN OF CONDUCTIVE ELEMENTS ON SAID SUBSTRATE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1966-12-09 | 1967-06-10 | 1967-12-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1970-12-09 | 1971-06-10 | 1971-12-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1974-12-09 | 1975-06-10 | 1975-12-10 | $7700.00 | Window Closed / Lapsed |