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EP0166349A1 Expired / Lapsed EP ⏱️ 0.0 years remaining

Surface treatment process

Assignee: Sumitomo Electric Industries Ltd
•
Filing: 1985-06-14
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Granted: —
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Expires: 2005-06-14
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Abstract

Abstract A surface treatment process for forming a thin film on the surface of a substrate thereby to obtain a hard layer, by forming a metal vapor atmosphere around the substrate to inject a metal or nonmetal ion into the substrate while ionizing the metal vapor.

Inventors

  • 👤 Yasuhiro C/O Itami Works Shimizu
  • 👤 Akira C/O Itami Works Doi

Bibliographic Details

Application Number —
Jurisdiction EP
Data Source google_patents
Last Synchronized 2026-10-22 23:57
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/0021; C23C14/24; C23C14/32

Claims Analysis

Total Claims: 11
Claim 1
Independent Claim 32 words
A surface treatment process of forming a metal vapor atmosphere around a substrate to be treated thereby to inject a metal or nonmetal ion into said substrate while ionizing said metal vapor.
Claim 2
Dependent Claim 32 words
A surface treatment process of forming a metal vapor atmosphere around a substrate to be treated thereby to inject a metal or nonmetal ion into said substrate while ionizing said metal vapor.
Claim 3
Dependent Claim 19 words
A surface treatment process in accordance with claim 1, wherein said substrate to be treated is a cutting tool.
Claim 4
Dependent Claim 41 words
A surface treatment process in accordance with claim 1, wherein said evaporation metal is made of a substance or two or more substances selected from a group of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo, W, Si, Al and B.
Claim 5
Dependent Claim 53 words
A surface treatment process in accordance with claim 1, wherein said injected metal or nonmetal ion is made of a substance or two or more substances selected from a group of N 2 + , N , O 2 + , O + , C + , Si + and B + .
Claim 6
Dependent Claim 21 words
A surface treatment process in accordance with claim 1, wherein said ionization of said metal vapor is performed by high-frequency discharge.
Claim 7
Dependent Claim 22 words
A surface treatment process in accordance with claim 1, wherein said ionization of said metal vapor is performed by DC arc discharge.
Claim 8
Dependent Claim 21 words
A surface treatment process in accordance with claim 1, wherein said ionization of said metal vapor is performed by thermoion emission.
Claim 9
Dependent Claim 33 words
A surface treatment process in accordance with claim 1, wherein said metal vapor is obtained by an HCD gun, said ionization of said metal vapor being performed by electrons of said HCD gun.
Claim 10
Dependent Claim 21 words
A surface treatment process in accordance with claim 1, wherein an acceleration voltage is applied to said substrate to be treated.
Claim 11
Dependent Claim 30 words
A surface treatment process in accordance with claim 1, wherein a compound of said evaporation metal and said injected ion is formed and coated on said substrate to be treated.

References Cited (Backward Citations)

DE2305359A1 Cited
GB1490063A Cited
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US4108751A Cited
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US4407712A Cited
GB2123441A Cited

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