US7245358B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate support system
Assignee: The University of Texas System
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Filing: 2005-05-25
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Granted: 2007-07-17
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Expires: 2025-05-25
Abstract
Abstract The present invention includes a substrate support system that features a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, with the pin being movably coupled to the chuck body to move with respect to the plane. As a result the substrate support system attenuates if not avoids generating non-planarity in a substrate that results from a presence of particulate contaminants. This is achieved by fabricating the pin to be compliant, allowing the same to move to accommodate the presence of the particle while maintaining sufficient planarity in the substrate.
Inventors
- 👤 Pawan Kumar Nimmakayala
- 👤 Sidlgata V. Sreenivasan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; H; H10; H10D; H10D48/00; H10D48/01; H10D48/04; B; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70783; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7614
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
58 words
A substrate support system, comprising: a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, said pin being movably coupled to said chuck body to move with respect to said plane, wherein said pin is coupled to said chuck body to rotate about a remote center of compliance.
Claim 2
Dependent Claim
58 words
A substrate support system, comprising: a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, said pin being movably coupled to said chuck body to move with respect to said plane, wherein said pin is coupled to said chuck body to rotate about a remote center of compliance.
Claim 3
Dependent Claim
32 words
The system as recited in claim 1 wherein said pin is coupled to said chuck body to move away from said plane in response to loads being un-envenly distributed on said pin.
Claim 4
Dependent Claim
57 words
The system as recited in claim 2 , wherein as a result of said pin moving away from said plane in response to an irregularity on a surface of said substrate, said surface of said substrate remains common to a plane common to a plurality of pairs of spaced-apart contact lands provided by a plurality of pin-cells.
Claim 5
Dependent Claim
51 words
The system as recited in claim 1 wherein said pin is coupled to said chuck body to rotate about a remote center of compliance spaced-apart from a region of said pin having a load thereon that is greater than a load to which the remaining regions of said pin are subjected.
Claim 6
Dependent Claim
69 words
The system as recited in claim 1 wherein said pin is coupled to said chuck body to rotate about a remote center of compliance spaced-apart from a region of said pin having a load thereon that is greater than a load to which the remaining regions of said pin are subjected, while avoiding any of the regions of said pin, lying in said plane, from moving toward said plane.
Claim 7
Dependent Claim
22 words
The system as recited in claim 1 further including a plurality of pins, with said plurality of pins surround by a rim.
Claim 8
Dependent Claim
38 words
The system as recited in claim 1 further including a plurality of pin-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins extending transversely.
Claim 9
Dependent Claim
38 words
The system as recited in claim 1 further including a plurality of pins-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins extending orthogonally.
Claim 10
Dependent Claim
38 words
The system as recited in claim 1 further including a plurality of pins-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins oriented randomly.
Claim 11
Dependent Claim
29 words
The system as recited in claim 1 wherein said chuck body is operable for disposing a substrate using an electrostatic force or using a force provided by a vacuum.
Claim 12
Dependent Claim
33 words
The system as recited in claim 1 wherein said chuck body comprises a plurality of pin-cells and wherein said plurality of pin-cells are formed by fusing a base layer and a pin layer.
Claim 13
Dependent Claim
80 words
A substrate support system, comprising: a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, said pin being movably coupled to said chuck body to move with respect to said plane, wherein said pin includes a cross-member having two spaced-apart contact lands extending from said cross-member and wherein said pin is formed by a pin cell that further comprises a flexure system coupled between said cross-member and said chuck body.
Claim 14
Dependent Claim
80 words
A substrate support system, comprising: a chuck body having a body surface with a pin extending therefrom having a contact surface lying in a plane, said pin being movably coupled to said chuck body to move with respect to said plane, wherein said pin includes a cross-member having two spaced-apart contact lands extending from said cross-member and wherein said pin is formed by a pin cell that further comprises a flexure system coupled between said cross-member and said chuck body.
Claim 15
Dependent Claim
59 words
A substrate support system, comprising: a chuck body having a surface with a “T” shaped pin extending therefrom, said “T” shaped pin including a cross-member having two spaced-apart contact lands extending from said cross-member and wherein said “T” shaped pin is formed by a pin-cell that further comprises a flexture system coupled between said cross-member and said chuck body.
Claim 16
Dependent Claim
59 words
A substrate support system, comprising: a chuck body having a surface with a “T” shaped pin extending therefrom, said “T” shaped pin including a cross-member having two spaced-apart contact lands extending from said cross-member and wherein said “T” shaped pin is formed by a pin-cell that further comprises a flexture system coupled between said cross-member and said chuck body.
Claim 17
Dependent Claim
21 words
The system as recited in claim 13 wherein said “T” shaped pin is coupled to move with respect to said surface.
Claim 18
Dependent Claim
60 words
The system as recited in claim 14 , wherein as a result of said “T” shaped pin moving with respect to said surface in response to an irregularity on a surface of a substrate, said surface of said substrate remains common to a plane common to a plurality of pairs of spaced-apart contact lands provided by a plurality of pin-cells.
Claim 19
Dependent Claim
33 words
The system as recited in claim 13 wherein said “T” shaped pin is coupled to said chuck body to move away from a predetermined position in response to loads being un-evenly distributed thereon.
Claim 20
Dependent Claim
22 words
The system as recited in claim 13 further including a plurality of pins, with said plurality of pins surround by a rim.
Claim 21
Dependent Claim
38 words
The system as recited in claim 17 further including a plurality of pin-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins extending transversely.
Claim 22
Dependent Claim
38 words
The system as recited in claim 17 further including a plurality of pin-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins extending orthogonaily.
Claim 23
Dependent Claim
38 words
The system as recited in claim 17 further including a plurality of pin-cells, each of which further comprises a pin including a cross-member having a longitudinal axis, with the longitudinal axis of cross-members of adjacent pins oriented randomly.
Claim 24
Dependent Claim
53 words
The system as recited in claim 13 wherein said “T” shaped pin is coupled to said chuck body to rotate about a remote center of compliance spaced-apart from a region of said pin having a load thereon that is greater than a load to which the remaining regions of said pin are subjected.
Claim 25
Dependent Claim
71 words
The system as recited in claim 13 wherein said “T” shaped pin is coupled to said chuck body to rotate about a remote center of compliance spaced-apart from a region of said pin having a load thereon that is greater than a load to which the remaining regions of said pin are subjected, while avoiding any of the regions of said pin, lying in said plane, from moving toward said plane.
Claim 26
Dependent Claim
25 words
The system as recited in claim 13 wherein said chuck body is operable for disposing a substrate using an electrostatic force or using a vacuum.
Claim 27
Dependent Claim
33 words
The system as recited in claim 13 wherein said chuck body comprises a plurality of pin-cells and wherein said plurality of pin-cells are formed by fusing a base layer and a pin layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2010-07-16 | 2011-01-15 | 2011-07-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2014-07-16 | 2015-01-15 | 2015-07-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2018-07-16 | 2019-01-15 | 2019-07-17 | $7700.00 | Window Closed / Lapsed |