US6771372B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Rotational stage with vertical axis adjustment
Assignee: Therma Wave Inc
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Filing: 2002-06-24
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Granted: 2004-08-03
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Expires: 2022-06-24
Abstract
Abstract A stage system is disclosed for supporting and positioning a semiconductor wafer for inspection in an optical metrology device. A chuck for supporting a wafer is mounted to the stage system. The stage system can move the chuck along two linear orthogonal axes. A rotational stage is also provided for rotating the chuck. A mechanism is provided for adjusting the vertical position of a chuck to allow for focusing of the probe beam of the metrology device. The vertical adjustment mechanism is designed so that it does impede the rotational positioning of the chuck.
Inventors
- 👤 Thomas Traber
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:48
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/70; H10P72/76; H10P72/7604; H10P72/7626; G; G01; G01B; G01B11/00; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; G03F7/70716; H10P72/50
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
150 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stage, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein each of said first and second annular membranes is substantially rigid in a direction in the plane of the respective annular membrane and flexible in a direction along a central axis of the respective annular membrane.
Claim 2
Dependent Claim
150 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stage, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein each of said first and second annular membranes is substantially rigid in a direction in the plane of the respective annular membrane and flexible in a direction along a central axis of the respective annular membrane.
Claim 3
Dependent Claim
27 words
A stage system as recited in claim 1 , further including a rotational driver operationally coupled to the stage for rotating the chuck about a central axis.
Claim 4
Dependent Claim
22 words
A stage system as recited in claim 1 , further including two linear stages for moving the chuck along two orthogonal axes.
Claim 5
Dependent Claim
36 words
A stage system as recited in claim 1 , wherein: the stage has a rotatable drive section, and the first and second annular membranes are each operationally coupled between the rotatable drive section and the chuck.
Claim 6
Dependent Claim
46 words
A stage system as recited in claim 1 , wherein said axial actuator includes a PZT element the length of which is adjustable in response to a drive voltage, and a lever element for transferring the changes in length of the PZT element to the chuck.
Claim 7
Dependent Claim
32 words
A stage system as recited in claim 5 , further including a means for monitoring the position of the chuck and providing signals for adjusting the drive voltage to the PZT element.
Claim 8
Dependent Claim
134 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stare, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein the first annular membrane has a different diameter than, and is positioned concentrically with respect to, said second annular membrane.
Claim 9
Dependent Claim
134 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stare, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein the first annular membrane has a different diameter than, and is positioned concentrically with respect to, said second annular membrane.
Claim 10
Dependent Claim
27 words
A stage system as recited in claim 7 , further including a rotational driver operationally coupled to the stage for rotating the chuck about a central axis.
Claim 11
Dependent Claim
22 words
A stage system as recited in claim 7 , further including two linear stages for moving the chuck along two orthogonal axes.
Claim 12
Dependent Claim
36 words
A stage system as recited in claim 7 , wherein: the stage has a rotatable drive section, and the first and second annular membranes are each operationally coupled between the rotatable drive section and the chuck.
Claim 13
Dependent Claim
46 words
A stage system as recited in claim 7 , wherein said axial actuator includes a PZT element the length of which is adjustable in response to a drive voltage, and a lever element for transferring the changes in length of the PZT element to the chuck.
Claim 14
Dependent Claim
32 words
A stage system as recited in claim 11 , further including a means for monitoring the position of the chuck and providing signals for adjusting the drive voltage to the PZT element.
Claim 15
Dependent Claim
128 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stage, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein the first annular membrane is displaced vertically with respect to the second annular membrane.
Claim 16
Dependent Claim
128 words
A stage system for supporting a sample in a metrology device, comprising: a chuck having an upper surface for supporting a wafer; an axial actuator operationally coupled to the chuck for raising and lowering the chuck in a direction orthogonal to a plane of the upper surface; and a stage positioned to support said chuck, the stage including at least one flexure member coupling the chuck to the stage, such that tilting and lateral movement of the chuck, with respect to the stage, is significantly minimized while the chuck is being raised and lowered, the at least one flexure member including first and second annular membranes each coupling the chuck to the stage; wherein the first annular membrane is displaced vertically with respect to the second annular membrane.
Claim 17
Dependent Claim
27 words
A stage system as recited in claim 13 , further including a rotational driver operationally coupled to the stage for rotating the chuck about a central axis.
Claim 18
Dependent Claim
22 words
A stage system as recited in claim 13 , further including two linear stages for moving the chuck along two orthogonal axes.
Claim 19
Dependent Claim
36 words
A stage system as recited in claim 13 , wherein: the stage has a rotatable drive section, and the first and second annular membranes are each operationally coupled between the rotatable drive section and the chuck.
Claim 20
Dependent Claim
46 words
A stage system as recited in claim 13 , wherein said axial actuator includes a PZT element the length of which is adjustable in response to a drive voltage, and a lever element for transferring the changes in length of the PZT element to the chuck.
Claim 21
Dependent Claim
32 words
A stage system as recited in claim 17 , further including a means for monitoring the position of the chuck and providing signals for adjusting the drive voltage to the PZT element.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2007-08-03 | 2008-02-02 | 2008-08-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2011-08-03 | 2012-02-02 | 2012-08-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2015-08-03 | 2016-02-02 | 2016-08-03 | $7700.00 | Window Closed / Lapsed |