Patent FR2525896A1 successfully refreshed from Google Patents.
US6878248B2
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing an object in a vacuum recipient
Assignee: Oerlikon Surface Solutions AG Pfaeffikon
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Filing: 2003-03-17
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Granted: 2005-04-12
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Expires: 2023-03-17
Abstract
Abstract A method of manufacturing an object in a vacuum treatment apparatus having a vacuum recipient for containing an atmosphere, includes the steps of supporting a substrate on a work piece carrier arrangement in the recipient and treating the substrate to manufacture the object in the vacuum recipient. The treating process includes generating electrical charge carriers in the atmosphere and in the recipient which are of the type that form electrically insulating material and providing at least two electroconductive surfaces in the recipient. Power, such as a DC signal, is supplied to at least one of the electroconductive surfaces so that at least one of the electroconductive surfaces receives the electrically insulating material for covering at least part of that electroconductive surface. This causes electrical isolation of that electroconductive surface which leads to arcing and damage to the object. A control signal is applied to the electroconductive surfaces during repeating and alternating first time spans and second time spans, for prevent arcing at the part of the electroconductive surfaces which is, or is becoming electrically isolated from the atmosphere by being covered by the electrical charge carriers.
Inventors
- 👤 Hans Signer
- 👤 Eduard Kügler
- 👤 Klaus Wellerdieck
- 👤 Helmut Rudigier
- 👤 Walter Haag
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:46
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/54; H01J2237/00; H01J2237/02; H01J2237/0203; H01J2237/0206
Claims Analysis
Total Claims: 70
Claim 1
Independent Claim
173 words
An apparatus for electrically feeding at last two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor is one of the at least two electrical conductors a controlled parallel switching arrangement connected been the electrical conductors to control a current path between the conductors, the controlled parallel switching arrangement having a current path controllably switchable to higher and lower conductivities and connected between to be electrical conductors in between the DC power supply and the outputs be connected to the electroconductive surfaces; and a control arrangement connected to the parallel switching arrangement for controlling the switching arrangement, the control arrangement including a timing unit with a timing out output, operationally connected to said controlled parallel switching arrangement.
Claim 2
Independent Claim
173 words
An apparatus for electrically feeding at last two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor is one of the at least two electrical conductors a controlled parallel switching arrangement connected been the electrical conductors to control a current path between the conductors, the controlled parallel switching arrangement having a current path controllably switchable to higher and lower conductivities and connected between to be electrical conductors in between the DC power supply and the outputs be connected to the electroconductive surfaces; and a control arrangement connected to the parallel switching arrangement for controlling the switching arrangement, the control arrangement including a timing unit with a timing out output, operationally connected to said controlled parallel switching arrangement.
Claim 3
Dependent Claim
21 words
The apparatus according to claim 1 , wherein the parallel switching arrangement comprises a controlled switching unit intermittently short-circuiting the conductors.
Claim 4
Dependent Claim
31 words
The apparatus according to claim 1 , including at least one capacitor between the DC power supply and the outputs to be operationally connected to the at least two electroconductive surfaces.
Claim 5
Dependent Claim
25 words
The apparatus according to claim 1 , further comprising measuring means having an input which is operationally connected to control input of the switching arrangement.
Claim 6
Dependent Claim
35 words
The apparatus according to claim 4 , wherein the output signal of the measuring means is fed to the parallel switching arrangement for adjusting first and second time spans of operation of the switching arrangement.
Claim 7
Dependent Claim
44 words
The apparatus according to claim 5 , wherein the output of the measuring means is led to an input of a threshold-sensitive unit in the parallel switching arrangement, the output of the threshold-sensitive unit acting on a control input for adjusting the time spans.
Claim 8
Dependent Claim
31 words
The apparatus according to claim 1 , wherein the parallel switching arrangement comprises a controlled current path connecting the outputs to be operationally connected to the at least two electroconductive surfaces.
Claim 9
Dependent Claim
35 words
The apparatus according to claim 1 , further comprising a controlled current path between the outputs to be operationally connected to the at least two electroconductive surfaces, the controlled current path comprising a capacitative element.
Claim 10
Dependent Claim
35 words
The apparatus according to claim 1 , further comprising a detection unit for detecting arcing within the vacuum treatment apparatus, the detection unit having an output connected to the switching arrangement for controlling the arrangement.
Claim 11
Dependent Claim
50 words
The apparatus according to claim 1 , including a capacitative element connected to one of the outputs to be operationally connected to one of the electroconductive surfaces, the DC power supply and the parallel switching arrangement switching the power supply in series to the capacitative element and between the outputs.
Claim 12
Independent Claim
239 words
An apparatus for electrically feeding at least two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor in one of the at least two electrical conductors; a parallel switching arrangement connected between the electrical conductors to control a current path between the conductors; and the parallel switching arrangement comprising a controlled adjusting unit with a time-controlled discharge or charge current loop operationally bridging the outputs to be operationally connected to the at least two electroconductive surfaces and having a high ohmic resistance during first time spans and a lower ohmic resistance during second time spans, so that a voltage between the electroconductive surfaces, due to electrical charge carriers in the atmosphere, may be discharged through the current loop during the second time spans, and with a timing unit connected to a timing input of the time controlled current loop controlling the first and second time spans to occur repetitively so as to prevent arcing at parts of the electroconductive surfaces which are or which are becoming electrically isolated from the atmosphere by some of the electrical charge carriers depositing as insulating material thereon.
Claim 13
Independent Claim
239 words
An apparatus for electrically feeding at least two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor in one of the at least two electrical conductors; a parallel switching arrangement connected between the electrical conductors to control a current path between the conductors; and the parallel switching arrangement comprising a controlled adjusting unit with a time-controlled discharge or charge current loop operationally bridging the outputs to be operationally connected to the at least two electroconductive surfaces and having a high ohmic resistance during first time spans and a lower ohmic resistance during second time spans, so that a voltage between the electroconductive surfaces, due to electrical charge carriers in the atmosphere, may be discharged through the current loop during the second time spans, and with a timing unit connected to a timing input of the time controlled current loop controlling the first and second time spans to occur repetitively so as to prevent arcing at parts of the electroconductive surfaces which are or which are becoming electrically isolated from the atmosphere by some of the electrical charge carriers depositing as insulating material thereon.
Claim 14
Dependent Claim
21 words
The apparatus according to claim 11 , wherein the first time spans are each substantially longer than the second time spans.
Claim 15
Independent Claim
225 words
An apparatus for electrically feeding at least two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor in one of the at least two electrical conductors; a parallel switching arrangement connected between the electrical conductors to control a current path between the conductors; and the parallel switching arrangement comprising a controlled adjusting unit with a time-controlled discharge or charge current loop bridging the outputs to be operationally connected to the at least two electroconductive surfaces and the DC power supply, the discharge or charge current loop being controllably switchable to have a higher ohmic resistance during first time spans and a lower ohmic resistance during second time spans and further comprising a timing unit connected to a timing input of the controlled current loop and controlling the first and second time spans to occur repetitively so as to prevent arcs at parts of the electroconductive surfaces which are or which are becoming electrically isolated from the atmosphere by some of the electrical charge carriers depositing as insulating material thereon.
Claim 16
Independent Claim
225 words
An apparatus for electrically feeding at least two electroconductive surfaces which are mutually electrically isolated from each other in a vacuum treatment apparatus wherein a vacuum atmosphere containing electrical charge carriers of the type that form electrically isolating material is provided, the apparatus comprising: a DC power supply; at least two electrical conductors connecting the DC power supply to outputs to be operationally connected to the at least two electroconductive surfaces; an inductor in one of the at least two electrical conductors; a parallel switching arrangement connected between the electrical conductors to control a current path between the conductors; and the parallel switching arrangement comprising a controlled adjusting unit with a time-controlled discharge or charge current loop bridging the outputs to be operationally connected to the at least two electroconductive surfaces and the DC power supply, the discharge or charge current loop being controllably switchable to have a higher ohmic resistance during first time spans and a lower ohmic resistance during second time spans and further comprising a timing unit connected to a timing input of the controlled current loop and controlling the first and second time spans to occur repetitively so as to prevent arcs at parts of the electroconductive surfaces which are or which are becoming electrically isolated from the atmosphere by some of the electrical charge carriers depositing as insulating material thereon.
Claim 17
Dependent Claim
21 words
The apparatus according to claim 13 , wherein the first time spans are each substantially longer than the second time spans.
Claim 18
Dependent Claim
106 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said DC outputs to said supply outputs; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current and path, an electric power source operationally connected to said supply outputs whenever said controlled parallel switching arrangement is of said lower conductivity.
Claim 19
Dependent Claim
106 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said DC outputs to said supply outputs; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current and path, an electric power source operationally connected to said supply outputs whenever said controlled parallel switching arrangement is of said lower conductivity.
Claim 20
Dependent Claim
24 words
The power supply apparatus of claim 15 , wherein said control input is operationally connected to a control input of said power supply apparatus.
Claim 21
Dependent Claim
31 words
The power supply apparatus of claim 16 wherein a threshold sensitive unit is interconnected between said control input of said supply apparatus and said control input of said parallel switching arrangement.
Claim 22
Dependent Claim
23 words
The power supply apparatus of claim 15 , further comprising a timing unit with a timing output operationally connected to said control input.
Claim 23
Dependent Claim
20 words
The power supply apparatus of claim 18 , wherein said timing unit controls said controlled parallel switching at a frequency.
Claim 24
Dependent Claim
19 words
The power supply apparatus of claim 19 , wherein said frequency is at least one of adjustable and variable.
Claim 25
Dependent Claim
18 words
The power supply apparatus of claim 19 , wherein said frequency is between 50 Hz and 1 MHz.
Claim 26
Dependent Claim
18 words
The power supply apparatus of claim 19 , wherein said frequency is between 5 kHz and 100 kHz.
Claim 27
Dependent Claim
18 words
The power supply apparatus of claim 19 , wherein said frequency is between 10 kHz and 20 kHz.
Claim 28
Dependent Claim
34 words
The power supply apparatus of claim 18 , wherein said timing unit controls said controlled parallel switching arrangement to establish said lower conductivity during repetitive time spans of between 50 nsec and 10 μsec.
Claim 29
Dependent Claim
19 words
The power supply apparatus of claim 24 , wherein said time spans are between 0.5 μsec and 2 μsec.
Claim 30
Dependent Claim
19 words
The power supply apparatus of claim 24 , wherein said time spans are between 2 μsec and 10 μsec.
Claim 31
Dependent Claim
15 words
The power supply apparatus of claim 24 , wherein said lower conductivity is a short-circuit.
Claim 32
Dependent Claim
20 words
The power supply apparatus of claim 24 , wherein one of said at least two electrical conductors comprises an inductor.
Claim 33
Dependent Claim
31 words
The power supply apparatus of claim 15 , further comprising an electric power source operationally connected to said supply outputs whenever said controlled parallel switching arrangement is of said higher conductivity.
Claim 34
Dependent Claim
102 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said and comprising; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current path; and an electric power source operationally connected to said supply outputs whenever said controlled parallel switching arrangement is of said higher conductivity.
Claim 35
Dependent Claim
102 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said and comprising; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current path; and an electric power source operationally connected to said supply outputs whenever said controlled parallel switching arrangement is of said higher conductivity.
Claim 36
Dependent Claim
24 words
The power supply apparatus of claim 30 , wherein said control input is operationally connected to a control input of said power supply apparatus.
Claim 37
Dependent Claim
31 words
The power supply apparatus of claim 31 , wherein threshold sensitive unit is interconnected between said control input of said supply apparatus and said control input of said parallel switching arrangement.
Claim 38
Dependent Claim
23 words
The power supply apparatus of claim 30 , further comprising a timing unit with a timing output operationally connected to said control input.
Claim 39
Dependent Claim
20 words
The power supply apparatus of claim 33 , wherein said timing unit controls said controlled parallel switching at a frequency.
Claim 40
Dependent Claim
19 words
The power supply apparatus of claim 34 , wherein said frequency is at least one of adjustable and variable.
Claim 41
Dependent Claim
18 words
The power supply apparatus of claim 34 , wherein said frequency is between 50 Hz and 1 MHz.
Claim 42
Dependent Claim
18 words
The power supply apparatus of claim 34 , wherein said frequency is between 5 kHz and 100 kHz.
Claim 43
Dependent Claim
18 words
The power supply apparatus of claim 34 , wherein said frequency is between 10 kHz and 20 kHz.
Claim 44
Dependent Claim
34 words
The power supply apparatus of claim 33 , wherein said timing unit controls said controlled parallel switching arrangement to establish said lower conductivity during repetitive time spans of between 50 nsec and 10 μsec.
Claim 45
Dependent Claim
19 words
The power supply apparatus of claim 39 , wherein said time spans are between 0.5 μsec and 2 μsec.
Claim 46
Dependent Claim
19 words
The power supply apparatus of claim 39 , wherein said time spans are between 2 μsec and 10 μsec.
Claim 47
Dependent Claim
15 words
The power supply apparatus of claim 39 , wherein said lower conductivity is a short-circuit.
Claim 48
Dependent Claim
20 words
The power supply apparatus of claim 39 , wherein one of said at least two electrical conductors comprises an inductor.
Claim 49
Dependent Claim
83 words
A control unit to be connected to at least two electroconductive surfaces in a vacuum treatment apparatus, said control unit having at least two outputs and comprising a controlled parallel switching arrangement with a current path switchable to higher and lower conductivity between said outputs, said controlled parallel switching arrangement having a control in out for said switching, and said control unit further comprising a timing unit with an output, the output of said timing unit being operationally connected to said control input.
Claim 50
Dependent Claim
83 words
A control unit to be connected to at least two electroconductive surfaces in a vacuum treatment apparatus, said control unit having at least two outputs and comprising a controlled parallel switching arrangement with a current path switchable to higher and lower conductivity between said outputs, said controlled parallel switching arrangement having a control in out for said switching, and said control unit further comprising a timing unit with an output, the output of said timing unit being operationally connected to said control input.
Claim 51
Dependent Claim
19 words
The control unit of claim 44 , having an electric power source in series with said controlled switching arrangement.
Claim 52
Dependent Claim
15 words
The control unit of claim 44 , wherein said timing unit operates at a frequency.
Claim 53
Dependent Claim
18 words
The control unit of claim 46 , wherein said frequency is at least one of adjustable and variable.
Claim 54
Dependent Claim
20 words
The control unit of claim 44 , further comprising at least two inputs, said inputs being connected to said outputs.
Claim 55
Dependent Claim
23 words
The control unit of claim 48 , further comprising an electric power source between one of said inputs and on of said outputs.
Claim 56
Dependent Claim
22 words
The control unit of claim 44 , wherein said control input is operationally connected to a control input of said control unit.
Claim 57
Dependent Claim
98 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said DC outputs to said supply outputs; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current path; and a timing unit with a timing output operationally connected to said control input.
Claim 58
Dependent Claim
98 words
A power supply apparatus for electrically supplying at least two electroconductive surfaces in a vacuum treatment apparatus, said supply apparatus having at least two supply outputs and comprising: at least one DC power supply unit having DC outputs; two electrical conductors connecting said DC outputs to said supply outputs; a controlled parallel switching arrangement having a current path between said electrical conductors controllably switchable to higher and lower conductivity, and a control input, a signal applied thereto controlling said switching of said current path; and a timing unit with a timing output operationally connected to said control input.
Claim 59
Dependent Claim
24 words
The power supply apparatus of claim 51 , wherein said control input is operationally connected to a control input of said power supply apparatus.
Claim 60
Dependent Claim
32 words
The power supply apparatus of claim 52 , wherein a threshold sensitive unit is interconnected between said control input of said supply apparatus and said control input of said parallel switching arrangement.
Claim 61
Dependent Claim
20 words
The power supply apparatus of claim 51 , wherein said timing unit controls said controlled parallel switching at a frequency.
Claim 62
Dependent Claim
19 words
The power supply apparatus of claim 54 , wherein said frequency is at least one of adjustable and variable.
Claim 63
Dependent Claim
18 words
The power supply apparatus of claim 54 , wherein said frequency is between 50 Hz and 1 MHz.
Claim 64
Dependent Claim
18 words
The power supply apparatus of claim 54 , wherein said frequency is between 5 kHz and 100 kHz.
Claim 65
Dependent Claim
18 words
The power supply apparatus of claim 54 , wherein said frequency is between 10 kHz and 20 kHz.
Claim 66
Dependent Claim
34 words
The power supply apparatus of claim 51 , wherein said timing unit controls said controlled parallel switching arrangement to establish said lower conductivity during repetitive time spans of between 50 nsec and 10 μsec.
Claim 67
Dependent Claim
19 words
The power supply apparatus of claim 59 , wherein said time spans are between 0.5 μsec and 2 μsec.
Claim 68
Dependent Claim
19 words
The power supply apparatus of claim 59 , wherein said time spans are between 2 μsec and 10 μsec.
Claim 69
Dependent Claim
15 words
The power supply apparatus of claim 59 , wherein said lower conductivity is a short-circuit.
Claim 70
Dependent Claim
20 words
The power supply apparatus of claim 59 , wherein one of said at least two electrical conductors comprises an inductor.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2008-04-11 | 2008-10-11 | 2009-04-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2012-04-11 | 2012-10-11 | 2013-04-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2016-04-11 | 2016-10-11 | 2017-04-12 | $7700.00 | Window Closed / Lapsed |