US4872835A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Hot chuck assembly for integrated circuit wafers
Assignee: HP Inc
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Filing: 1986-07-24
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Granted: 1989-10-10
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Expires: 2006-07-24
Abstract
Abstract A hot chuck assembly characterized by a platen suspended over a base assembly by four, equally spaced mounting assemblies. The suspension points on the platen are provided as close as possible to its upper, wafer support surface so that thermal expansion of the platen has a minimal effect on the position of a supported wafer. Each of the mounting post assemblies includes a pair of resilient leg portions which can flex in a radial direction to absorb radial expansion or contraction of the platen. In consequence, the hot chuck assembly of the present invention minimizes both lateral and axial displacement of a supported integrated circuit wafer as the platen heats and cools.
Inventors
- 👤 Barclay J. Tullis
- 👤 Richard G. Baer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 14:55
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2855; G01R31/286; G01R31/2865; B; B23; B23Q; B23Q1/00; B23Q1/25; B23Q1/26; B23Q1/34; B23Q1/36; B23Q11/00; B23Q11/12; B23Q11/126; B23Q11/14; B23Q11/143; G01R31/2872; G01R31/2874
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
205 words
A hot chuck assembly comprising: base means; chuck means including: a platen having a substantially horizontal, planar, wafer support surface; and heater means for heating said platen; and support means supporting said chuck over said base means such that said wafer support surface remains in a substantially constant horizontal plane, said support means including a plurality of mounting assemblies coupled to said base means and supporting said chuck means over said base means, where each of said mounting assemblies includes: a substantially horizontal mounting pin coupled to said chuck means proximate and substantially parallel to said wafer support surface; and a mounting post attached to said base means and adapted to radially flex relative to said wafer support surface, said mounting post including a foot portion attached to said base means, a head portion couples to said mounting pin, and flexible leg means coupling said foot portion to said head portion, said flexible leg means including a plurality of flexible leg portions which are aligned in the direction of said radial flexure; and means for cooling said head portion of said mounting post means including conduit means contacting said head portion of said mounting post means, and a fluid coolant circulated through said conduit means.
Claim 2
Dependent Claim
205 words
A hot chuck assembly comprising: base means; chuck means including: a platen having a substantially horizontal, planar, wafer support surface; and heater means for heating said platen; and support means supporting said chuck over said base means such that said wafer support surface remains in a substantially constant horizontal plane, said support means including a plurality of mounting assemblies coupled to said base means and supporting said chuck means over said base means, where each of said mounting assemblies includes: a substantially horizontal mounting pin coupled to said chuck means proximate and substantially parallel to said wafer support surface; and a mounting post attached to said base means and adapted to radially flex relative to said wafer support surface, said mounting post including a foot portion attached to said base means, a head portion couples to said mounting pin, and flexible leg means coupling said foot portion to said head portion, said flexible leg means including a plurality of flexible leg portions which are aligned in the direction of said radial flexure; and means for cooling said head portion of said mounting post means including conduit means contacting said head portion of said mounting post means, and a fluid coolant circulated through said conduit means.
Claim 3
Dependent Claim
85 words
A hot chuck assembly comprising: base means; chuck means including: a platen having a top, substantially horizontal, planar, wafer support surface and an opposing bottom surface; and heater means for heating said platen; and support means coupled to said platen proximate to said support surface and distal from said bottom surface, said support means being adapted to support said chuck means over said base means such that said wafer support surface remains in a substantially constant horizontal plane regardless of the temperature of said platen.
Claim 4
Dependent Claim
85 words
A hot chuck assembly comprising: base means; chuck means including: a platen having a top, substantially horizontal, planar, wafer support surface and an opposing bottom surface; and heater means for heating said platen; and support means coupled to said platen proximate to said support surface and distal from said bottom surface, said support means being adapted to support said chuck means over said base means such that said wafer support surface remains in a substantially constant horizontal plane regardless of the temperature of said platen.
Claim 5
Dependent Claim
33 words
A hot chuck assembly as recited in claim 1 wherein said support means includes a plurality of mounting assemblies coupled to said base means and supporting said chuck means over said base means.
Claim 6
Dependent Claim
40 words
A hot chuck assembly as recited in claim 3 wherein each of said mounting assemblies include mounting post means attached to said base means, and substantially horizontal mounting pin means extending between said mounting post means and said chuck means.
Claim 7
Dependent Claim
29 words
A hot chuck assembly as recited in claim 4 wherein said mounting pin means are coupled to said chuck means proximate and substantially parallel to said wafer support surface.
Claim 8
Dependent Claim
25 words
A hot chuck assembly as recited in claim 5 wherein said mounting post means are capable of radial flexure relative to said wafer support surface.
Claim 9
Dependent Claim
44 words
A hot chuck assembly as recited in claim 6 wherein said mounting post means includes a foot portion attached to said base means, a head portion coupled to said mounting pin means, and flexible leg means coupling said bottom portion to said top portion.
Claim 10
Dependent Claim
31 words
A hot chuck assembly as recited in claim 7 wherein said flexible leg means includes a plurality of flexible leg portions which are aligned in the direction of said radial flexure.
Claim 11
Dependent Claim
22 words
A hot chuck assembly as recited in claim 8 further comprising means for cooling said head portion of said mounting post means.
Claim 12
Dependent Claim
35 words
A hot chuck assembly as recited in claim 5 wherein said mounting pin means has a lower thermal conductivity than the thermal conductivity of said platen and the thermal conductivity of said mounting post means.
Claim 13
Dependent Claim
36 words
A hot chuck assembly as recited in claim 10 wherein said mounting pin means comprises a threaded shank, and wherein said platen is provided with a threaded bore that can be engaged with said threaded shank.
Claim 14
Dependent Claim
40 words
A hot chuck assembly as recited in claim 1 wherein said chuck means is provided with vacuum channel means opening on said wafer support surface, and vacuum coupling means adapted to couple said vacuum channel means to a vacuum source.
Claim 15
Dependent Claim
159 words
A hot chuck assembly comprising: base means having opposing lower and upper surfaces, where said lower surface of said base means is adapted for attachment to an X-Y stage table; chuck means including a platen having a substantially horizontal, planar, wafer support surface; heating means for selectively heating said platen; and wafer holding means adapted to selectively hold a wafer against said wafer support surface; and a plurality of mounting assemblies attached to said base means and supporting said chuck means above said upper surface of said base means; where each of said mounting assemblies include mounting post means capable of radial flexure relative said wafer support surface, and mounting pin means coupled at a first end to said mounting post means and coupled at a second end to said platen; whereby vertical movement of said wafer support surface is minimized as said chuck means changes temperature so that said wafer support remains in a substantially constant horizontal plane.
Claim 16
Dependent Claim
159 words
A hot chuck assembly comprising: base means having opposing lower and upper surfaces, where said lower surface of said base means is adapted for attachment to an X-Y stage table; chuck means including a platen having a substantially horizontal, planar, wafer support surface; heating means for selectively heating said platen; and wafer holding means adapted to selectively hold a wafer against said wafer support surface; and a plurality of mounting assemblies attached to said base means and supporting said chuck means above said upper surface of said base means; where each of said mounting assemblies include mounting post means capable of radial flexure relative said wafer support surface, and mounting pin means coupled at a first end to said mounting post means and coupled at a second end to said platen; whereby vertical movement of said wafer support surface is minimized as said chuck means changes temperature so that said wafer support remains in a substantially constant horizontal plane.
Claim 17
Dependent Claim
53 words
A hot chuck assembly as recited in claim 13 wherein said base means includes a table interface plate adapted for attachment to said X-Y table; a mounting post plate adapted for attachment to said mounting post means; and an insulating spacer plate sandwiched between said table interface plate and said mounting post plate.
Claim 18
Dependent Claim
38 words
A hot chuck assembly as recited in claim 13 wherein each of said mounting post means include a plurality of flexible leg portions that are mutually parallel and which are aligned in the direction of said radial flexure.
Claim 19
Dependent Claim
29 words
A hot chuck assembly as recited in claim 13 wherein said heating means includes resistance means adapted to heat said platen; and means for electrically energizing said resistance means.
Claim 20
Dependent Claim
39 words
A hot chuck assembly as recited in claim 13 wherein said wafer holding means includes a vacuum channel provided in said platen and opening on said wafer support surface; and means for applying a vacuum to said vacuum channel.
Claim 21
Dependent Claim
25 words
A hot chuck assembly as recited in claim 13 wherein said chuck means further includes temperature sensing means for determining the temperature of said platen.
Claim 22
Dependent Claim
25 words
A hot chuck assembly as recited in claim 13 wherein each of said mounting post means includes flexible leg means capable of said radial flexure.
Claim 23
Dependent Claim
29 words
A hot chuck assembly as recited in claim 19 wherein said flexible leg means includes a plurality of flexible leg portions aligned in the direction of said radial flexure.
Claim 24
Dependent Claim
34 words
A hot chuck assembly as recited in claim 13 wherein said mounting pin means is substantially parallel to said wafer support surface and is attached to said platen proximate to said wafer support surface.
Claim 25
Dependent Claim
35 words
A hot chuck assembly as recited in claim 13 wherein said mounting pins means has a lower thermal conductivity than the thermal conductivity of said platen and the thermal conductivity of said mounting post means.
References Cited (Backward Citations)
US3064363A
Cited
US3889389A
Cited
US4020563A
Cited
US4518848A
Cited
US4415788A
Cited
US4556785A
Cited
US4549052A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-10-09 | 1993-04-10 | 1993-10-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-10-09 | 1997-04-10 | 1997-10-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-10-09 | 2001-04-10 | 2001-10-10 | $7700.00 | Window Closed / Lapsed |