US5842461A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dicing machine
Assignee: Tokyo Seimitsu Co Ltd
•
Filing: 1997-08-08
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Granted: 1998-12-01
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Expires: 2017-08-08
Abstract
Abstract A dicing machine of the present invention is provided with two spindles, which are arranged parallel to one another in the direction of the Y-axis and face one another. A workpiece is moved toward the spindles in the direction of the X-axis, and two blades fitted to the two spindles cut the workpiece. The two spindles are movable in the direction of the Y-axis, so that the two blades can be arranged at a desired interval. One of the spindles is movable in the direction of the X-axis so that the two blades can be arranged on the same street. Hence, desired two streets or one street can be simultaneously cut with the two blades.
Inventors
- 👤 Masayuki Azuma
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:50
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0428; B; B28; B28D; B28D5/00; B28D5/02; B28D5/022; B28D5/029; H10P72/50; Y; Y10; Y10T; Y10T83/00; Y10T83/647; Y10T83/6584; Y10T83/6587
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
106 words
A dicing machine comprising: two blades for cutting a workpiece; two spindles for holding and rotating said blades, said spindles being arranged parallel to one another in a first direction and being capable of moving relatively to one another in the first direction and a second direction perpendicular to the first direction so that said blades can be arranged opposite to one another at a desired interval and can be arranged on a straight line in the second direction; and moving means for moving said spindles and the workpiece relatively to one another in the second direction so as to cut said workpiece with said blades.
Claim 2
Dependent Claim
106 words
A dicing machine comprising: two blades for cutting a workpiece; two spindles for holding and rotating said blades, said spindles being arranged parallel to one another in a first direction and being capable of moving relatively to one another in the first direction and a second direction perpendicular to the first direction so that said blades can be arranged opposite to one another at a desired interval and can be arranged on a straight line in the second direction; and moving means for moving said spindles and the workpiece relatively to one another in the second direction so as to cut said workpiece with said blades.
Claim 3
Dependent Claim
18 words
The dicing machine as defined in claim 1, wherein said two blades cut two streets on the workpiece.
Claim 4
Dependent Claim
29 words
The dicing machine as defined in claim 1, wherein said two blades are arranged in the straight line to cut one street on the workpiece at the same time.
Claim 5
Dependent Claim
17 words
The dicing machine as defined in claim 1, wherein said two blades are of the same type.
Claim 6
Dependent Claim
16 words
The dicing machine as defined in claim 1, wherein said two blades are of different types.
Claim 7
Dependent Claim
17 words
The dicing machine as defined in claim 1, wherein said blade cuts a groove on the workpiece.
Claim 8
Dependent Claim
15 words
The dicing machine as defined in claim 1, wherein the workpiece is a semiconductor wafer.
Claim 9
Dependent Claim
113 words
A dicing machine comprising: two blades for cutting a workpiece; two spindles for holding and rotating said blades, said spindles being arranged parallel to one another in a first direction and being capable of moving relatively to one another in a second direction tilting at a predetermined angle from the first direction to a third direction perpendicular to the first direction so that said blades can have a desired interval in the first direction and can be arranged on a straight line in the third direction; and moving means for moving said spindles and the workpiece relatively to one another in the third direction so as to cut said workpiece with said blades.
Claim 10
Dependent Claim
113 words
A dicing machine comprising: two blades for cutting a workpiece; two spindles for holding and rotating said blades, said spindles being arranged parallel to one another in a first direction and being capable of moving relatively to one another in a second direction tilting at a predetermined angle from the first direction to a third direction perpendicular to the first direction so that said blades can have a desired interval in the first direction and can be arranged on a straight line in the third direction; and moving means for moving said spindles and the workpiece relatively to one another in the third direction so as to cut said workpiece with said blades.
Claim 11
Dependent Claim
18 words
The dicing machine as defined in claim 8, wherein said two blades cut two streets on the workpiece.
Claim 12
Dependent Claim
29 words
The dicing machine as defined in claim 8, wherein said two blades are arranged in the straight line to cut one street on the workpiece at the same time.
Claim 13
Dependent Claim
17 words
The dicing machine as defined in claim 8, wherein said two blades are of the same type.
Claim 14
Dependent Claim
16 words
The dicing machine as defined in claim 8, wherein said two blades are of different types.
Claim 15
Dependent Claim
17 words
The dicing machine as defined in claim 8, wherein said blade cuts a groove on the workpiece.
Claim 16
Dependent Claim
15 words
The dicing machine as defined in claim 8, wherein the workpiece is a semiconductor wafer.
Claim 17
Dependent Claim
32 words
The dicing machine as defined in claim 8, further comprising two guide rails for guiding said two spindles, said two guide rails being arranged parallel to one another in the second direction.
Claim 18
Dependent Claim
23 words
The dicing machine as defined in claim 15, wherein said guide rails are beam-shaped and said spindles are hung from said guide rails.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-11-30 | 2002-06-01 | 2002-12-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-11-30 | 2006-06-01 | 2006-12-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-11-30 | 2010-06-01 | 2010-12-01 | $7700.00 | Window Closed / Lapsed |