US5738800A
Expired / Lapsed
US
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Composition and method for polishing a composite of silica and silicon nitride
Assignee: DuPont Electronic Materials Holding Inc
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Filing: 1997-02-19
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Granted: 1998-04-14
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Expires: 2017-02-19
Abstract
Abstract A composition is provided for polishing a composite comprised of silica and silicon nitride comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with the silica and silicon nitride wherein the complexing agent has has two or more functional groups each having a dissociable proton, the functional groups being the same or different.
Inventors
- 👤 Sharath D. Hosali
- 👤 Anantha R. Sethuraman
- 👤 Jiun-Fang Wang
- 👤 Lee Melbourne Cook
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 08:56
CPC Classifications
C; C09; C09K; C09K3/00; C09K3/14; C09K3/1454; C09K3/1463; C03; C03C; C03C19/00; H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; H10P95/064
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
76 words
A method of polishing a composite comprised of silica and silicon nitride comprising: applying a slurry at a polishing interface between a polishing pad and said composite comprised of silica and silicon nitride, said slurry comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with said silica and silicon nitride, wherein said compound has two or more functional groups each having a dissociable proton, the functional groups being the same or different.
Claim 2
Independent Claim
76 words
A method of polishing a composite comprised of silica and silicon nitride comprising: applying a slurry at a polishing interface between a polishing pad and said composite comprised of silica and silicon nitride, said slurry comprising: an aqueous medium, abrasive particles, a surfactant, and a compound which complexes with said silica and silicon nitride, wherein said compound has two or more functional groups each having a dissociable proton, the functional groups being the same or different.
Claim 3
Dependent Claim
20 words
A method according to claim 1 wherein said compound which complexes with silica and silicon nitride contains a benzene ring.
Claim 4
Dependent Claim
41 words
A method according to claim 1 wherein said compound which complexes with silica and silicon nitride is a straight chain mono- or di-carboxylic acid or salt which has a secondary hydroxyl group in an alpha position relative to a carboxylate group.
Claim 5
Dependent Claim
41 words
A method according to claim 1 wherein said compound which complexes with silica and silicon nitride is a tri- or poly-carboxylic acid or salt which has a secondary or tertiary hydroxyl group in an alpha position relative to a carboxylic group.
Claim 6
Dependent Claim
12 words
A method according to claim 1 wherein said abrasive particles comprise ceria.
Claim 7
Dependent Claim
12 words
A method according to claim 1 wherein said surfactant comprises a fluorosurfactant.
Claim 8
Dependent Claim
20 words
A method according to claim 2 wherein said compound which complexes with silica and silicon nitride is potassium hydrogen phthalate.
Claim 9
Dependent Claim
66 words
A method according to claim 2 wherein said polishing composition comprises: water, about 0.2% to about 5% ceria, about 0.5% to about 3.5% potassium hydrogen phthalate, about 0.1% to about 0.5% fluorosurfactant, all percentages by weight, and wherein the pH of said polishing composition is adjusted from about 6 to about 7 by the addition of a base or an amine compound to said polishing composition.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-13 | 2001-10-13 | 2002-04-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-13 | 2005-10-13 | 2006-04-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-13 | 2009-10-13 | 2010-04-14 | $7700.00 | Window Closed / Lapsed |