US4810601A
Expired / Lapsed
US
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Top imaged resists
Assignee: International Business Machines Corp
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Filing: 1986-06-30
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Granted: 1989-03-07
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Expires: 2006-06-30
Abstract
Abstract The present invention is concerned with methods of converting a single resist layer into a multilayered resist. The upper portion of the single resist layer can be converted into a dry-etch resistant form. The conversion can be a blanket conversion of the upper portion of the resist layer or can be a patterned conversion of areas within the upper portion of the layer. A patternwise-converted resist can be oxygen plasma developed. The upper portion of the single resist layer can be patternwise converted into a chemically different composition or structure having altered absorptivity toward radiation. The difference in radiation absorptivity within the patterned upper portion of the resist enables subsequent use of blanket irradiation of the resist surface to create differences in chemical solubility between areas having the altered absorptivity toward radiation and non-altered areas. The difference in chemical solubility enables wet development of the patterned resist.
Inventors
- 👤 Robert D. Allen
- 👤 Kaolin N. Chiong
- 👤 Ming-Fea Chow
- 👤 Scott A. MacDonald
- 👤 Jer-Ming Yang
- 👤 Carlton G. Willson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:23
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/26; G03F7/265; G03F7/004; G03F7/038; G03F7/20; G03F7/2022; Y; Y10; Y10S; Y10S430/00; Y10S430/143; Y10S430/167; Y10S430/168
Claims Analysis
Total Claims: 30
Claim 1
Independent Claim
155 words
A method of converting the upper portion of a layer of polymeric material into a dry etch resistant form, comprising: (a) providing a layer of polymeric material comprised of at least one component which undergoes molecular rearrangement upon irradiation to produce reactive hydrogens selected from the group consisting of (1) o-nitrobenzyl derivatives which rearrange on exposure to radiation to form alcohols, acids, and amines, (2) photo-fries reactive units, (3) diazoketones, and (4) mixtures thereof; (b) irradiating the surface of said layer of polymeric material to induce molecular rearrangement of said at least one component to form reaction products having reactive hydrogens in at least the upper portion of said irradiated layer; and (c) treating said reaction products of said irradiated layer with a reactive organometallic reagent to react and bond said organometallic reagent at said reactive sites in the upper portion of said layer of polymeric material, whereby said upper portion is dry etch resistant.
Claim 2
Independent Claim
155 words
A method of converting the upper portion of a layer of polymeric material into a dry etch resistant form, comprising: (a) providing a layer of polymeric material comprised of at least one component which undergoes molecular rearrangement upon irradiation to produce reactive hydrogens selected from the group consisting of (1) o-nitrobenzyl derivatives which rearrange on exposure to radiation to form alcohols, acids, and amines, (2) photo-fries reactive units, (3) diazoketones, and (4) mixtures thereof; (b) irradiating the surface of said layer of polymeric material to induce molecular rearrangement of said at least one component to form reaction products having reactive hydrogens in at least the upper portion of said irradiated layer; and (c) treating said reaction products of said irradiated layer with a reactive organometallic reagent to react and bond said organometallic reagent at said reactive sites in the upper portion of said layer of polymeric material, whereby said upper portion is dry etch resistant.
Claim 3
Dependent Claim
63 words
The method of claim 1 wherein said component of said polymeric material is selected from the group consisting of ##STR8## wherein R 1 , R 2 , R 3 and R 5 32 H, alkyl, aryl, or part of a polymer backbone and R 4 =H, C n H 2n+1 wherein n ranges from about 1 to about 5, phenyl or substituted phenyls.
Claim 4
Dependent Claim
69 words
The method of claim 2 wherein R 1 =part of a styrene polymer backbone, wherein said polymer is a polymer or an acrylate polymer; R 2 , R 3 and R 5 =H, C n H 2n+1 wherein n ranges from 1 to about 15, phenyl, and substituted phenyls; and R 4 =H, C n H 2n+1 wherein n ranges from 1 to about 5, phenyl and substituted phenyls.
Claim 5
Dependent Claim
25 words
The method of claim 1 wherein said irradiation source is selected from the group consisting of photon emission sources, electron beam, ion beam, and X-ray.
Claim 6
Dependent Claim
31 words
The method of claim 4 wherein said irradiation source is a low acceleration voltage electron beam and wherein said electron beam voltage ranges from about 0.5 Kev to about 10 Kev.
Claim 7
Dependent Claim
31 words
The method of claim 1 wherein the irradiation of said layer is pattern-wise irradiation, so that said reaction products having said reactive hydrogens are created only in the pattern-wise irradiated areas.
Claim 8
Dependent Claim
26 words
The method of claim 6 including the additional step of: developing the patterned image in said irradiated and reacted areas by treatment with an oxygen plasma.
Claim 9
Dependent Claim
22 words
The method of claim 1 wherein said layer of polymeric resist material ranges from about 0.5 to about 20 micrometers in thickness.
Claim 10
Dependent Claim
31 words
The method of claim 8 wherein said upper portion of said layer of polymeric resist material or sensitized polymeric resist material ranges from about 0.1 to about 1.0 micrometer in depth.
Claim 11
Dependent Claim
27 words
The method of claim 1 wherein said molecular rearrangement of said at least one component extends primarily within said upper portion of said layer of polymeric material.
Claim 12
Dependent Claim
22 words
The method of claim 8 wherein said layer of polymeric resist material ranges from about 1.0 to about 3.0 micrometers in thickness.
Claim 13
Dependent Claim
33 words
The method of claim 11 wherein said upper sensitized portion of said layer of polymeric resist material or of said polymeric resist material ranges from about 0.1 to about 0.5 micrometers in depth.
Claim 14
Dependent Claim
27 words
The method of claim 12 wherein said molecular rearrangement of said at least one component extends primarily within said upper portion of said layer of polymeric material.
Claim 15
Dependent Claim
16 words
The method of claim 1 wherein said reactive organometallic reagent is comprised of a silicon-containing compound.
Claim 16
Dependent Claim
21 words
The method of claim 3 wherein said layer of polymeric resist material ranges from about 0.5 to about 20 micrometers thick.
Claim 17
Dependent Claim
25 words
The method of claim 15 wherein said upper portion of said layer of polymeric material ranges from about 0.1 to about 1.0 micrometer in depth.
Claim 18
Dependent Claim
8 words
Product produced by the method of claim 1.
Claim 19
Independent Claim
154 words
A method of converting the upper portion of a layer of polymeric resist to a dry etch resistant form, comprising: (a) applying a layer of polymeric material to said substrate, wherein said polymeric material is comprised of at least one component which undergoes molecular rearrangement on irradiation to produce labile and reactive hydrogens selected from the group consisting of (1) o-nitrobenzyl derivatives which rearrange on exposure to radiation to form alcohols, acids, and amines, (2) photo-fries reactive units, (3) diazoketones, and (4) mixtures thereof; (b) pattern-wise irradiating surface portions of said layer of polymeric material to induce molecular rearrangement of said component and the formation of and reactive hydrogens within at least the upper portion of said pattern-wise irradiated area; and (c) treating said reaction products of said irradiated layer with a reactive organometallic reagent to react and bond said organometallic reagent at said reactive sites within the upper portion of said irradiated layer.
Claim 20
Independent Claim
154 words
A method of converting the upper portion of a layer of polymeric resist to a dry etch resistant form, comprising: (a) applying a layer of polymeric material to said substrate, wherein said polymeric material is comprised of at least one component which undergoes molecular rearrangement on irradiation to produce labile and reactive hydrogens selected from the group consisting of (1) o-nitrobenzyl derivatives which rearrange on exposure to radiation to form alcohols, acids, and amines, (2) photo-fries reactive units, (3) diazoketones, and (4) mixtures thereof; (b) pattern-wise irradiating surface portions of said layer of polymeric material to induce molecular rearrangement of said component and the formation of and reactive hydrogens within at least the upper portion of said pattern-wise irradiated area; and (c) treating said reaction products of said irradiated layer with a reactive organometallic reagent to react and bond said organometallic reagent at said reactive sites within the upper portion of said irradiated layer.
Claim 21
Dependent Claim
25 words
The method of claim 18 wherein said irradiation source is selected from the group consisting of photon emission sources, electron beam, ion beam, and X-ray.
Claim 22
Dependent Claim
31 words
The method of claim 19 wherein said irradiation source is a low acceleration voltage electron beam and wherein said electron beam voltage ranges from about 0.5 Kev to about 10 Kev.
Claim 23
Dependent Claim
19 words
The method of claim 20, wherein said layer of polymeric material is about one to about three micrometers thick.
Claim 24
Dependent Claim
25 words
The method of claim 18 wherein said irradiated upper portion of said pattern-wise irradiated areas ranges from about 0.1 to about 0.5 micrometers in depth.
Claim 25
Dependent Claim
17 words
The method of claim 18 wherein said substrate comprises a polymeric material which is not radiation sensitive.
Claim 26
Dependent Claim
16 words
The method of claim 18 wherein said substrate comprises a polymeric material which is radiation sensitive.
Claim 27
Dependent Claim
12 words
The method of claim 18 wherein said substrate comprises an inorganic material.
Claim 28
Dependent Claim
8 words
Product produced by the method of claim 18.
Claim 29
Dependent Claim
71 words
The method of claim 1 wherein said conversion to a dry-etch resistant form is limited to the upper portion of said layer of polymeric resist material or said layer of sensitized polymeric resist material by controlling the process conditions during treatment with the organometallic reagent, so that penetration of said organometallic reagent is limited to said upper portion of said layer of polymeric material or said layer of polymeric resist material.
Claim 30
Dependent Claim
58 words
The method of claim 18 wherein said conversion of said upper portion of said layer of polymeric material or said layer of polymeric resist material by controlling the process conditions during treatment, so that penetration of said organometallic reagent is limited to said upper portion of said layer of polymeric material or said layer of polymeric resist material.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1992-03-06 | 1992-09-05 | 1993-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-03-06 | 1996-09-05 | 1997-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-03-06 | 2000-09-05 | 2001-03-07 | $7700.00 | Window Closed / Lapsed |