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US5302891A Expired / Lapsed US ⏱️ 0.0 years remaining

Discrete die burn-in for non-packaged die

Assignee: Micron Technology Inc
•
Filing: 1992-11-10
•
Granted: 1994-04-12
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Expires: 2012-11-10
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Abstract

Abstract A reusable burn-in/test fixture for discrete die consists of two halves. The first half of the test fixture contains cavity in which die is inserted. When the two halves are assembled, the fixture establishes electrical contact with the die and with a burn-in oven. The test fixture need not be opened until the burn-in and electrical test are completed. The fixture permits the die to be characterized prior to assembly.

Inventors

  • 👤 Alan G. Wood
  • 👤 Tim J. Corbett
  • 👤 Gary L. Chadwick
  • 👤 Chender Huang
  • 👤 Larry D. Kinsman

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 10:02
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2893; G01R1/00; G01R1/02; G01R1/04; G01R1/0408; G01R1/0433; G01R1/0441; G01R1/0466; G01R1/0483; H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10P; H10P72/00; H10P72/70; H10P72/74; H10P74/00; H10P74/23; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/65; H10W70/67; H10W70/68; H10W90/00; H10W90/701; H10W99/00; G01R3/00; G01R31/2855; G01R31/286; G01R31/2863; H05K2201/00; H05K2201/01; H05K2201/0104; H05K2201/0133; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2201/0388; H05K2201/0394; H05K2201/09; H05K2201/09209; H05K2201/09372; H05K2201/09481; H05K2201/095; H05K2201/09563; H05K2203/00; H05K2203/03; H05K2203/0307; H05K2203/07; H05K2203/0703; H05K2203/0723; H05K3/0058; H05K3/0067; H05K3/42; H05K3/423; H10W70/654; H10W70/655; H10W70/681; H10W90/20; H10W90/24; H10W90/721; H10W90/722

Claims Analysis

Total Claims: 46
Claim 1
Independent Claim 310 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates having a plurality of circuit traces thereon and dimensioned so as to fit within said die receiving cavity being received by the die receiving cavity prior to insertion of the die in a position juxtaposed to a face side of the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together, and means to retain the insulative substrate is received in the die receiving cavity prior to placement of the die into the die receiving cavity; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are aligned and the die and the insulative substrate are positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in an electrical communication with the plurality of contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations; i) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 2
Dependent Claim 310 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates having a plurality of circuit traces thereon and dimensioned so as to fit within said die receiving cavity being received by the die receiving cavity prior to insertion of the die in a position juxtaposed to a face side of the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together, and means to retain the insulative substrate is received in the die receiving cavity prior to placement of the die into the die receiving cavity; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are aligned and the die and the insulative substrate are positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in an electrical communication with the plurality of contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations; i) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 3
Dependent Claim 61 words
Discrete testing apparatus as described in claim 1, further comprising: the connector terminals being positioned on the second plate so that, when the first plate and the second plate are aligned by the alignment means and the die and the insulative substrate are positioned in the die-receiving cavity, the plurality of contacts are in alignment with contact locations on the die.
Claim 4
Dependent Claim 23 words
Discrete testing apparatus as described in claim 2, further comprising: said clamp consisting of a clasp which may either be latched into place.
Claim 5
Dependent Claim 47 words
Discrete testing apparatus as described in claim 1, further comprising: the die receiving cavity having a biased platform therein, the biased platform exerting a biasing force against the die, the biasing force being sufficiently uniform to cause the die to establish contact with the plurality of contacts.
Claim 6
Dependent Claim 34 words
Discrete testing apparatus as described in claim 1, further comprising: means to bias die received in the die receiving cavity with the plurality of contacts after the first and second plates have been mated.
Claim 7
Dependent Claim 46 words
Discrete testing apparatus as described in claim 5, further comprising: the external connector leads being secured by the die cavity plate and terminating on the die cavity plate as contact pads, the contact pads being in approximate planar alignment with the contact location on the die.
Claim 8
Dependent Claim 35 words
Discrete testing apparatus as described in claim 1, further comprising: the plurality of contacts including contact pads which are in alignment with the die receiving cavity after the first and second plates have been mated.
Claim 9
Dependent Claim 36 words
Discrete testing apparatus as described in claim 1, further comprising: the plurality of contacts including a contact pads which are in alignment with the die receiving cavity after the first and second plates have been mated.
Claim 10
Dependent Claim 21 words
Discrete testing apparatus as described in claim 1, further comprising: said clamp consisting of a clasp which is latched into place.
Claim 11
Dependent Claim 266 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates having a plurality of circuit traces thereon and dimensioned so as to fit within said die receiving cavity in a position juxtaposed to a face side of the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are in alignment, and the die is positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in electrical communication with the contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations; i) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 12
Dependent Claim 266 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates having a plurality of circuit traces thereon and dimensioned so as to fit within said die receiving cavity in a position juxtaposed to a face side of the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are in alignment, and the die is positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in electrical communication with the contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations; i) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 13
Dependent Claim 45 words
Discrete testing apparatus as described in claim 10, further comprising: said plurality of contacts on the plurality of conductors being mounted to an insulative substrate, the insulative substrate being supported by the first and second plates when the first and second plates are secured together.
Claim 14
Dependent Claim 32 words
Discrete testing apparatus as described in claim 10, further comprising: a spacer plate which fits within the die receiving cavity and the die, and which precisely positions the die for subsequent alignment.
Claim 15
Dependent Claim 28 words
Discrete testing apparatus as described in claim 12, further comprising: a slot in the die cavity plate, for facilitating lifting the die out of the die receiving cavity.
Claim 16
Dependent Claim 41 words
Discrete testing apparatus as described in claim 10, further comprising: the connector terminals in electrical communication with the plurality of contacts comprising a plurality of external connector leads attached to the die cavity plate, and extending from the burn in fixture.
Claim 17
Dependent Claim 24 words
Discrete testing apparatus as described in claim 14, further comprising: said connector terminals extending from the burn in fixture in standard semiconductor package configuration.
Claim 18
Dependent Claim 45 words
Discrete testing apparatus as described in claim 10, further comprising: contact between the contact locations on the die for said electrical communication with the contact terminals being established by TAB (tape automated bonding) tape which is not bonded with the die at the contact locations.
Claim 19
Dependent Claim 18 words
Discrete testing apparatus as described in claim 10, further comprising: the plurality of contacts being conductive polymer contacts.
Claim 20
Dependent Claim 48 words
Discrete testing apparatus as described in claim 10, further comprising: the plurality of contacts being positioned on the insulative substrate so that, when the die and the insulative substrate are positioned in the die receiving cavity, the plurality of contacts are between the die and the second plate.
Claim 21
Dependent Claim 21 words
Discrete testing apparatus as described in claim 18, further comprising: the plurality of contacts being located in the die cavity housing.
Claim 22
Dependent Claim 19 words
Discrete testing apparatus as described in claim 10, further comprising: the plurality of contacts being conductive soft metal contacts.
Claim 23
Dependent Claim 106 words
Discrete testing apparatus as described in claim 18, further comprising: a) the plurality of contacts being positioned on the insulative substrate so that, when the die and the insulative substrate are positioned in the die receiving cavity, the plurality of contacts are between the die and the second plate; b) one of said first and second plates being a cover plate, the cover plate supporting said plurality of contacts; c) the first plate including a resilient compressible elastomeric strip, the rigid elastomeric strip biasing the plurality of contacts against the die, thereby establishing an ohmic contact between the die contact locations and the plurality of contacts.
Claim 24
Dependent Claim 34 words
Discrete testing apparatus as described in claim 10, further comprising: a) the cover plate including a dielectric cover; and b) the plurality of contacts being contact pins which are mounted to the dielectric cover.
Claim 25
Dependent Claim 78 words
Discrete testing apparatus as described in claim 10, further comprising: a) contact between the contact locations on the die for said electrical communication with the contact terminals being established by TAB (tape automated bonding) tape which is not bonded with the die at the contact locations; and b) the TAB tape extending beyond the confines of a fixture formed by the first and second plates and terminating in an external connector, the external connector including said connector terminals.
Claim 26
Dependent Claim 34 words
Discrete testing apparatus as described in claim 10, further comprising: the plurality of contacts including a flexible rods which extend into the die receiving cavity after the first and second plates have been mated.
Claim 27
Dependent Claim 21 words
Discrete testing apparatus as described in claim 10, further comprising: said clamp consisting of a clasp which is latched into place.
Claim 28
Dependent Claim 335 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates with a plurality of circuit traces thereon, the plurality of circuit traces being dimensioned so as to fit within said die receiving cavity adjacent to the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are in alignment, and the die is positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in electrical communication with the contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations, contact between the contact locations on the die for said electrical communication with the connector terminals being established without bonding the contacts with the die at the contact locations; i) the second plate including a rigid cover plate and a resilient compressible elastomeric strip, said elastomeric strip biasing the insulative substrate against the die, thereby establishing an ohmic contact between the die contact locations and conductive traces on the insulative substrate; j) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 29
Dependent Claim 335 words
Discrete testing apparatus for testing a semiconductor device in die form, comprising: a) a first plate; b) a die-receiving cavity in the first plate; c) a second plate; d) means to secure the first and second plates together; e) an insulative substrate, separate from the first and second plates with a plurality of circuit traces thereon, the plurality of circuit traces being dimensioned so as to fit within said die receiving cavity adjacent to the die when the die is in the die receiving cavity, so that the insulative substrate is at least partially contained within the die receiving cavity when the first and second plates are secured together; f) a plurality of contacts on the plurality of circuit traces, the contacts being positioned so that, when the first plate and the second plate are in alignment, and the die is positioned in the die-receiving cavity, the contacts are in alignment with contact locations on the die; g) connector terminals in electrical communication with the contacts; and h) means to bias the die and the insulative substrate together when the first plate and the second plate are secured together, thereby causing the contacts to be maintained in electrical communication with said contact locations, contact between the contact locations on the die for said electrical communication with the connector terminals being established without bonding the contacts with the die at the contact locations; i) the second plate including a rigid cover plate and a resilient compressible elastomeric strip, said elastomeric strip biasing the insulative substrate against the die, thereby establishing an ohmic contact between the die contact locations and conductive traces on the insulative substrate; j) the means to secure including a clamp, the clamp extending across at least one of the first and second plates to secure the first and second plates together, wherein when the first and second plates are secured together with the die in the die receiving cavity, a plurality of said contact locations are in electrical communication with the connector terminals.
Claim 30
Dependent Claim 61 words
Discrete testing apparatus as described in claim 26, further comprising: the connector terminals being positioned on the second plate so that, when the first plate and the second plate are aligned by the alignment means and the die and the insulative substrate are positioned in the die-receiving cavity, the plurality of contacts are in alignment with contact locations on the die.
Claim 31
Dependent Claim 33 words
Discrete testing apparatus as described in claim 26, further comprising: the biasing force exerted by the biased platform being sufficiently uniform to cause the die to establish contact with the plurality of contacts.
Claim 32
Dependent Claim 35 words
Discrete testing apparatus as described in claim 26, further comprising: the plurality of contacts including contact pads which are in alignment with the die receiving cavity after the first and second plates have been mated.
Claim 33
Dependent Claim 32 words
Discrete testing apparatus as described in claim 26, further comprising: a spacer plate which fits within the die receiving cavity and the die, and which precisely positions the die for subsequent alignment.
Claim 34
Dependent Claim 28 words
Discrete testing apparatus as described in claim 30, further comprising: a slot in the die cavity plate, for facilitating lifting the die out of the die receiving cavity.
Claim 35
Dependent Claim 41 words
Discrete testing apparatus as described in claim 26, further comprising: the connector terminals in electrical communication with the plurality of contacts comprising a plurality of external connector leads attached to the die cavity plate, and extending from the burn in fixture.
Claim 36
Dependent Claim 25 words
Discrete testing apparatus as described in claim 32, further comprising: said connector terminals extending from the burn in fixture in a standard semiconductor package configuration.
Claim 37
Dependent Claim 45 words
Discrete testing apparatus as described in claim 26, further comprising: contact between the contact locations on the die for said electrical communication with the contact terminals being established by TAB (tape automated bonding) tape which is not bonded with the die at the contact locations.
Claim 38
Dependent Claim 52 words
Discrete testing apparatus as described in claim 34, further comprising: the second plate including a rigid cover plate and a resilient compressible elastomeric strip, the rigid elastomeric strip biasing the TAB tape against the die, thereby establishing an ohmic contact between the die contact locations and conductive traces on the TAB tape.
Claim 39
Dependent Claim 18 words
Discrete testing apparatus as described in claim 26, further comprising: the plurality of contacts being conductive polymer contacts.
Claim 40
Dependent Claim 48 words
Discrete testing apparatus as described in claim 26, further comprising: the plurality of contacts being positioned on the insulative substrate so that, when the die and the insulative substrate are positioned in the die receiving cavity, the plurality of contacts are between the die and the second plate.
Claim 41
Dependent Claim 21 words
Discrete testing apparatus as described in claim 37, further comprising: the plurality of contacts being located in the die cavity housing.
Claim 42
Dependent Claim 19 words
Discrete testing apparatus as described in claim 26, further comprising: the plurality of contacts being conductive soft metal contacts.
Claim 43
Dependent Claim 95 words
Discrete testing apparatus as described in claim 39, further comprising: the plurality of contacts being positioned on the insulative substrate so that, when the die and the insulative substrate are positioned in the die receiving cavity, the plurality of contacts are between the die and the second plate; b) the cover plate supports said plurality of contacts; and c) the first plate including a resilient compressible elastomeric strip, the rigid elastomeric strip biasing the plurality of contacts against the die, thereby establishing an ohmic contact between the die contact locations and the plurality of contacts.
Claim 44
Dependent Claim 34 words
Discrete testing apparatus as described in claim 26, further comprising: a) the cover plate including a dielectric cover; and b) the plurality of contacts being contact pins which are mounted to the dielectric cover.
Claim 45
Dependent Claim 78 words
Discrete testing apparatus as described in claim 26, further comprising: a) contact between the contact locations on the die for said electrical communication with the contact terminals being established by TAB (tape automated bonding) tape which is not bonded with the die at the contact locations; and b) the TAB tape extending beyond the confines of a fixture formed by the first and second plates and terminating in an external connector, the external connector including said connector terminals.
Claim 46
Dependent Claim 21 words
Discrete testing apparatus as described in claim 26, further comprising: said clamp consisting of a clasp which is latched into place.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1997-04-11 1997-10-11 1998-04-12 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2001-04-11 2001-10-11 2002-04-12 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2005-04-11 2005-10-11 2006-04-12 $7700.00 Window Closed / Lapsed

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