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US5238913A
Expired / Lapsed
US
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Superconducting microcircuitry by the microlithgraphic patterning of superconducting compounds and related materials
Assignee: University of California
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Filing: 1992-03-30
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Granted: 1993-08-24
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Expires: 2012-03-30
Abstract
Abstract Superconducting microcircuits including a thin layer of Ba 2 Cu 3 O 5+x (0<x<1) on a substrate. A thin layer of a dopant; for example, Y 2 O 3 for superconducting patterns of YBa 2 Cu 3 O 7-x , or Pr 2 O 3 for insulator patterns of PrBa 2 Cu 3 O 7-x . These layers are covered with a layer of photoresist, which is exposed to light through a mask having a pattern for a desired circuit. The photoresist is then developed to reveal a pattern of the thin dopant layer which will be etched away. The microcircuit is then etched and stripped to remove the unneeded portion of the thin dopant layer. Finally, the microcircuit is heated at a temperature and for a period of time sufficient to diffuse and react the dopant layer with the thin layer of Ba 2 Cu 3 O 5+x , forming a pattern of superconductor or insulator.
Inventors
- 👤 Nicholas V. Coppa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 20:12
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; Y; Y10; Y10S; Y10S505/00; Y10S505/725; Y10S505/728; Y10S505/742
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
148 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba 2 Cu 3 O 5+x ; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba 2 Cu 3 O 5+x to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba 2 Cu 3 O 5+x .
Claim 2
Independent Claim
148 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba 2 Cu 3 O 5+x ; depositing a photoresist onto said thin film of a dopant; shining light through a mask containing a pattern for a desired circuit configuration and onto said photoresist; developing said photoresist to remove portions of said photoresist shined by the light and to selectively expose said dopant film; etching said selectively exposed dopant film from said thin film of Ba 2 Cu 3 O 5+x to form a pattern of dopant; and heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba 2 Cu 3 O 5+x .
Claim 3
Dependent Claim
17 words
The method described in claim 1, wherein said thin film of dopant comprises a rare earth oxide.
Claim 4
Dependent Claim
18 words
The method described in claim 1, wherein said thin film of dopant comprises Y 2 O 3 .
Claim 5
Dependent Claim
17 words
The method described in claim 2, wherein said rare earth oxide comprises Pr 2 O 3 .
Claim 6
Dependent Claim
15 words
The method described in claim 1, wherein said substrate comprises a crystalline or polycrystalline material.
Claim 7
Dependent Claim
15 words
The method described in claim 5, wherein said crystalline or polycrystalline material comprises lanthanum aluminate.
Claim 8
Dependent Claim
15 words
The method described in claim 5, wherein said crystalline or polycrystalline material comprises magnesium oxide.
Claim 9
Independent Claim
108 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba 2 Cu 3 O 5+x ; placing a mechanical mask representing a desired circuit configuration onto said thin film of dopant; etching away undesired dopant which is not covered by said mechanical mask using a ion mill; heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba 2 Cu 3 O 5+x .
Claim 10
Independent Claim
108 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; depositing a thin film of a dopant onto said thin film of Ba 2 Cu 3 O 5+x ; placing a mechanical mask representing a desired circuit configuration onto said thin film of dopant; etching away undesired dopant which is not covered by said mechanical mask using a ion mill; heating said substrate at a temperature and for a period of time sufficient to diffuse and react said pattern of dopant with said thin film of Ba 2 Cu 3 O 5+x .
Claim 11
Dependent Claim
17 words
The method described in claim 8, wherein said thin film of dopant comprises a rare earth oxide.
Claim 12
Dependent Claim
18 words
The method described in claim 8, wherein said thin film of dopant comprises Y 2 O 3 .
Claim 13
Dependent Claim
17 words
The method described in claim 9, wherein said rare earth oxide comprises Pr 2 O 3 .
Claim 14
Dependent Claim
15 words
The method described in claim 8, wherein said substrate comprises a crystalline or polycrystalline material.
Claim 15
Dependent Claim
15 words
The method described in claim 12, wherein said crystalline or polycrystalline material comprises lanthanum aluminate.
Claim 16
Dependent Claim
15 words
The method described in claim 12, wherein said crystalline or polycrystalline material comprises magnesium oxide.
Claim 17
Independent Claim
100 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; placing a mechanical mask representing a desired circuit configuration onto said thin film of Ba 2 Cu 3 O 5+x doping said thin film of Ba 2 Cu 3 O 5+x with dopant ions by way of ion implantation; removing said mechanical mask; heating said substrate at a temperature and for a period of time sufficient to diffuse and react said dopant ions with said thin film of Ba 2 Cu 3 O 5+x .
Claim 18
Independent Claim
100 words
A method of producing superconducting microcircuits comprising the steps of: depositing a thin film of Ba 2 Cu 3 O 5+x (0<x<1) onto a substrate; placing a mechanical mask representing a desired circuit configuration onto said thin film of Ba 2 Cu 3 O 5+x doping said thin film of Ba 2 Cu 3 O 5+x with dopant ions by way of ion implantation; removing said mechanical mask; heating said substrate at a temperature and for a period of time sufficient to diffuse and react said dopant ions with said thin film of Ba 2 Cu 3 O 5+x .
Claim 19
Dependent Claim
17 words
The method described in claim 15 wherein said dopant ions comprise ions of a rare earth oxide.
Claim 20
Dependent Claim
18 words
The method described in claim 15, wherein said thin film of dopant comprises Y 2 O 3 .
Claim 21
Dependent Claim
17 words
The method described in claim 16, wherein said rare earth oxide comprises Pr 2 O 3 .
Claim 22
Dependent Claim
15 words
The method described in claim 15, wherein said substrate comprises a crystalline or polycrystalline material.
Claim 23
Dependent Claim
15 words
The method described in claim 19, wherein said crystalline or polycrystalline material comprises lanthanum aluminate.
Claim 24
Dependent Claim
15 words
The method described in claim 19, wherein said crystalline or polycrystalline material comprises magnesium oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-08-23 | 1997-02-22 | 1997-08-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-08-23 | 2001-02-22 | 2001-08-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-08-23 | 2005-02-22 | 2005-08-24 | $7700.00 | Window Closed / Lapsed |