US5199054A
Expired / Lapsed
US
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Method and apparatus for high resolution inspection of electronic items
Assignee: Agilent Technologies Inc
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Filing: 1990-08-30
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Granted: 1993-03-30
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Expires: 2010-08-30
Abstract
Abstract A high resolution laminography system for the inspection of integrated circuits wherein a beam of highly focused electrons is traced in a circular pattern on a flat target within a vacuum chamber. The target converts the electron beam into X-rays, so that a source of X-rays is produced which rotates in synchronization with a rotating detector assembly. An object is placed within the vacuum chamber, between the X-ray source and the detector so that an X-ray cross sectional image of a cutting plane of the object is produced. A computer and feedback system controls image acquisition and an automated positioning system. The computer system can also operate under program control to automatically analyze data, measure characteristics of the object under inspection, and make decisions regarding the acceptability of the object's quality. The invention also employs a channeltron imager to directly image the target so that the condition of the target may be monitored, and electron drift within the system can be compensated for.
Inventors
- 👤 John A. Adams
- 👤 Bruce D. Baker
- 👤 Kerry L. Brown
- 👤 Robert L. Corey
- 👤 Brian L. Ganz
- 👤 David C. Reynolds
- 👤 Edward W. Ross
- 👤 Gerald S. Russell
- 👤 Christopher S. Sexton
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 05:30
CPC Classifications
H; H05; H05G; H05G1/00; H05G1/08; H05G1/26; G; G01; G01N; G01N23/00; G01N23/02; G01N23/04; G01N23/043; G01N23/044; G01R; G01R31/00; G01R31/28; G01R31/302
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
161 words
A high resolution laminography system comprising: a source of X-rays wherein said source of X-rays further comprises: a source of electrons which generates an electron beam; a deflector for steering said electron beam; a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising an imagable feature; an SEM detector for producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam; an image analysis system for analyzing characteristics of said SEM micrograph image of said target imagable feature, and providing an output signal in response to said analysis; and a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.
Claim 2
Dependent Claim
161 words
A high resolution laminography system comprising: a source of X-rays wherein said source of X-rays further comprises: a source of electrons which generates an electron beam; a deflector for steering said electron beam; a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising an imagable feature; an SEM detector for producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam; an image analysis system for analyzing characteristics of said SEM micrograph image of said target imagable feature, and providing an output signal in response to said analysis; and a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.
Claim 3
Dependent Claim
15 words
A system as defined in claim 1, wherein said feedback system comprises a digital Look-Up-Table.
Claim 4
Dependent Claim
39 words
A system as defined in claim 1, wherein said imagable feature on said target comprises four points, wherein two of said points lie on a line which is perpendicular to a line defined by two others of said points.
Claim 5
Dependent Claim
16 words
A system as defined in claim 1, wherein said target comprises a plurality of concentric rings.
Claim 6
Dependent Claim
15 words
A system as defined in claim 1, wherein said target has a cylindrical interior surface.
Claim 7
Dependent Claim
15 words
A system as defined in claim 1, wherein said SEM detector comprises a channeltron imager.
Claim 8
Dependent Claim
19 words
A system as defined in claim 1, further comprising an electron collector for preventing electrons from striking said object.
Claim 9
Dependent Claim
18 words
A system as defined in claim 1, further including a piezoelectric translation stage for vertically positioning said object.
Claim 10
Dependent Claim
21 words
A system as defined in claim 1, wherein said detector comprises a fluorescent screen, an optical derotation device and a camera.
Claim 11
Dependent Claim
14 words
A system as defined in claim 9, wherein aid fluorescent screen comprises Gadolinium Oxysulfide.
Claim 12
Independent Claim
156 words
A method of producing high resolution laminographs, comprising the steps of: producing a source of X-rays, wherein said step of producing X-rays further comprises the steps of: generating an electron beam; steering said electron beam with a deflector; striking a target with said electron beam, wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target having an imagable feature; producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam; analyzing characteristics of said SEM micrograph image of said feature, and providing an output signal in response to said analysis; and providing a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and producing a cross sectional image of a cutting plane of an object illuminated by said X-rays using a laminographic detector.
Claim 13
Independent Claim
156 words
A method of producing high resolution laminographs, comprising the steps of: producing a source of X-rays, wherein said step of producing X-rays further comprises the steps of: generating an electron beam; steering said electron beam with a deflector; striking a target with said electron beam, wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target having an imagable feature; producing an SEM micrograph of said target imagable feature in response to illumination of said feature by said electron beam; analyzing characteristics of said SEM micrograph image of said feature, and providing an output signal in response to said analysis; and providing a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and producing a cross sectional image of a cutting plane of an object illuminated by said X-rays using a laminographic detector.
Claim 14
Dependent Claim
66 words
A method as defined in claim 11, wherein said analyzing step comprises the steps of: determining the location of said feature image within said micrograph; calculating the distance between the determined location of said feature image and the center of said micrograph; and producing a voltage signal as a function of said calculated distance appropriate to cause said feature image to be centered within said micrograph.
Claim 15
Dependent Claim
148 words
A high resolution laminography system comprising: a source of X-rays wherein said source of X-rays further comprises: a source of electrons which generates an electron beam; a deflector for steering said electron beam; a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising a target imagable feature; a first detector for producing an image of said target imagable feature; an image analysis system for analyzing characteristics of said image of said target imagable feature, and providing an output signal in response to said analysis; and a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.
Claim 16
Dependent Claim
148 words
A high resolution laminography system comprising: a source of X-rays wherein said source of X-rays further comprises: a source of electrons which generates an electron beam; a deflector for steering said electron beam; a target wherein X-rays are emitted from said target when said electron beam impinges upon said target, said target further comprising a target imagable feature; a first detector for producing an image of said target imagable feature; an image analysis system for analyzing characteristics of said image of said target imagable feature, and providing an output signal in response to said analysis; and a feedback system which receives said output signal from said image analysis system, processes said output signal and provides a control signal to said electron beam deflector; and a laminographic detector for producing a cross sectional image of a cutting plane of an object illuminated by said X-rays emitted by said target.
Claim 17
Dependent Claim
25 words
A system as defined in claim 13, wherein said first detector further comprises an SEM detector and produces a micrograph of said target imagable feature.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-03-29 | 1996-09-28 | 1997-03-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-03-29 | 2000-09-28 | 2001-03-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-03-29 | 2004-09-28 | 2005-03-30 | $7700.00 | Window Closed / Lapsed |