US4957591A
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Method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof
Assignee: National Institute for Materials Science
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Filing: 1988-12-09
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Granted: 1990-09-18
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Expires: 2008-12-09
Abstract
Abstract A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a chemical vapor deposition method or a plasma-assisted vapor deposition method, or a film of such diamond, to plasma treatment in a gas stream containing oxygen, carbon dioxide, steam, hydrogen, a halogenated hydrocarbon or a halogenated carbon, or to thermal oxidation treatment in a gas stream containing oxygen, carbon dioxide or steam, for etching.
Inventors
- 👤 Yoichiro Sato
- 👤 Mutsukazu Kamo
- 👤 Chiemi Hata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 07:48
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/005; C01; C01B; C01B32/00; C01B32/25; C01B32/26; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/271; C23C16/272; C23C16/274; C23C16/279; C23C16/56; C30B25/02; C30B25/10; C30B25/105; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
46 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a chemical vapor deposition method to plasma treatment in a gas stream containing oxygen, carbon dioxide, steam, hydrogen, a halogenated hydrocarbon or a halogenated carbon, for etching.
Claim 2
Independent Claim
46 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a chemical vapor deposition method to plasma treatment in a gas stream containing oxygen, carbon dioxide, steam, hydrogen, a halogenated hydrocarbon or a halogenated carbon, for etching.
Claim 3
Independent Claim
46 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a plasma-assisted vapor deposition method to plasma treatment in a gas stream containing oxygen, carbon dioxide, steam, hydrogen, a halogenated hydrocarbon or a halogenated carbon, for etching.
Claim 4
Independent Claim
46 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a plasma-assisted vapor deposition method to plasma treatment in a gas stream containing oxygen, carbon dioxide, steam, hydrogen, a halogenated hydrocarbon or a halogenated carbon, for etching.
Claim 5
Independent Claim
40 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a plasma-assisted vapor deposition method to thermal oxidation treatment in a gas stream containing oxygen, carbon dioxide or steam, for etching.
Claim 6
Independent Claim
40 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a plasma-assisted vapor deposition method to thermal oxidation treatment in a gas stream containing oxygen, carbon dioxide or steam, for etching.
Claim 7
Independent Claim
40 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a chemical vapor deposition method to thermal oxidation treatment in a gas stream containing oxygen, carbon dioxide or steam, for etching.
Claim 8
Independent Claim
40 words
A method for preparing needle-like, fibrous or porous diamond, or an aggregate thereof, which comprises subjecting diamond synthesized by a chemical vapor deposition method to thermal oxidation treatment in a gas stream containing oxygen, carbon dioxide or steam, for etching.
Claim 9
Dependent Claim
23 words
The method according to claim 1, wherein the synthesized diamond subjected to etching is in the form of a film of such diamond.
Claim 10
Dependent Claim
23 words
The method according to claim 2, wherein the synthesized diamond subjected to etching is in the form of a film of such diamond.
Claim 11
Dependent Claim
23 words
The method according to claim 3, wherein the synthesized diamond subjected to etching is in the form of a film of such diamond.
Claim 12
Dependent Claim
23 words
The method according to claim 4, wherein the synthesized diamond subjected to etching is in the form of a film of such diamond.
Claim 13
Independent Claim
41 words
The method according to any one of claims 1, 2, 5 or 6, wherein the plasma treatment for etching is conducted under a pressure of from 10 -2 to 600 Torr at a temperature of from room temperature to 1,200° C.
Claim 14
Independent Claim
39 words
The method according to any one of claims 1, 2, 5 or 6, wherein the plasma treatment for etching is conducted under a pressure of from 1 to 200 Torr at a temperature of from 400 to 1,000° C.
Claim 15
Independent Claim
40 words
The method according to any one of claims 3, 4, 7 or 8, wherein the thermal treatment for etching is conducted under a pressure of from 10 -2 to 1,500 Torr at a temperature of from 400 to 1,200° C.
Claim 16
Independent Claim
39 words
The method according to any one of claims 3, 4, 7 or 8, wherein the thermal treatment for etching is conducted under a pressure of from 1 to 760 Torr at a temperature of from 500 to 1,000° C.
References Cited (Backward Citations)
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| 3.5 Years (Year 4) | 1993-09-17 | 1994-03-19 | 1994-09-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-09-17 | 1998-03-19 | 1998-09-18 | $3760.00 | Window Closed / Lapsed |
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