US4948629A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of diamond films
Assignee: International Business Machines Corp
•
Filing: 1989-02-10
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Granted: 1990-08-14
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Expires: 2009-02-10
Abstract
Abstract Diamond films are deposited at substrates below temperatures of 400° C. by chemical vapor deposition using a high powered pulsed laser and a vapor which is an aliphatic carboxylic acid or an aromatic carboxylic anhydride.
Inventors
- 👤 Nigel P. Hacker
- 👤 George W. Tyndall, III
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:54
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; C23C16/27; C23C16/277; C30; C30B; C30B25/00; C30B25/02; C30B29/00; C30B29/02; C30B29/04
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
78 words
A process for depositing a diamond film on a substrate said process comprising the steps of: (a) confining in an enclosed space which includes a substrate at a temperature below 400° C., the vapor of a compound which is aliphatic carboxylic acid or an aromatic carboxylic anhydride; and (b) irradiating said vapor with a high powered, pulsed laser which strikes the substrate thereby depositing a diamond film on the substrate at the places struck by the laser radiation.
Claim 2
Dependent Claim
78 words
A process for depositing a diamond film on a substrate said process comprising the steps of: (a) confining in an enclosed space which includes a substrate at a temperature below 400° C., the vapor of a compound which is aliphatic carboxylic acid or an aromatic carboxylic anhydride; and (b) irradiating said vapor with a high powered, pulsed laser which strikes the substrate thereby depositing a diamond film on the substrate at the places struck by the laser radiation.
Claim 3
Dependent Claim
13 words
A process as claimed in claim 1 wherein a carrier gas is employed.
Claim 4
Dependent Claim
16 words
A process as claimed in claim 2 wherein the carrier gas is hydrogen, oxygen or argon.
Claim 5
Dependent Claim
15 words
A process as claimed in claim 1 wherein the substrate temperature is below 150° C.
Claim 6
Dependent Claim
15 words
A process as claimed in claim 1 wherein the vapor is that of malonic acid.
Claim 7
Dependent Claim
15 words
A process as claimed in claim 1 wherein the vapor is that of acetic acid.
Claim 8
Dependent Claim
15 words
A process as claimed in claim 1 wherein the vapor is that of pyromellitic dianhydride.
Claim 9
Dependent Claim
26 words
A process as claimed in claim 1 wherein a second laser at longer wavelength (>400 nm) is used to reduce sp 2 contamination in deposited film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-08-13 | 1994-02-12 | 1994-08-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-08-13 | 1998-02-12 | 1998-08-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-08-13 | 2002-02-12 | 2002-08-14 | $7700.00 | Window Closed / Lapsed |