US4490229A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Deposition of diamondlike carbon films
Assignee: National Aeronautics and Space Administration
•
Filing: 1984-07-09
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Granted: 1984-12-25
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Expires: 2004-07-09
Abstract
Abstract A diamondlike carbon film is deposited in the surface of a substrate by exposing the surface to an argon ion beam containing a hydrocarbon. The current density in the ion beam is low during initial deposition of the film. Subsequent to this initial low current condition, the ion beam is increased to full power. At the same time a second argon ion beam is directed toward the surface of the substrate. The second ion beam has an energy level much greater than that of the ion beam containing the hydrocarbon. This addition of energy to the system increases mobility of the condensing atoms and serves to remove lesser bound atoms.
Inventors
- 👤 Michael J. Mirtich
- 👤 James S. Sovey
- 👤 Bruce A. Banks
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:05
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/26; Y; Y10; Y10S; Y10S423/00; Y10S423/09; Y10S423/10
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
114 words
A method of making diamondlike carbon films on a substrate comprising the steps of exposing said substrate to a first ion beam having a first current density and a first energy level, introducing a hydrocarbon into said first ion beam whereby an initial portion of a diamondlike carbon film is deposited on said substrate, increasing the current density of said first ion beam to a second current density whereby a remaining portion of a diamondlike carbon film is deposited on said substrate, and exposing said substrate to a second ion beam having a second energy level greater than said first energy level during the deposition of said remaining portion of said diamondlike carbon film.
Claim 2
Independent Claim
114 words
A method of making diamondlike carbon films on a substrate comprising the steps of exposing said substrate to a first ion beam having a first current density and a first energy level, introducing a hydrocarbon into said first ion beam whereby an initial portion of a diamondlike carbon film is deposited on said substrate, increasing the current density of said first ion beam to a second current density whereby a remaining portion of a diamondlike carbon film is deposited on said substrate, and exposing said substrate to a second ion beam having a second energy level greater than said first energy level during the deposition of said remaining portion of said diamondlike carbon film.
Claim 3
Dependent Claim
30 words
A method of making a diamondlike carbon film as claimed in claim 1 wherein the substrate is mounted in a vacuum environment having a pressure of about 3×10 -5 torr.
Claim 4
Dependent Claim
21 words
A method of making a diamondlike carbon film as claimed in claim 1 wherein the first ion beam contains argon ions.
Claim 5
Dependent Claim
37 words
A method of making a diamondlike carbon film as claimed in claim 1 wherein the first current density of the first ion beam is less than one half the second current density of the first ion beam.
Claim 6
Dependent Claim
33 words
A method of making a diamondlike carbon film as claimed in claim 4 wherein the first current density is maintained for a period of time between about three minutes and about thirty minutes.
Claim 7
Dependent Claim
32 words
A method of making a diamondlike carbon film as claimed in claim 1 wherein the first energy level of the first ion beam is between about 80 eV and about 150 eV.
Claim 8
Dependent Claim
22 words
A method of making a diamondlike carbon film as claimed in claim 6 wherein the first energy level is about 100 eV.
Claim 9
Dependent Claim
32 words
A method of making a diamondlike carbon film as claimed in claim 6 wherein the second energy level of said second ion beam is between about 200 eV and about 500 eV.
Claim 10
Dependent Claim
31 words
A method of making a diamondlike carbon film as claimed in claim 1 wherein the current density of the second ion beam at the substrate is about 25 microamoperes/cm 2 .
Claim 11
Independent Claim
55 words
A method of depositing a diamondlike carbon film on a substrate surface comprising the steps of mounting the substrate in a vacuum environment, directing a first ion beam containing a hydrocarbon toward said surface, and directing a second ion beam having an energy level greater than that of said first ion beam toward said surface.
Claim 12
Independent Claim
55 words
A method of depositing a diamondlike carbon film on a substrate surface comprising the steps of mounting the substrate in a vacuum environment, directing a first ion beam containing a hydrocarbon toward said surface, and directing a second ion beam having an energy level greater than that of said first ion beam toward said surface.
Claim 13
Dependent Claim
30 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein the substrate is mounted in a vacuum environment having a pressure of about 3×10 -5 torr.
Claim 14
Dependent Claim
23 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein said first and second ion beams contain argon ions.
Claim 15
Dependent Claim
47 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein the first ion beam has an energy level between about 80 eV and about 150 eV and the second ion beam has an energy level between about 200 eV and about 500 eV.
Claim 16
Dependent Claim
21 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein the substrate is biased during film deposition.
Claim 17
Dependent Claim
27 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein hydrogen gas is added to said film during deposition thereby increasing the transparency.
Claim 18
Dependent Claim
20 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein the substrate is rotated during deposition.
Claim 19
Dependent Claim
20 words
A method of depositing a diamondlike carbon film as claimed in claim 10 wherein the film is annealed during deposition.
Claim 20
Dependent Claim
19 words
A method of depositing a diamondlike carbon film as claimed in claim 17 wherein the film is laser annealed.
Claim 21
Dependent Claim
17 words
A substrate having a diamondlike carbon film deposited thereon in accordance with the method of claim 1.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-12-25 | 1988-06-25 | 1988-12-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-12-25 | 1992-06-25 | 1992-12-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-12-25 | 1996-06-25 | 1996-12-25 | $7700.00 | Window Closed / Lapsed |