US4925259A
Expired / Lapsed
US
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Multilayer optical dielectric coating
Assignee: United States Department of Energy
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Filing: 1988-10-20
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Granted: 1990-05-15
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Expires: 2008-10-20
Abstract
Abstract A highly damage resistant, multilayer, optical reflective coating includes alternating layers of doped and undoped dielectric material. The doping levels are low enough that there are no distinct interfaces between the doped and undoped layers so that the coating has properties nearly identical to the undoped material. The coating is fabricated at high temperature with plasma-assisted chemical vapor deposition techniques to eliminate defects, reduce energy-absorption sites, and maintain proper chemical stoichiometry. A number of differently-doped layer pairs, each layer having a thickness equal to one-quarter of a predetermined wavelength in the material are combined to form a narrowband reflective coating for a predetermined wavelength. Broadband reflectors are made by using a number of narrowband reflectors, each covering a portion of the broadband.
Inventors
- 👤 John L. Emmett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:09
CPC Classifications
G; G02; G02B; G02B5/00; G02B5/20; G02B5/28; G02B5/289; G02B5/08; G02B5/0816; G02B5/0825; G02B5/0833; G02B5/0883; G02B5/285
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
90 words
An optical interference coating resistant to damage by intense optical radiation and comprising a number of interference layers of a given parent dielectric material, wherein adjacent layers in the coating have slightly different indices of refraction produced by doping at least some of the layers with one or more dopants wherein said one or more dopants are used in small concentrations so that the coating layers substantially retain the same physical and chemical properties of the parent, undoped dielectric material and the coating layers are thereby thermomechanically and chemically compatible.
Claim 2
Dependent Claim
90 words
An optical interference coating resistant to damage by intense optical radiation and comprising a number of interference layers of a given parent dielectric material, wherein adjacent layers in the coating have slightly different indices of refraction produced by doping at least some of the layers with one or more dopants wherein said one or more dopants are used in small concentrations so that the coating layers substantially retain the same physical and chemical properties of the parent, undoped dielectric material and the coating layers are thereby thermomechanically and chemically compatible.
Claim 3
Dependent Claim
59 words
The optical coating of claim 1 wherein a first layer has an index of refraction n 1 and a second, adjacent layer has an index of refraction n 2 and wherein the difference between indices of refraction that is produced by using one or more dopants is between 0.1 to 15% of the value of the parent dielectric material.
Claim 4
Dependent Claim
16 words
The optical coating of claim 2 wherein the number of doped layers is greater than 100.
Claim 5
Dependent Claim
60 words
The optical coating of claim 1 wherein said coating is formed in a controlled atmosphere at a temperature sufficiently high enough to ensure that the coating and any foreign particulate contained in said coating are oxidized in order to reduce or prevent bulk and localized energy absorption in said coating when said coating is subject to high energy flux densities.
Claim 6
Dependent Claim
29 words
The optical coating of claim 4 wherein said coating has an extremely low optical absorption loss, equal to or less than a value 0.0002% of the incident light energy.
Claim 7
Dependent Claim
33 words
The coating of claim 4 wherein said oxidizing atmosphere is selected from the group of gases O 2 , H 2 O, Cl 2 , F 2 , or combinations of these gases.
Claim 8
Dependent Claim
13 words
The coating of claim 6 wherein said oxidizing atmosphere is O 2 .
Claim 9
Dependent Claim
29 words
The optical coating of claim 1 wherein each of said layers is deposited at full density in an amorphous state to reduce voids or microcrystalline defects in said coating.
Claim 10
Dependent Claim
18 words
The optical coating of claim 1 wherein said parent dielectric, undoped material is fused silica, SiO 2 .
Claim 11
Dependent Claim
59 words
The optical coating of claim 1 wherein the material is doped with a doping material selected from the group of TiO 2 , GeO 2 , P 2 O 5 , F, B 2 O 3 , N, Ta 2 O 5 , Al 2 O 3 , Cl, Ce 2 O 3 or Sb 2 O 3 .
Claim 12
Dependent Claim
19 words
The optical coating of claim 1 wherein the material is doped with a combination of GeO 2 and F.
Claim 13
Dependent Claim
18 words
The optical coating of claim 1 wherein said thin layers are formed by a chemical vapor deposition process.
Claim 14
Dependent Claim
14 words
The optical coating of claim 12 wherein said chemical vapor deposition process is plasma-assisted.
Claim 15
Dependent Claim
25 words
The optical coating of claim 13 wherein said plasma assisted chemical vapor deposition process is a high temperature process with a temperature above 1000° C.
Claim 16
Dependent Claim
23 words
The optical coating of claim 12 wherein said chemical vapor deposition process is a high temperature process with a temperature above 1300° C.
Claim 17
Dependent Claim
37 words
The optical coating claim 1 comprising one or more additional layers of undoped material of arbitrary thickness formed adjacent said alternating doped and undoped layers to provide a protective overcoating of undoped material for said optical coating.
Claim 18
Dependent Claim
37 words
The optical coating of claim 1 comprising additional layers of material formed adjacent said alternately doped and undoped layers, said additional layers formed sufficiently thick to provide a support substrate for said alternately doped and undoped layers.
Claim 19
Dependent Claim
65 words
A reflective optical coating highly resistant to damage by intense optical radiation and comprising a first plurality of alternating layers having different indices of refraction formed by doping at least some of said layers with one or more dopants, wherein each of said layers has a thickness of one-fourth wavelength for a first wavelength, which coating forms a first narrowband reflector for said first wavelength.
Claim 20
Dependent Claim
65 words
A reflective optical coating highly resistant to damage by intense optical radiation and comprising a first plurality of alternating layers having different indices of refraction formed by doping at least some of said layers with one or more dopants, wherein each of said layers has a thickness of one-fourth wavelength for a first wavelength, which coating forms a first narrowband reflector for said first wavelength.
Claim 21
Dependent Claim
82 words
The optical coating of claim 18 including a second plurality of alternating doped and undoped layers formed adjacent to said first plurality of layers, each of said second plurality of layers having a thickness of one quarter-wave wavelength for a second wavelength, said second plurality of layers forming a second narrow-band reflector, the combination of said first and said second pluralities of layers forming a reflector having a bandwidth broader than the bandwidth of said first reflector or of said second reflector.
Claim 22
Dependent Claim
55 words
The optical reflective coating of claim 19 comprised of a composite stack of multilayer, narrowband reflectors applied to a fused silica envelope surrounding an intense broadband light emitting hot plasma produced by gas discharge and such coating designed to reflect wavelengths back into the plasma and transmit desired wavelengths out through the fused silica envelope.
Claim 23
Dependent Claim
19 words
The optical reflective coating of claim 20 deposited on the fused silica envelope of a broadband flashlamp light source.
Claim 24
Dependent Claim
28 words
The optical reflective coating of claim 20 deposited on the fused silica envelope of a flashlamp broadband light source used to pump a solid state laser gain medium.
Claim 25
Dependent Claim
65 words
The optical coating of claim 22 deposited on the fused silica envelope of a flashlamp, broadband light source used to pump a Neodymium-doped solid state laser gain medium and such coating designed to reflect certain predetermined wavelengths back into the plasma to be reabsorbed and re-emitted to thereby improve the conversion efficiency of electrical energy to optical energy at the desired wavelength of said flashlamp.
Claim 26
Dependent Claim
20 words
The improvement of claim 23 wherein said reflective coating reflects wavelengths in the infrared region between 950 and 1200 nm.
Claim 27
Dependent Claim
20 words
The improvement of claim 23 wherein said reflective coating reflects wavelengths in the ultraviolet region between 250 and 400 nm.
Claim 28
Dependent Claim
39 words
The improvement of claim 23 wherein said reflective coating does not reflect wavelengths in the range of 400 to 940 nm to permit transmission of optical energy matched to the pump bands of said Neodymium-doped, solid-state laser gain medium.
Claim 29
Dependent Claim
61 words
An optical coating highly resistant to damage by intense optical radiation and formed of very small stepwise incremental deposits of a dielectric material, each of said incremental deposits being doped with one or more doping materials to slightly alter the index of refraction of adjacent incremental deposits to form a predetermined stepwise profile for the index of refraction of said coating.
Claim 30
Dependent Claim
61 words
An optical coating highly resistant to damage by intense optical radiation and formed of very small stepwise incremental deposits of a dielectric material, each of said incremental deposits being doped with one or more doping materials to slightly alter the index of refraction of adjacent incremental deposits to form a predetermined stepwise profile for the index of refraction of said coating.
Claim 31
Dependent Claim
21 words
The coating of claim 27 wherein the stepwise incremental deposits are doped to provide an index of refraction approximating a sinewave.
Claim 32
Dependent Claim
16 words
The coating of claim 27 wherein said stepwise, incremental deposits have a thickness of 5-10 Angstroms.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-05-14 | 1993-11-13 | 1994-05-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-05-14 | 1997-11-13 | 1998-05-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-05-14 | 2001-11-13 | 2002-05-15 | $7700.00 | Window Closed / Lapsed |