Patent US4864824A successfully refreshed from Google Patents.
US4864824A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film shape memory alloy and method for producing
Assignee: Nokia Bell Labs
•
Filing: 1988-10-31
•
Granted: 1989-09-12
•
Expires: 2008-10-31
Abstract
Abstract An actuator including a device made of thin film shape memory material mounted to a substrate. The thin film device is deformed from its original shape. Thereafter, the device is heated to restore the device to its original shape. Motion of the device occurs in the deforming and restoring steps, which is used to produce some form of work result.
Inventors
- 👤 Kaigham J. Gabriel
- 👤 Mehran Mehregany
- 👤 James A. Walker
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 11:13
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/24; G02B6/26; G02B6/35; G02B6/3564; G02B6/3568; G02B6/3576; F; F03; F03G; F03G7/00; F03G7/06; F03G7/061; F03G7/0614; F03G7/06145; F03G7/0616; F03G7/064; G02B6/3502; G02B6/3508; G02B6/354; G02B6/3544; G02B6/3548; G02B6/3552; G02B6/358; H; H01; H01H; H01H1/00; H01H1/0036; H01H61/00; H01H2061/006; H01H61/01; H01H61/0107; H01H2061/0122
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
86 words
An actuator comprising a substrate, a first thin film device deposited onto the substrate, the device being made of a shape memory material having the property of restoration to an original shape when heated above a first temperature after being deformed while below a second temperature, the device being fixedly connected to the substrate at at least one location, means for deforming the thin film device while it is below the second temperature, and means for heating the device to a temperature above the first temperature.
Claim 2
Dependent Claim
86 words
An actuator comprising a substrate, a first thin film device deposited onto the substrate, the device being made of a shape memory material having the property of restoration to an original shape when heated above a first temperature after being deformed while below a second temperature, the device being fixedly connected to the substrate at at least one location, means for deforming the thin film device while it is below the second temperature, and means for heating the device to a temperature above the first temperature.
Claim 3
Dependent Claim
17 words
The actuator of claim 1 wherein the thin film device is made of a shape memory alloy.
Claim 4
Dependent Claim
11 words
The actuator of claim 2 wherein the device is a spring.
Claim 5
Dependent Claim
16 words
The actuator of claim 2 wherein the shape memory alloy comprises a titanium and nickel alloy.
Claim 6
Dependent Claim
53 words
The actuator of claim 1 wherein the means for deforming further comprises a second thin film device made of a shape memory material fixedly connected to the substrate at at least a second location, the first and the second device being fixedly connected to each other either directly or indirectly through intervening members.
Claim 7
Dependent Claim
16 words
The actuator of claim 5 wherein the second device is made of a shape memory alloy.
Claim 8
Dependent Claim
12 words
The actuator of claim 6 wherein the second device comprises a spring.
Claim 9
Dependent Claim
16 words
The actuator of claim 5 wherein the first and the second device are of different dimensions.
Claim 10
Dependent Claim
13 words
The actuator of claim 1 or claim 5 wherein the substrate comprises silicon.
Claim 11
Dependent Claim
27 words
The actuator of claim 1 or claim 5 in which the device and the means for deforming are connected in cascade either directly or through intervening members.
Claim 12
Dependent Claim
26 words
The actuator of claim 5 wherein the means for heating the device further comprises means for selectively supplying electrical current to the first and second devices.
Claim 13
Dependent Claim
18 words
The actuator of claim 2 or 11 further comprising means for selectively supplying current to the second device.
Claim 14
Dependent Claim
18 words
The actuator of claim 1 further comprising a member attached to the device for performing a work function.
Claim 15
Dependent Claim
11 words
The actuator of claim 13 wherein the member is a lever.
Claim 16
Dependent Claim
12 words
The actuator of claim 13 wherein the member is an optical fiber.
Claim 17
Dependent Claim
37 words
The actuator of claim 1 wherein the means for deforming further comprises a film of elastic material connected to the substrate at one end thereof and fixedly connected to the thin film device at an opposite end.
Claim 18
Dependent Claim
11 words
The actuator of claim 16 wherein the elastic material is polyimide.
Claim 19
Dependent Claim
43 words
The actuator of claim 1 wherein the substrate comprises a vessel having a cavity with at least one opening, the means for deforming comprises a fluid under pressure inside the cavity, wherein the thin film seals at least one opening to the cavity.
Claim 20
Dependent Claim
100 words
A process of manufacturing a thin film actuating device comprising the steps of (a) depositing onto a substrate a sacrificial layer of material, (b) depositing onto exposed sections of the substrate and onto the sacrificial layer a film of a shape memory material having the property of restoration to an original shape when heated above a first temperature after being deformed while below a second temperature, (c) selectively removing said film by photolithographic methods to make a deformable device, said device extending past the sacrificial layer and thereby contacting the substrate at some location, and (d) removing the sacrificial layer.
Claim 21
Dependent Claim
100 words
A process of manufacturing a thin film actuating device comprising the steps of (a) depositing onto a substrate a sacrificial layer of material, (b) depositing onto exposed sections of the substrate and onto the sacrificial layer a film of a shape memory material having the property of restoration to an original shape when heated above a first temperature after being deformed while below a second temperature, (c) selectively removing said film by photolithographic methods to make a deformable device, said device extending past the sacrificial layer and thereby contacting the substrate at some location, and (d) removing the sacrificial layer.
Claim 22
Dependent Claim
29 words
The process of claim 19 wherein step (c) further comprises making a second deformable device connected to the first-mentioned device and to at least another location on the substrate.
References Cited (Backward Citations)
US3203166A
Cited
US4700541A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-09-11 | 1993-03-13 | 1993-09-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-09-11 | 1997-03-13 | 1997-09-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-09-11 | 2001-03-13 | 2001-09-12 | $7700.00 | Window Closed / Lapsed |