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US4772928A Expired / Lapsed US ⏱️ 0.0 years remaining

Electric transducer for measuring mechanical quantities

Assignee: Airbus Defence and Space GmbH
•
Filing: 1986-04-24
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Granted: 1988-09-20
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Expires: 2006-04-24
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Abstract

Abstract An electric transducer for measuring mechanical quantities comprises a movable tongue which is acted upon by the mechanical quantity to be measured and the deflection of which is converted into an electrical signal. The tip of the tongue may be designed as the gate and an electric conduction channel disposed opposite the tip at a small distance therefrom may comprise the source-drain path of a field effect transistor, or vice versa.

Inventors

  • 👤 Klaus Dietrich
  • 👤 Walter Kroy

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-23 12:54
CPC Classifications
G; G01; G01P; G01P15/00; G01P15/02; G01P15/08; G01P15/13; G01P15/131; G01L; G01L1/00; G01L1/18; G01P15/12; G01P15/124; H; H10; H10D; H10D48/00; H10D48/50

Claims Analysis

Total Claims: 10
Claim 1
Independent Claim 174 words
An electric transducer for measuring a mechanical quantity comprising: a substrate comprising a rigid semiconductor yoke in the form of a regular parallelepiped; a cantilever disposed on a side of the yoke and further disposed so as to face an opposite side of the yoke, the cantilever being both capable of positive and negative motion in a direction substantially perpendicular to the plane of the yoke, the cantilever being electrically conductive; two partial field effect transistor structures disposed in a plane perpendicular to the plane of the cantilever on upper and lower edges of the side of the yoke opposite the cantilever, said field effect structures each comprising a source-drain path and said cantilever functioning as a common gate for each of said field effect structures; said cantilever moving in said direction such that when the cantilever moves toward one of said source-drain paths said cantilever moves away from the other of the source-drain paths, signals related to the distance of said cantilever from the resepective source-drain path being generated by each source-drain path.
Claim 2
Dependent Claim 174 words
An electric transducer for measuring a mechanical quantity comprising: a substrate comprising a rigid semiconductor yoke in the form of a regular parallelepiped; a cantilever disposed on a side of the yoke and further disposed so as to face an opposite side of the yoke, the cantilever being both capable of positive and negative motion in a direction substantially perpendicular to the plane of the yoke, the cantilever being electrically conductive; two partial field effect transistor structures disposed in a plane perpendicular to the plane of the cantilever on upper and lower edges of the side of the yoke opposite the cantilever, said field effect structures each comprising a source-drain path and said cantilever functioning as a common gate for each of said field effect structures; said cantilever moving in said direction such that when the cantilever moves toward one of said source-drain paths said cantilever moves away from the other of the source-drain paths, signals related to the distance of said cantilever from the resepective source-drain path being generated by each source-drain path.
Claim 3
Dependent Claim 48 words
The electric transducer recited in claim 1, further comprising an amplifier etched onto the yoke, the amplifier being coupled to and receiving signals from the two partial field effect transistor structures, the signals being generated by motion of the cantilever, said amplifier amplifying the difference between the signals.
Claim 4
Dependent Claim 31 words
The electric transducer recited in claim 1, wherein said field effect transistor structures are disposed on a projection extending toward the cantilever from the side of the yoke opposite the cantilever.
Claim 5
Dependent Claim 34 words
The electric transducer of claim 3, wherein the partial field effect transistors comprise two source-drain paths disposed parallel to one another and having a path length perpendicular to the deflection direction of the cantilever.
Claim 6
Dependent Claim 19 words
The electric transducer of claim 3, wherein the yoke, cantilever and projection are all disposed on the same substrate.
Claim 7
Dependent Claim 20 words
The electric transducer of claim 5, wherein the yoke, cantilever, and projection are all a part of one semiconductor substrate.
Claim 8
Dependent Claim 14 words
The electric transducer of claim 5, wherein the cantilever interacts with an external field.
Claim 9
Dependent Claim 27 words
The electric transducer of claim 2, wherein the amplifier comprises an integrated circuit means disposed on the yoke means and coupled to the partial field effect transistors.
Claim 10
Dependent Claim 22 words
The electric transducer of claim 1, wherein an electrode is placed parallel to the cantilever and generates restoring forces on the cantilever.

References Cited (Backward Citations)

GB1088793A Cited
US3413573A Cited
US3533022A Cited
US3585466A Cited
US4342227A Cited
US4480488A Cited
US4571661A Cited
US4653326A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1991-09-20 1992-03-21 1992-09-20 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1995-09-20 1996-03-21 1996-09-20 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1999-09-20 2000-03-21 2000-09-20 $7700.00 Window Closed / Lapsed

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