Process for depositing a thin layer of a material on the wall of a hollow body

Claim 2

A process of depositing a material on at least a surface of a container, said container having an inner surface defining an internal volume of said container and an outer surface, said process comprising: providing a cathode within said container spaced adjacent an inner surface of said container, wherein said cathode has a variable apparent and effective volume, such that said cathode can be inserted into said container and then radially extended so as to substantially fill said internal volume of the container; providing an electrode spaced adjacent with an outer surface of said container; providing a closure lid for said container, wherein said cathode is arranged in an air tight manner in said closure lid and electrically insulated therefrom; evacuating said container; providing an adjusted flow of a gaseous complex into said evacuated container, said gaseous complex comprising a source of the material which is to be deposited; polarizing said cathode, wherein said polarizing step causes the formation of a plasma of said gaseous complex, from which plasma said material is deposited onto a surface of said container; and removing any undeposited remaining constituents of said gaseous complex from said container by evacuating said remaining constituents from said container.

Claim 3

A process according to claim 1, wherein said cathode is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thickness value is variably dependent on the plasma forming conditions.

Claim 4

A process according to claim 1, wherein said cathode further comprises an apparent and effective volume which is proportional in size and shape to said internal volume.

Claim 5

A process according to claim 1, wherein said cathode, when in its radially extended mode, is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thickness value is variably dependent on the plasma forming conditions.

Claim 6

A process according to claim 1, wherein said cathode further comprises a variable apparent and effective volume such that said cathode can be radially retracted within said container and then removed from said container.

Claim 7

A process according to claim 1, wherein said cathode comprises a metal base, an axial metal core, and a plurality of metal wires, wherein said wires are arranged around said core over the entire length thereof and said wires are in electrical contact with said core.

Claim 8

A process according to claim 1, wherein said cathode comprises a bag shaped envelope, wherein said envelope is made of a supple material and said envelope is metallized on at least one surface thereof.

Claim 9

A process according to claim 7, wherein said cathode, when in its radially extended mode, is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thickness value is variably dependent on the plasma forming conditions.

Claim 10

A process according to claim 1, wherein said gaseous complex comprises a hydrocarbon.

Claim 11

A process according to claim 9, wherein said hydrocarbon is methane and said deposited material is amorphous carbon.

Claim 12

A process according to claim 1, wherein said plasma is formed by the ionization of said gaseous complex and an energy for said ionization is supplied by an energy source located externally of said container.

Claim 13

A process according to claim 11, further comprising an energy of a species of said deposited material, wherein said energy is between 500-20,000 eV.

Claim 14

A process according to claim 1, further comprising a rate of deposition of said deposition material, wherein said rate is not less than 30 nm/min.

Claim 15

A process of depositing a material on at least one surface of a container, said container having an inner surface defining an internal volume of said container and an outer surface, said process comprising: arranging said container in an enclosure; providing a cathode within said container spaced adjacent an inner surface of said container, wherein said cathode has a variable apparent and effective volume, such that said cathode can be inserted into said container and then radially extended so as to substantially fill the internal volume of the container; providing an electrode spaced adjacent with an outer surface of said container; providing a closure lid for said enclosure, wherein said cathode is arranged in an air tight manner in said closure lid and electrically insulated therefrom; evacuating said enclosure; providing an adjusted flow of a gaseous complex into said evacuated enclosure, said gaseous complex comprising a source of the material which is to be deposited; polarizing said cathode, wherein said polarizing step causes the formation of a plasma of said gaseous complex, from which plasma said material is deposited onto a surface of said container; and removing an undeposited remaining constituent of said gaseous complex from said container by evacuating said remaining constituent from said container.

Claim 16

A process of depositing a material on at least one surface of a container, said container having an inner surface defining an internal volume of said container and an outer surface, said process comprising: arranging said container in an enclosure; providing a cathode within said container spaced adjacent an inner surface of said container, wherein said cathode has a variable apparent and effective volume, such that said cathode can be inserted into said container and then radially extended so as to substantially fill the internal volume of the container; providing an electrode spaced adjacent with an outer surface of said container; providing a closure lid for said enclosure, wherein said cathode is arranged in an air tight manner in said closure lid and electrically insulated therefrom; evacuating said enclosure; providing an adjusted flow of a gaseous complex into said evacuated enclosure, said gaseous complex comprising a source of the material which is to be deposited; polarizing said cathode, wherein said polarizing step causes the formation of a plasma of said gaseous complex, from which plasma said material is deposited onto a surface of said container; and removing an undeposited remaining constituent of said gaseous complex from said container by evacuating said remaining constituent from said container.

Claim 17

A process according to claim 14, wherein said cathode is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thickness value is variably dependent on the plasma forming conditions.

Claim 18

A process according to claim 14, wherein said cathode further comprises an apparent and effective volume which is proportional in size and shape to said internal volume.

Claim 19

A process according to claim 14, wherein said cathode, when in its radially extended mode, is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thickness value is variably dependent on the plasma forming conditions.

Claim 20

A process according to claim 14, wherein said cathode further comprises a variable apparent and effective volume such that said cathode can be radially retracted within said container and then removed from said container.

Claim 21

A process according to claim 14, wherein said cathode comprises a metal base, an axial metal core, and a plurality of metal wires, wherein said wires are arranged around said core over the entire length thereof and said wires are in electrical contact with said core.

Claim 22

A process according to claim 14, wherein said cathode comprises a bag shaped envelope, wherein said envelope is made of a supple material and said envelope is metallized on at least one surface thereof.

Claim 23

A process according to claim 20, wherein said cathode, when in its radially extended mode, is spaced a predetermined distance away from said inner surface, said distance being equal to a value which does not exceed a black space thickness value of said plasma, wherein said black space thicknes value is variably dependent on the plasma forming conditions.

Claim 24

A process according to claim 14, wherein said gaseous complex comprises a hydrocarbon.

Claim 25

A process according to claim 22, wherein said hydrocarbon is methane and said deposited material is amorphous carbon.

Claim 26

A process according to claim 14, wherein said plasma is formed by the ionization of said gaseous complex and an energy for said ionization is supplied by an energy source located externally of said enclosure.

Claim 27

A process according to claim 24, further comprising an energy of a species of said deposited material, wherein said energy is between 500-20,000 eV.

Claim 28

A process according to claim 14, further comprising a rate of deposition of said deposited material, wherein said rate is not less than 30 nm/min.