Cryopump

Claim 2

A cryopump comprising a refrigerator having first and second coaxial stages, a primary cryopanel mounted directly to a low temperature heat sink on the second stage, a radiation shield surrounding the primary cryopanel and coaxial with the refrigerator and in thermal contact with a higher temperature heat sink on the first stage, and a frontal cyopanel extending substantially across an entire opening in the radiation shield, the frontal cryopanel being in thermal contact with the first stage but with the second stage positioned between the frontal cryopanel and the first stage, characterized by: a high conductance heat flow path from the frontal cryopanel to the higher temperature heat sink, that heat flow path being independent of the radiation shield.

Claim 3

A cryopump comprising a two stage refrigerator with a heat sink at the cold end of each stage, a primary pumping surface in close thermal contact with the second, coldest stage heat sink, a radiation shield spaced from and, but for a front opening to a vacuum chamber, surround the primary pumping surface and in close thermal contact with the first stage heat sink, the radiation shield being sufficiently spaced from the primary pumping surface to permit gas flow from the vacuum chamber to the primary pumping surface, the gas to be condensed at low temperatures on that pumping surface, and a frontal secondary pumping surface and radiation shield for blocking radiation and con-densing higher condensation temperature gases, the cryopump characterized by: at least one high thermal conductance thermal strut extending through but out of thermal contact with the primary pumping surface and providing a thermal path from the frontal pumping surface to the first stage heat sink, the thermal path length of the struts being substantially less than that of the radiation shield to provide a substantially lower mass heat flow path fron the frontal pumping surface to the first stage heat sink than that which would be required if the radiation shield served as the sole heat flow path.

Claim 4

A cryopump comprising a two stage refrigerator with a heat sink at the cold end of each stage, a primary pumping surface in close thermal contact with the second, coldest stage heat sink, a radiation shield spaced from and, but for a front opening to a vacuum chamber, surround the primary pumping surface and in close thermal contact with the first stage heat sink, the radiation shield being sufficiently spaced from the primary pumping surface to permit gas flow from the vacuum chamber to the primary pumping surface, the gas to be condensed at low temperatures on that pumping surface, and a frontal secondary pumping surface and radiation shield for blocking radiation and con-densing higher condensation temperature gases, the cryopump characterized by: at least one high thermal conductance thermal strut extending through but out of thermal contact with the primary pumping surface and providing a thermal path from the frontal pumping surface to the first stage heat sink, the thermal path length of the struts being substantially less than that of the radiation shield to provide a substantially lower mass heat flow path fron the frontal pumping surface to the first stage heat sink than that which would be required if the radiation shield served as the sole heat flow path.

Claim 5

A cryopump comprising a refrigerator having first and second coaxial stages, a primary pumping surface mounted directly to the second stage, a radiation shield, coaxial with the refrigerator and in thermal contact with the first stage, spaced from and, but for an opening to a vacuum chamber, surrounding the primary pumping surface, the radiation shield being sufficiently spaced from the primary pumping surface to permit gas flow from the vacuum chamber to the primary pump surface, gas to be condensed at low temperatures on that pumping surface, and a frontal, secondary pumping surface and radiation sheild comprising chevron baffles extending substantially across the entire opening to the vacuum chamber for blocking radiation and condensing higher condensation temperature gases, the baffles being in thermal contact with the first stage but with the second stage positioned between the baffles and the first stage, the cryopump characterized by: a high thermal conductance heat flow path from the high temperature pumping surface to a heat sink through at least one heat flow element which provides negligible radiation shielding, the combined mass of said heat flow elements being substantially less than that which would be required if the radiation shield served as the sole heat flow path.

Claim 6

A cryopump comprising a refrigerator having first and second coaxial stages, a primary pumping surface mounted directly to the second stage, a radiation shield, coaxial with the refrigerator and in thermal contact with the first stage, spaced from and, but for an opening to a vacuum chamber, surrounding the primary pumping surface, the radiation shield being sufficiently spaced from the primary pumping surface to permit gas flow from the vacuum chamber to the primary pump surface, gas to be condensed at low temperatures on that pumping surface, and a frontal, secondary pumping surface and radiation sheild comprising chevron baffles extending substantially across the entire opening to the vacuum chamber for blocking radiation and condensing higher condensation temperature gases, the baffles being in thermal contact with the first stage but with the second stage positioned between the baffles and the first stage, the cryopump characterized by: a high thermal conductance heat flow path from the high temperature pumping surface to a heat sink through at least one heat flow element which provides negligible radiation shielding, the combined mass of said heat flow elements being substantially less than that which would be required if the radiation shield served as the sole heat flow path.

Claim 7

A cryopump as claimed in claim 1, 2, or 3 wherein the high conductance thermal path is provided by at least one heat pipe.

Claim 8

A cryopump as claimed in claim 4 wherein the fluid in the heat pipe vaporizes and condenses in a temperature range which extends to less than and about 130 K.

Claim 9

A cryopump as claimed in claim 2 or 3 wherein the frontal pumping surface and the side radiation shield are not interconnected.

Claim 10

A cryopump as claimed in claim 1 or 3 wherein the high conductance heat flow path extends through but is isolated from the primary pumping surface.

Claim 11

A cryopump as claimed in claim 7 wherein the refrigerator to the cryopump is a two stage refrigerator and the heat pipe extends between the first, warmer stage of the refrigerator to a secondary pumping cryopanel.

Claim 12

A cryopump as claimed in claim 8 wherein the fluid in the heat pipe vaporizes and condenses in a temperature range which extends to less than about 130 K.

Claim 13

A cryopump as claimed in claim 8 wherein the high conductance heat flow element extends through but is isolated from the primary pumping surface.

Claim 14

A cryopump comprising a refrigerated heat sink and a cryopanel of extended surface area in heat exchange relationship with the heat sink, characterized by: at least one heat pipe in close thermal contact with each of the heat sink and cryopanel, the heat pipe having a fluid therein which vaporizes and condenses in a temperature range including the operating temperature of the cryopanel and providing a high conductance thermal path to minimize the temperature differential between the heat sink and cryopanel.

Claim 15

A cryopump comprising a refrigerated heat sink and a cryopanel of extended surface area in heat exchange relationship with the heat sink, characterized by: at least one heat pipe in close thermal contact with each of the heat sink and cryopanel, the heat pipe having a fluid therein which vaporizes and condenses in a temperature range including the operating temperature of the cryopanel and providing a high conductance thermal path to minimize the temperature differential between the heat sink and cryopanel.