Patent US4592306A successfully refreshed from Google Patents.
US4592306A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for the deposition of multi-layer coatings
Assignee: Pilkington Group Ltd
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Filing: 1984-11-30
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Granted: 1986-06-03
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Expires: 2004-11-30
Abstract
Abstract Compact and versatile apparatus for deposition of multi-layer coatings on substrates at reduced pressure comprises at least 3 and preferably at least 4 evacuable deposition chambers, means for evacuating each of said deposition chambers and coating means in each of said deposition chambers for depositing a coating layer on a substrate; an evacuable transfer chamber with closable ports between said transfer chamber and each of said coating chambers for transfer of a substrate to be coated between said deposition chambers; means for evacuating said transfer chamber; and transfer means for transferring a substrate between said deposition chambers via the transfer chamber. The apparatus is especially useful for the production of photovoltaic cells in which the active layers are formed of amorphous silicon deposited from a glow discharge.
Inventors
- 👤 Jose M. Gallego
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 17:32
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/56; C23C14/568; C23C16/00; C23C16/44; C23C16/54; Y; Y10; Y10S; Y10S414/00; Y10S414/135; Y10S414/139
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
128 words
An apparatus for deposition of multi-layer coatings on substrates comprising an evacuable transfer chamber, at least 3 evacuable deposition chambers disposed around the transfer chamber and extending radially away from an axis with the transfer chamber, means for evacuating each of said deposition chambers, and coating means in each of said deposition chambers for depositing a coating layer on a substrate, said evacuable transfer chamber having closable ports providing communication between said transfer chamber and each of said deposition chambers for transfer of a substrate to be coated between said deposition chambers, means for evacuating said transfer chamber, and transfer means rotatably mounted in said transfer chamber for rotation about said axis in the transfer chamber for transferring a substrate between said deposition chambers via the transfer chamber.
Claim 2
Independent Claim
128 words
An apparatus for deposition of multi-layer coatings on substrates comprising an evacuable transfer chamber, at least 3 evacuable deposition chambers disposed around the transfer chamber and extending radially away from an axis with the transfer chamber, means for evacuating each of said deposition chambers, and coating means in each of said deposition chambers for depositing a coating layer on a substrate, said evacuable transfer chamber having closable ports providing communication between said transfer chamber and each of said deposition chambers for transfer of a substrate to be coated between said deposition chambers, means for evacuating said transfer chamber, and transfer means rotatably mounted in said transfer chamber for rotation about said axis in the transfer chamber for transferring a substrate between said deposition chambers via the transfer chamber.
Claim 3
Dependent Claim
23 words
An apparatus according to claim 1 in which said deposition chambers are disposed on the arc of a circle around the transfer chamber.
Claim 4
Dependent Claim
29 words
An apparatus according to claim 1 wherein the transfer means comprises a transfer arm rotatably mounted in the transfer chamber for rotation about an axis in the transfer chamber.
Claim 5
Dependent Claim
54 words
An apparatus according to claim 1 which additionally comprises an evacuable inlet chamber with a closable entry port for introduction of a substrate, means for evacuating said inlet chamber, and a closable port between said inlet chamber and the transfer chamber for transfer of a substrate between said inlet chamber and the transfer chamber.
Claim 6
Dependent Claim
54 words
An apparatus according to claim 4 which additionally comprises an evacuable outlet chamber with a closable outlet port for removal of a substrate, means for evacuating said outlet chamber, and a closable port between said outlet chamber and the transfer chamber for transfer of a substrate between the transfer chamber and said outlet chamber.
Claim 7
Dependent Claim
54 words
An apparatus according to claim 1 which additionally comprises an evacuable outlet chamber with a closable outlet port for removal of a substrate, means for evacuating said outlet chamber, and a closable port between said outlet chamber and the transfer chamber for transfer of a substrate between the transfer chamber and said outlet chamber.
Claim 8
Dependent Claim
46 words
An apparatus according to claim 1 which comprises means for supplying a coating gas to each of said deposition chambers and electrode means for generation of a glow discharge in each of said deposition chambers with deposition of a coating on a substrate in that chamber.
Claim 9
Dependent Claim
54 words
An apparatus according to claim 1 comprising an additional evacuable deposition chamber, a closable port between said additional chamber and the transfer chamber, means for evacuating said additional chamber, and heating means in said chamber for evaporation of a metal and deposition of a coating of said metal on a substrate in the chamber.
Claim 10
Dependent Claim
124 words
An apparatus according to claim 1, comprising an evacuable transfer chamber, at least 4 evacuable deposition chambers disposed around the transfer chamber and extending radially away from an axis within the transfer chamber, means for evacuating each of said deposition chambers, and coating means in each of said chambers for depositing a coating layer on a substrate, said evacuable transfer chamber having closable ports providing communication between said transfer chamber and each of said deposition chambers for transfer of a substrate to be coated between said deposition chambers, means for evacuating said transfer chamber, and transfer means rotatably mounted in said transfer chamber for rotation about said axis in the transfer chamber for transferring a substrate between said deposition chambers via the transfer chamber.
Claim 11
Dependent Claim
23 words
An apparatus according to claim 9 in which said deposition chambers are disposed on the arc of a circle around the transfer chamber.
Claim 12
Dependent Claim
29 words
An apparatus according to claim 9 wherein the transfer means comprises a transfer arm rotatably mounted in the transfer chamber for rotation about an axis in the transfer chamber.
Claim 13
Dependent Claim
54 words
An apparatus according to claim 9 which additionally comprises an evacuable inlet chamber with a closable entry port for introduction of a substrate, means for evacuating said inlet chamber, and a closable port between said inlet chamber and the transfer chamber for transfer of a substrate between said inlet chamber and the transfer chamber.
Claim 14
Dependent Claim
54 words
An apparatus according to claim 12 which additionally comprises an evacuable outlet chamber with a closable outlet port for removal of a substrate, means for evacuating said outlet chamber, and a closable port between said outlet chamber and the transfer chamber for transfer of a substrate between the transfer chamber and said outlet chamber.
Claim 15
Dependent Claim
54 words
An apparatus according to claim 9 which additionally comprises an evacuable outlet chamber with a closable outlet port for removal of a substrate, means for evacuating said outlet chamber, and a closable port between said outlet chamber and the transfer chamber for transfer of a substrate between the transfer chamber and said outlet chamber.
Claim 16
Dependent Claim
46 words
An apparatus according to claim 9 which comprises means for supplying a coating gas to each of said deposition chambers and electrode means for generation of a glow discharge in each of said deposition chambers with deposition of a coating on a substrate in that chamber.
Claim 17
Dependent Claim
54 words
An apparatus according to claim 9 comprising an additional evacuable deposition chamber, a closable port between said additional chamber and the transfer chamber, means for evacuating said additional chamber, and heating means in said chamber for evaporation of a metal and deposition of a coating of said metal on a substrate in the chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-02 | 1989-12-02 | 1990-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-02 | 1993-12-02 | 1994-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-02 | 1997-12-02 | 1998-06-03 | $7700.00 | Window Closed / Lapsed |