Patent US4188066A successfully refreshed from Google Patents.
Patent US4186199A successfully refreshed from Google Patents.
Patent US4499177A successfully refreshed from Google Patents.
US4499177A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of manufacturing a semiconductor device
Assignee: US Philips Corp
•
Filing: 1983-07-27
•
Granted: 1985-02-12
•
Expires: 2003-07-27
Abstract
Abstract A method of manufacturing a semiconductor device in which a photosensitive lacquer layer is developed in a lye solution, and comprises a polymeric material and a sensitizer with a diazo group and a ketone group. This lacquer layer is formed on a substrate surface. After a patterning irradiation, but before development, the lacquer layer is subjected to an intermediate treatment comprising two irradiations. These irradiations result in that differences in solubility in lye are obtained in the direction of thickness in the parts of the lacquer layer which were not exposed during the patterning irradiation. In this manner, it is possible to realize lacquer patterns with different profiles.
Inventors
- 👤 Franciscus A. Vollenbroek
- 👤 Elisabeth J. Spiertz
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 18:26
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/20; G03F7/2022
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
141 words
A method of manufacturing a semiconductor device comprising the steps of forming a photoresist lacquer layer on a substrate surface, said lacquer layer including a polymeric material and a sensitizer having a diazo group and a ketone group, exposing said lacquer layer to patterning irradiation, subjecting the entire area of said lacquer layer to an intermediate treatment, said intermediate treatment including a first irradiation of said lacquer layer to form a bond between said sensitizer and said polymeric material, and a second irradiation of said lacquer layer to convert at least a part of said sensitizer into an acid in parts of said lacquer layer lying below the top layer, and developing said lacquer layer in a lye solution, wherein said intermediate treatment causes differences in solubility in lye in the direction of thickness in unexposed parts of said lacquer layer.
Claim 2
Independent Claim
141 words
A method of manufacturing a semiconductor device comprising the steps of forming a photoresist lacquer layer on a substrate surface, said lacquer layer including a polymeric material and a sensitizer having a diazo group and a ketone group, exposing said lacquer layer to patterning irradiation, subjecting the entire area of said lacquer layer to an intermediate treatment, said intermediate treatment including a first irradiation of said lacquer layer to form a bond between said sensitizer and said polymeric material, and a second irradiation of said lacquer layer to convert at least a part of said sensitizer into an acid in parts of said lacquer layer lying below the top layer, and developing said lacquer layer in a lye solution, wherein said intermediate treatment causes differences in solubility in lye in the direction of thickness in unexposed parts of said lacquer layer.
Claim 3
Dependent Claim
33 words
A method according to claim 1, wherein said first irradiation is carried out with UV radiation at wavelengths not larger than 280 nm, said lacquer layer being substantially anhydrous during said first irradiation.
Claim 4
Dependent Claim
36 words
A method according to claim 2, wherein said second irradiation is carried out with UV radiation at wavelengths larger than 280 nm, said lacquer layer being in contact with a water-containing atmosphere during said second irradiation.
Claim 5
Dependent Claim
28 words
A method according to claim 3, wherein between said first and second irradiation, portions of said lacquer layer below the top layer are decomposed by a heat treatment.
Claim 6
Dependent Claim
21 words
A method according to claim 3, wherein during said patterning irradiation, only surface parts of said lacquer layer are rendered developable.
Claim 7
Dependent Claim
28 words
A method according to claim 2, wherein between said first and second irradiation, portions of said lacquer layer below the top layer are decomposed by a heat treatment.
Claim 8
Dependent Claim
21 words
A method according to claim 2, wherein during said patterning irradiation, only surface parts of said lacquer layer are rendered developable.
Claim 9
Dependent Claim
36 words
A method according to claim 1, wherein said second irradiation is carried out with UV radiation at wavelengths larger than 280 nm, said lacquer layer being in contact with a water-containing atmosphere during said second irradiation.
Claim 10
Dependent Claim
21 words
A method according to claim 1, wherein during said patterning irradiation, only surface parts of said lacquer layer are rendered developable.
References Cited (Backward Citations)
US4212935A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-12 | 1988-08-13 | 1989-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-12 | 1992-08-13 | 1993-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-12 | 1996-08-13 | 1997-02-12 | $7700.00 | Window Closed / Lapsed |