Patent US4474827A successfully refreshed from Google Patents.
US4474827A
Expired / Lapsed
US
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Ion induced thin surface coating
Assignee: Individual
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Filing: 1982-07-08
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Granted: 1984-10-02
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Expires: 2002-07-08
Abstract
Abstract Thin film coatings comprising hydrocarbon polymers are deposited on and merged into a substrate by causing secondary ionically activated and electric field energized atomic or molecular ionic species including hydrocarbon species to be directed to a substrate in conjunction with an ion beam of primary energetic ions.
Inventors
- 👤 Michael W. Ferralli
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:15
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; C; C03; C03C; C03C17/00; C03C17/28; C23; C23C; C23C14/00; C23C14/22; C23C14/48
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
254 words
A method for the deposition of thin film comprising: (a) ionizing at least one vaporized non-deposition material to form a flux comprising ions and neutral fragments of such vaporized non-deposition material; (b) extracting from said flux a primary energetic ion beam consisting essentially of ions of vaporized non-deposition material; (c) accelerating said primary energetic ion beam of vaporized non-deposition material to an energy level of at least 1 Kev and directing said primary energetic ion beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass, and polymers, said deposition chamber containing also a vaporized deposition material comprising at least one hydrocarbon monomer and an electric field directed toward said substrate; (d) passing said primary energetic ion beam of non-deposition material through said vaporized deposition material whereby such vaporized deposition material is ionized by interaction with said primary energetic ion beam of non-deposition material, said ions of vaporized deposition material being secondary ions which, under the influence of the aforementioned electric field, are energized and directed toward the surface of said substrate; and (e) coimpinging said primary energetic ion beam of non-deposition material and secondary ions of vaporized deposition material against a surface of said substrate for a time sufficient to implant at least a portion of said ions of vaporized deposition material into said substrate and to form a thin film comprising a hydrocarbon polymer in and on such substrate, such film being merged into and with ions of vaporized deposition material and the atoms of said substrate.
Claim 2
Independent Claim
254 words
A method for the deposition of thin film comprising: (a) ionizing at least one vaporized non-deposition material to form a flux comprising ions and neutral fragments of such vaporized non-deposition material; (b) extracting from said flux a primary energetic ion beam consisting essentially of ions of vaporized non-deposition material; (c) accelerating said primary energetic ion beam of vaporized non-deposition material to an energy level of at least 1 Kev and directing said primary energetic ion beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass, and polymers, said deposition chamber containing also a vaporized deposition material comprising at least one hydrocarbon monomer and an electric field directed toward said substrate; (d) passing said primary energetic ion beam of non-deposition material through said vaporized deposition material whereby such vaporized deposition material is ionized by interaction with said primary energetic ion beam of non-deposition material, said ions of vaporized deposition material being secondary ions which, under the influence of the aforementioned electric field, are energized and directed toward the surface of said substrate; and (e) coimpinging said primary energetic ion beam of non-deposition material and secondary ions of vaporized deposition material against a surface of said substrate for a time sufficient to implant at least a portion of said ions of vaporized deposition material into said substrate and to form a thin film comprising a hydrocarbon polymer in and on such substrate, such film being merged into and with ions of vaporized deposition material and the atoms of said substrate.
Claim 3
Dependent Claim
23 words
A method according to claim 1 wherein said deposited film comprises a polymer of a saturated hydrocarbon having at least one carbon atom.
Claim 4
Dependent Claim
23 words
A method according to claim 1 wherein said deposited film comprises a polymer of an unsaturated hydrocarbon having at least two carbon atoms.
Claim 5
Independent Claim
273 words
A method for the deposition of thin film comprising: (a) ionizing at least one vaporized deposition material to form a flux comprising ions and neutral fragments of such vaporized deposition material; (b) extracting from said flux a primary energetic ion beam consisting essentially of ions of vaporized deposition material; (c) accelerating said primary energetic ion beam of vaporized deposition material to an energy level of at least 1 Kev and directing said primary energetic ion beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass, and polymers, said deposition chamber containing also a vaporized deposition material comprising at least one hydrocarbon monomer and an electric field directed toward said substrate; (d) passing said primary energetic ion beam of deposition material through said vaporized deposition material whereby such vaporized deposition material is ionized by interaction with said primary energetic ion beam of deposition material, said ions of this vaporized deposition material being secondary ions which, under the influence of the aforementioned electric field, are energized and directed toward a surface of said substrate; and (e) coimpinging said primary energetic ion beam of deposition material and secondary ions of vaporized deposition material against a surface of said substrate for a time sufficient to implant at least a portion of any ions of deposition material whether from the primary energetic ion beam of deposition material or from the secondary ions of vaporized deposition material into said substrate and to form a thin film comprising a hydrocarbon polymer in and on such substrate, such film being merged into and with ions of vaporized deposition material and the atoms of said substrate.
Claim 6
Independent Claim
273 words
A method for the deposition of thin film comprising: (a) ionizing at least one vaporized deposition material to form a flux comprising ions and neutral fragments of such vaporized deposition material; (b) extracting from said flux a primary energetic ion beam consisting essentially of ions of vaporized deposition material; (c) accelerating said primary energetic ion beam of vaporized deposition material to an energy level of at least 1 Kev and directing said primary energetic ion beam into a deposition chamber containing a substrate selected from the group consisting of metals, glass, and polymers, said deposition chamber containing also a vaporized deposition material comprising at least one hydrocarbon monomer and an electric field directed toward said substrate; (d) passing said primary energetic ion beam of deposition material through said vaporized deposition material whereby such vaporized deposition material is ionized by interaction with said primary energetic ion beam of deposition material, said ions of this vaporized deposition material being secondary ions which, under the influence of the aforementioned electric field, are energized and directed toward a surface of said substrate; and (e) coimpinging said primary energetic ion beam of deposition material and secondary ions of vaporized deposition material against a surface of said substrate for a time sufficient to implant at least a portion of any ions of deposition material whether from the primary energetic ion beam of deposition material or from the secondary ions of vaporized deposition material into said substrate and to form a thin film comprising a hydrocarbon polymer in and on such substrate, such film being merged into and with ions of vaporized deposition material and the atoms of said substrate.
Claim 7
Dependent Claim
23 words
A method according to claim 1 wherein said deposited film comprises a polymer of a saturated hydrocarbon having at least one carbon atom.
Claim 8
Dependent Claim
23 words
A method according to claim 4 wherein said deposited film comprises a polymer of an unsaturated hydrocarbon having at least two carbon atoms.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-10-02 | 1988-04-02 | 1988-10-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-10-02 | 1992-04-02 | 1992-10-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-10-02 | 1996-04-02 | 1996-10-02 | $7700.00 | Window Closed / Lapsed |