Patent US4441791A successfully refreshed from Google Patents.
US4441791A
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Deformable mirror light modulator
Assignee: Texas Instruments Inc
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Filing: 1982-06-07
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Granted: 1984-04-10
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Expires: 2002-06-07
Abstract
Abstract A light modulator comprising a light-reflective metallized membrane defining a deformable mirror disposed over a semiconductor substrate of one conductivity type in which a matrix array of field effect address transistors are formed, the metallized membrane cooperating with a matrix of floating metallic field plate members disposed on an insulating layer covering the substrate to define an array of air gap capacitors for line addressing by the field effect address transistors. The floating metallic field plates are opaque to light and prevent photocharge generation in the active regions of the matrix array of field effect address transistors. The metallized membrane is spaced from the field effect address transistors and the metallic floating field plates by an upstanding semiconductor grid structure which is formed on the insulating layer of the semiconductor substrate and defines gate electrodes for the address transistors. The metallized membrane is mounted on the upstanding semiconductor grid structure by molecular bonding to the contact members disposed over the semiconductor grid structure. The metallized membrane is formed of a polymer of nitrocellulose as a flexible carrier layer on at least one surface of which is disposed a thin metallic coating providing a light reflective surface. Each transistor in the array of field effect address transistors is line-addressable, and the metallized membrane in each cell of the matrix array of air gap capacitors is deflectable inwardly toward the substrate in response to the signal on the address transistor corresponding thereto. Should a potential above a predetermined magnitude be placed on an individual air gap capacitor, the metallized membrane will transfer charge to the floating field plate and return to zero deflection. The floating field plate thereby not only acts as a light-blocking layer, but also prevents voltage-induced collapse of the metallized membrane to the surface of the semiconductor substrate.
Inventors
- 👤 Larry J. Hornbeck
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 23:34
CPC Classifications
G; G09; G09F; G09F9/00; G09F9/30; G09F9/37; G09F9/372; G02; G02B; G02B26/00; G02B26/06; G02B26/08; G02B26/0816; G02B26/0825; G02F; G02F1/00; G02F1/01; G02F1/0128
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
25 words
A light modulating semiconductor device comprising: a semiconductor substrate of one conductivity type; a layer of insulating material disposed on one surface of said substrate;
Claim 2
Dependent Claim
25 words
A light modulating semiconductor device comprising: a semiconductor substrate of one conductivity type; a layer of insulating material disposed on one surface of said substrate;
Claim 3
Dependent Claim
228 words
a first doped region of the other conductivity type disposed in said substrate; a member of conductive material disposed on said insulating layer above said first doped region of the other conductivity type and extending upwardly from said substrate; membrane means including at least one conductive layer disposed upon said conductive member and extending across said substrate in spaced relationship with respect to said insulating layer, said membrane means having a light reflective surface exposed to incident light; a conductive element disposed on said insulating layer and overlying said substrate in offset relationship with respect to said first doped region of the other conductivity type and said conductive member extending upwardly from said substrate; a second doped region of the other conductivity type disposed in said substrate and extending to said one surface thereof, said second doped region of the other conductivity type being substantially disposed beneath said conductive element and spaced therefrom by said insulating layer interposed therebetween; said conductive element being spaced from said membrane means so as to define an air gap therebetween, said conductive element and said conductive layer of said membrane means respectively serving as opposed field plates with the air gap therebetween to comprise an air gap capacitor; and said membrane means being deflectable in a direction toward said conductive element in response to the charge placed on said air gap capacitor.
Claim 4
Dependent Claim
228 words
a first doped region of the other conductivity type disposed in said substrate; a member of conductive material disposed on said insulating layer above said first doped region of the other conductivity type and extending upwardly from said substrate; membrane means including at least one conductive layer disposed upon said conductive member and extending across said substrate in spaced relationship with respect to said insulating layer, said membrane means having a light reflective surface exposed to incident light; a conductive element disposed on said insulating layer and overlying said substrate in offset relationship with respect to said first doped region of the other conductivity type and said conductive member extending upwardly from said substrate; a second doped region of the other conductivity type disposed in said substrate and extending to said one surface thereof, said second doped region of the other conductivity type being substantially disposed beneath said conductive element and spaced therefrom by said insulating layer interposed therebetween; said conductive element being spaced from said membrane means so as to define an air gap therebetween, said conductive element and said conductive layer of said membrane means respectively serving as opposed field plates with the air gap therebetween to comprise an air gap capacitor; and said membrane means being deflectable in a direction toward said conductive element in response to the charge placed on said air gap capacitor.
Claim 5
Dependent Claim
29 words
A light modulating semiconductor device as set forth in claim 1, wherein said first doped region of the other conductivity type extends to said one surface of said substrate.
Claim 6
Dependent Claim
38 words
A light modulating semiconductor device as set forth in claim 2, wherein said second doped region of the other conductivity type is disposed in spaced relationship with respect to said first doped region of the other conductivity type.
Claim 7
Dependent Claim
65 words
A light modulating semiconductor device as set forth in claim 3, wherein said second doped region of the other conductivity type extends within said substrate beyond the perimeter of said conductive element so as to include a portion thereof underlying the space defined between said conductive member and said conductive element by virtue of the offset relationship between said conductive member and said conductive element.
Claim 8
Dependent Claim
42 words
A light modulating semiconductor device as set forth in claim 3, wherein said second doped region of the other conductivity type includes marginal portions of reduced depth as compared to the remainder of said second doped region of the other conductivity type.
Claim 9
Dependent Claim
46 words
A light modulating semiconductor device as set forth in claim 2, wherein said second doped region of the other conductivity type extends partially beneath said conductive member into said first doped region of the other conductivity type and has a decreased dopant concentration as compared thereto.
Claim 10
Dependent Claim
41 words
A light modulating semiconductor device as set forth in claim 1, wherein said first doped region of the other conductivity type is disposed in said substrate in buried relationship below said one surface thereof and beneath said upwardly extending conductive member.
Claim 11
Dependent Claim
35 words
A light modulating semiconductor device as set forth in claim 1, wherein said membrane means comprises first and second metal layers and a flexible non-metallic carrier layer interposed therebetween to form a composite membrane structure.
Claim 12
Dependent Claim
65 words
A light modulating semiconductor device as set forth in claim 8, wherein the metal layer of said membrane means proximally related to said conductive member is a composite two-ply metallic layer including an uppermost back-up metal layer in engagement with said non-metallic carrier layer of said membrane means and a lower metallic layer of a metal material exhibiting resistance to oxidation and low contact resistance.
Claim 13
Dependent Claim
24 words
A light modulating semiconductor device as set forth in claim 9, wherein said non-metallic carrier layer of said membrane means is an organic polymer.
Claim 14
Dependent Claim
25 words
A light modulating semiconductor device as set forth in claim 10, wherein said carrier layer of organic polymeric material of said membrane means is nitrocellulose.
Claim 15
Dependent Claim
35 words
A light modulating semiconductor device as set forth in claim 11, wherein said first metal layer and said uppermost back-up metal layer of said membrane means are antimony and said lower metallic layer is gold.
Claim 16
Dependent Claim
288 words
A light modulating semiconductor device comprising: a semiconductor substrate of one conductivity type; a layer of insulating material disposed on one surface of said substrate; means defining a matrix array of transistors in said substrate including a plurality of spaced parallel elongated doped regions of the other conductivity type disposed in said substrate; a plurality of conductive members respectively corresponding to said elongated doped regions of the other conductivity type and disposed on said insulating layer above the corresponding one of said plurality of parallel doped regions of the other conductivity type and extending upwardly from said substrate; membrane means including at least one conductive layer disposed over said substrate and contacting said plurality of conductive members, said membrane means being disposed in spaced relationship with respect to said insulating layer, said membrane means having a light reflective surface and being exposed to incident light; a matrix of spaced apart conductive elements arranged in rows and columns on said insulating layer and overlying said substrate in offset relationship with respect to said parallel elongated doped regions of the other conductivity type and respectively disposed between successive ones of said plurality of upwardly extending conductive members; said matrix of conductive elements being spaced from said membrane means so as to define an array of air gaps therebetween in cooperation with said upwardly extending plurality of conductive members; said conductive layer of said membrane means and said conductive elements spaced therefrom respectively serving as opposed field plates and cooperating to define a plurality of air gap capacitors addressable by said transistors; and said membrane means being deflectable in a direction toward said plurality of conductive elements in response to the respective charges placed on the plurality of air gap capacitors.
Claim 17
Dependent Claim
288 words
A light modulating semiconductor device comprising: a semiconductor substrate of one conductivity type; a layer of insulating material disposed on one surface of said substrate; means defining a matrix array of transistors in said substrate including a plurality of spaced parallel elongated doped regions of the other conductivity type disposed in said substrate; a plurality of conductive members respectively corresponding to said elongated doped regions of the other conductivity type and disposed on said insulating layer above the corresponding one of said plurality of parallel doped regions of the other conductivity type and extending upwardly from said substrate; membrane means including at least one conductive layer disposed over said substrate and contacting said plurality of conductive members, said membrane means being disposed in spaced relationship with respect to said insulating layer, said membrane means having a light reflective surface and being exposed to incident light; a matrix of spaced apart conductive elements arranged in rows and columns on said insulating layer and overlying said substrate in offset relationship with respect to said parallel elongated doped regions of the other conductivity type and respectively disposed between successive ones of said plurality of upwardly extending conductive members; said matrix of conductive elements being spaced from said membrane means so as to define an array of air gaps therebetween in cooperation with said upwardly extending plurality of conductive members; said conductive layer of said membrane means and said conductive elements spaced therefrom respectively serving as opposed field plates and cooperating to define a plurality of air gap capacitors addressable by said transistors; and said membrane means being deflectable in a direction toward said plurality of conductive elements in response to the respective charges placed on the plurality of air gap capacitors.
Claim 18
Dependent Claim
59 words
A light modulating semiconductor device as set forth in claim 13, wherein said plurality of upwardly extending conductive members are arranged in an integral grid configuration having a matrix of openings provided therein in registration with said matrix of conductive elements and respectively defining the air gaps between said conductive layer of said membrane means and said conductive elements.
Claim 19
Dependent Claim
119 words
A light modulating semiconductor device as defined in claim 14, further including a patterned insulating layer disposed atop said plurality of conductive members and having a configuration framing the matrix of openings provided by the integral grid configuration of said plurality of conductive members, said patterned insulating layer providing an upper level layer of insulating material, and said layer of insulating material disposed on said one surface of said substrate providing a lower level layer of insulating material; conductive contact members disposed upon said upper level layer of insulating material and respectively overlying said plurality of conductive members; and said at least one conductive layer of said membrane means engaging said contact members of said plurality of conductive members.
Claim 20
Dependent Claim
36 words
A light modulating semiconductor device as set forth in claim 13, wherein said matrix of conductive elements respectively comprise floating metallic field plate members having a thickness rendering said field plate members opaque to incident light.
Claim 21
Dependent Claim
34 words
A light modulating semiconductor device as set forth in claim 13, wherein said plurality of spaced parallel elongated doped regions of the other conductivity type respectively extend to said one surface of said substrate.
Claim 22
Dependent Claim
104 words
A light modulating semiconductor device as set forth in claim 17, further including a martrix of spaced apart second doped regions of the other conductivity type disposed in said substrate and arranged in rows and columns, said second doped regions of the other conductivity type extending to said one surface of said substrate and respectively disposed in spaced relationship to the one of said first-mentioned doped regions of the other conductivity type corresponding thereto, each of said second doped regions of the other conductivity type being respectively substantially disposed beneath said conductive element corresponding thereto and spaced therefrom by said insulating layer interposed therebetween.
Claim 23
Dependent Claim
70 words
A light modulating semiconductor device as set forth in claim 18, wherein each of said second doped regions of the other conductivity type extends within said substrate beyond the perimeter of the conductive element corresponding thereto so as to include a portion thereof underlying the space defined between the corresponding conductive member and said conductive element by virtue of the offset relationship between said conductive member and said conductive element.
Claim 24
Dependent Claim
95 words
A light modulating semiconductor device as set forth in claim 17, further including a matrix of spaced apart second doped regions of the other conductivity type disposed in said substrate arranged in rows and columns and extending to said one surface of said substrate, each of said second doped regions of the other conductivity type extending beneath the conductive element corresponding thereto and partially beneath the respective one of said conductive members into the corresponding one of said first-mentioned doped regions of the other conductivity type and having a decreased dopant concentration as compared thereto.
Claim 25
Dependent Claim
66 words
A light modulating semiconductor device as set forth in claim 17, further including a matrix of spaced apart second doped regions of the other conductivity type disposed in said substrate and extending to said one surface thereof beneath corresponding ones of said conductive elements, and each second doped regions of the other conductivity type including marginal portions of reduced depth as compared to the remainder thereof.
Claim 26
Dependent Claim
50 words
A light modulating semiconductor device as set forth in claim 13, wherein said plurality of spaced parallel elongated doped regions of the other conductivity type are disposed in said substrate in buried relationship below said one surface thereof and beneath respective ones of said upwardly extending conductive members corresponding thereto.
Claim 27
Dependent Claim
66 words
A light modulating semiconductor device as set forth in claim 22, further including a matrix of spaced apart second doped regions of the other conductivity type disposed in said substrate and extending to said one surface thereof, each of said second doped regions of the other conductivity type being substantially disposed beneath said conductive element corresponding thereto and spaced therefrom by said insulating layer interposed therebetween.
Claim 28
Dependent Claim
35 words
A light modulating semiconductor device as set forth in claim 13, wherein said membrane means comprises first and second metal layers and a flexible non-metallic carrier layer interposed therebetween to form a composite membrane structure.
Claim 29
Dependent Claim
67 words
A light modulating semiconductor device as set forth in claim 24, wherein the metal layer of said membrane means proximally related to said plurality of conductive members is a composite two-ply metallic layer including an uppermost back-up metal layer in engagement with said non-metallic carrier layer of said membrane means and a lower metallic layer of a metal material exhibiting resistance to oxidation and low contact resistance.
Claim 30
Dependent Claim
24 words
A light modulating semiconductor device as set forth in claim 25, wherein said non-metallic carrier layer of said membrane means is an organic polymer.
Claim 31
Dependent Claim
25 words
A light modulating semiconductor device as set forth in claim 26, wherein said carrier layer of organic polymeric material of said membrane means is nitrocellulose.
Claim 32
Dependent Claim
35 words
A light modulating semiconductor device as set forth in claim 27, wherein said first metal layer and said uppermost back-up metal layer of said membrane means are antimony and said lower metallic layer is gold.
Claim 33
Dependent Claim
171 words
A spatial light modulator comprising: a semiconductor substrate of one conductivity type; means defining a matrix array of air gap capacitors arranged in a plurality of rows and columns and disposed on one surface of said semiconductor substrate; charge-coupled device delay line means connected to one row or column of said matrix array of air gap capacitors for providing simultaneous signal inputs to each of the air gap capacitors arranged in one column or row of the matrix array; decoder means connected to a plurality of air gap capacitors included in the other of a row or column of said matrix array and operable to select one line of said air gap capacitors at a time for readout; and said air gap capacitors being defined at least in part by membrane means having at least one conductive layer and disposed above said semiconductor substrate in spaced relationship thereto and by a plurality of spaced apart conductive elements disposed on said semiconductor substrate in spaced relationship with respect to said membrane means.
Claim 34
Dependent Claim
171 words
A spatial light modulator comprising: a semiconductor substrate of one conductivity type; means defining a matrix array of air gap capacitors arranged in a plurality of rows and columns and disposed on one surface of said semiconductor substrate; charge-coupled device delay line means connected to one row or column of said matrix array of air gap capacitors for providing simultaneous signal inputs to each of the air gap capacitors arranged in one column or row of the matrix array; decoder means connected to a plurality of air gap capacitors included in the other of a row or column of said matrix array and operable to select one line of said air gap capacitors at a time for readout; and said air gap capacitors being defined at least in part by membrane means having at least one conductive layer and disposed above said semiconductor substrate in spaced relationship thereto and by a plurality of spaced apart conductive elements disposed on said semiconductor substrate in spaced relationship with respect to said membrane means.
Claim 35
Dependent Claim
225 words
A line-addressed spatial light modulator structure comprising: a semiconductor substrate of one conductivity type; means defining a matrix array of air gap capacitors disposed on one surface of said semiconductor substrate, said air gap capacitor-defining means including membrane means having at least one conductive layer and disposed in spaced relationship to said substrate wherein said conductive layer serves as field plates of said matrix array of air gap capacitors, and a plurality of conductive elements disposed on said substrate in insulated relationship thereto and in spaced relationship to said membrane means for forming the other field plates of the respective air gap capacitors included in said matrix array; means defining in said substrate a plurality of field effect address transistors corresponding to respective air gap capacitors and adapted to electronically address said air gap capacitors upon being rendered conductive, said address transistors including drain regions of the other conductivity type disposed in said semiconductor substrate and being common to all of said address transistors comprising respective lines; line driver circuitry means operably connected to said drain regions of said address transistors; analog delay line means connected to said line driver means for providing input signals to said address transistors; said address transistors having respective gate electrodes defining horizontal lines in said matrix array; and decoder means connected to said gate electrodes of said address transistors.
Claim 36
Dependent Claim
225 words
A line-addressed spatial light modulator structure comprising: a semiconductor substrate of one conductivity type; means defining a matrix array of air gap capacitors disposed on one surface of said semiconductor substrate, said air gap capacitor-defining means including membrane means having at least one conductive layer and disposed in spaced relationship to said substrate wherein said conductive layer serves as field plates of said matrix array of air gap capacitors, and a plurality of conductive elements disposed on said substrate in insulated relationship thereto and in spaced relationship to said membrane means for forming the other field plates of the respective air gap capacitors included in said matrix array; means defining in said substrate a plurality of field effect address transistors corresponding to respective air gap capacitors and adapted to electronically address said air gap capacitors upon being rendered conductive, said address transistors including drain regions of the other conductivity type disposed in said semiconductor substrate and being common to all of said address transistors comprising respective lines; line driver circuitry means operably connected to said drain regions of said address transistors; analog delay line means connected to said line driver means for providing input signals to said address transistors; said address transistors having respective gate electrodes defining horizontal lines in said matrix array; and decoder means connected to said gate electrodes of said address transistors.
Claim 37
Dependent Claim
85 words
A line-addressed spatial light modulator structure as set forth in claim 30, wherein said analog delay line means comprises first and second analog delay lines for alternately providing input signals to alternate lines of said address transistors such that even data bits of the input signal are received by one group of said address transistors via said first analog delay line and odd data bits of the input signal are received by the other group of said address transistors via said second analog delay line.
Claim 38
Dependent Claim
132 words
An optical modulator comprising: a semiconductor substrate; an array of charge-storing locations within said semiconductor substrate, each said charge-storing location comprising means for capacitatively storing charge; a grounded flexible membrane supported parallel to and above and spaced apart from said semiconductor substrate, the locations of said charge-storing locations defining pixel locations within said flexible membrane; and an array of address transistors, each connected to a respective of one of said charge-storing locations, said address transistors being selectively addressable to selectively store charge in the corresponding one of said charge-storing locations, each said address transistor comprising a channel region within said substrate which is below and proximate to said corresponding pixel of said flexible membrane, said flexible membrane being entirely continuous above said array of charge-storing locations and said array of address transistors.
Claim 39
Dependent Claim
132 words
An optical modulator comprising: a semiconductor substrate; an array of charge-storing locations within said semiconductor substrate, each said charge-storing location comprising means for capacitatively storing charge; a grounded flexible membrane supported parallel to and above and spaced apart from said semiconductor substrate, the locations of said charge-storing locations defining pixel locations within said flexible membrane; and an array of address transistors, each connected to a respective of one of said charge-storing locations, said address transistors being selectively addressable to selectively store charge in the corresponding one of said charge-storing locations, each said address transistor comprising a channel region within said substrate which is below and proximate to said corresponding pixel of said flexible membrane, said flexible membrane being entirely continuous above said array of charge-storing locations and said array of address transistors.
Claim 40
Dependent Claim
34 words
The modulator of claim 32, further comprising a plurality of respective field plates, one of said field plates being located atop said substrate and beneath said membrane at each of said respective pixel locations.
Claim 41
Dependent Claim
22 words
The modulator of claim 32, 33, wherein said membrane is continuous over said array of pixel locations, and is conductive and grounded.
Claim 42
Dependent Claim
10 words
The modulator of claim 34, wherein said membrane comprises nitrocellulose.
Claim 43
Dependent Claim
30 words
The modulator of claim 35, wherein said membrane further comprises: a first metallization layer, comprising a metal having high reflectivity; and a second layer of metal having a high conductivity.
Claim 44
Dependent Claim
30 words
The modulator of claim 33, wherein the space between said membrane and said field plate is less than the maximum elastic deformation of said membrane above said respective field plate.
Claim 45
Dependent Claim
139 words
An optical modulator comprising: a semiconductor substrate; a plurality of gate lines located on said substrate and protruding above said substrate, each said gate line defining a column of pixel locations; a plurality of conductive row lines within said substrate, each said row line defining a row of pixel locations; a reflective, flexible, and conductive membrane positioned on said gate lines; and a plurality of charge-storing locations located at respective pixel locations at intersections of rows and columns defined by said gate lines and said row lines, each said charge-storing location defining and corresponding to a pixel location of said membrane above said location, each said charge-storing location comprising means for capacitatively storing charge; whereby each said respective charge-storing location is selectively addressable by one of said gate lines and one of said row lines to store charge therein.
Claim 46
Dependent Claim
139 words
An optical modulator comprising: a semiconductor substrate; a plurality of gate lines located on said substrate and protruding above said substrate, each said gate line defining a column of pixel locations; a plurality of conductive row lines within said substrate, each said row line defining a row of pixel locations; a reflective, flexible, and conductive membrane positioned on said gate lines; and a plurality of charge-storing locations located at respective pixel locations at intersections of rows and columns defined by said gate lines and said row lines, each said charge-storing location defining and corresponding to a pixel location of said membrane above said location, each said charge-storing location comprising means for capacitatively storing charge; whereby each said respective charge-storing location is selectively addressable by one of said gate lines and one of said row lines to store charge therein.
Claim 47
Dependent Claim
34 words
The modulator of claim 38, further comprising a plurality of respective field plates, one of said field plates being located atop said substrate and beneath said membrane at each of said respective pixel locations.
Claim 48
Dependent Claim
24 words
The modulator of claim 39, wherein said field plate and said respective gate lines are insulated from said substrate by a gate insulator layer.
Claim 49
Dependent Claim
154 words
An optical modulator, comprising: a semiconductor substrate, having a first conductivity type; a gate insulator on said substrate; a plurality of conductive field plates on said gate insulator, said plurality of field plates defining a matrix of pixel locations; a plurality of row lines, comprising elongated regions of second conductivity type near the surface of said substrate; a plurality of second-conductivity-type charge-storing-locations, respectively located beneath each said field plate, each said charge-storing-location defining a channel region with respect to exactly one adjacent row line, each said charge-storing location comprising means for capacitatively storing charge; a plurality of conductive gate regions, said conductive gate regions being elongated to form column lines orthogonal to said row lines, each said channel region being located beneath a portion of one of said gates; an insulating cap on said gates; and a membrane structure on said insulating cap, said membrane structure being flexible and including reflective and conductive layers.
Claim 50
Dependent Claim
154 words
An optical modulator, comprising: a semiconductor substrate, having a first conductivity type; a gate insulator on said substrate; a plurality of conductive field plates on said gate insulator, said plurality of field plates defining a matrix of pixel locations; a plurality of row lines, comprising elongated regions of second conductivity type near the surface of said substrate; a plurality of second-conductivity-type charge-storing-locations, respectively located beneath each said field plate, each said charge-storing-location defining a channel region with respect to exactly one adjacent row line, each said charge-storing location comprising means for capacitatively storing charge; a plurality of conductive gate regions, said conductive gate regions being elongated to form column lines orthogonal to said row lines, each said channel region being located beneath a portion of one of said gates; an insulating cap on said gates; and a membrane structure on said insulating cap, said membrane structure being flexible and including reflective and conductive layers.
Claim 51
Dependent Claim
24 words
The modulator of claim 38, 39, or 40, wherein said membrane is continuous over said array of pixel locations, and is conductive and grounded.
Claim 52
Dependent Claim
33 words
The modulators of claim 41, 39, or 40, wherein the space between said membrane and said field plate is less than the maximum elastic deformation of said membrane above said respective field plate.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
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| 3.5 Years (Year 4) | 1987-04-10 | 1987-10-10 | 1988-04-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-04-10 | 1991-10-10 | 1992-04-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-04-10 | 1995-10-10 | 1996-04-10 | $7700.00 | Window Closed / Lapsed |