US4236946A — Amorphous magnetic thin films with highly stable …

Claim 1

Independent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Qersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c , and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 1000 megahertz.

Claim 2

Dependent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Qersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c , and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 1000 megahertz.

Claim 3

Dependent Claim 20 words

A film in accordance with claim 1 wherein said amorphous film includes at least about 16 atomic percent of B.

Claim 4

Dependent Claim 51 words

A film in accordance with claim 2 wherein said amorphous film includes a binary alloy of Fe and B having an anisotropy field H k greater than about 3 Oersteds with its direction in the plane of the film and a coercive field H c substantially less than about 0.5 Oersted.

Claim 5

Dependent Claim 28 words

A film in accordance with claim 3 wherein said anisotropy field is above about 1 Oe. and said coercive field is small and less than about 1 Oe.

Claim 6

Dependent Claim 46 words

A film in accordance with claim 2 wherein said film comprises an alloy of Fe and B of substantially 17 atomic percent B and the maximum annealing temperature is on the order of 350° C. and less than 400° C. for consecutive annealing at increasing temperatures.

Claim 7

Dependent Claim 45 words

A film in accordance with claim 2 wherein said film comprises an alloy of Fe and B of substantially 21-32 atomic percent B and the annealing temperature is a maximum of about 400° C. and less than 450° C. for consecutive annealing at increasing temperatures.

Claim 8

Dependent Claim 40 words

A film in accordance with claim 2 wherein said film comprises an alloy of Fe and B in the range of 37 atomic percent B and the maximum annealing temperature is about 450° C. for consecutive annealing at increasing temperatures.

Claim 9

Dependent Claim 155 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, with between about 26 and 42 atomic percent Si, and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh,, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 10

Dependent Claim 155 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, with between about 26 and 42 atomic percent Si, and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh,, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 11

Dependent Claim 50 words

A film in accordance with claim 8 wherein said amorphous film includes a binary alloy of Fe and Si having an anisotropy field H k greater than about one Oersteds with its direction in the plane of the film and a coercive field H c less than about one Oersted.

Claim 12

Dependent Claim 28 words

A film in accordance with claim 9 wherein said anisotropy field is above about 2 Oe. and said coercive field is small and less than about 0.5 Oe.

Claim 13

Dependent Claim 65 words

A film in accordance with claim 10 wherein said film comprises on the order of 28 atomic percent Si annealed for a relatively short time for a temperature in the range from 225° C. to 275° C. provided by consecutive annealing in increments with H c less than or equal to about 0.2 Oe and H k greater than or equal to about 4 Oe.

Claim 14

Dependent Claim 46 words

A film in accordance with claim 10 wherein said film comprises on the order of 33 atomic percent of Si annealed for about one hour at a temperature in the range of 200°-225° C., and the equivalent time and temperature in accordance with the Arrhenius relationship.

Claim 15

Dependent Claim 41 words

A film in accordance with claim 10 wherein said film comprises on the order of 36 atomic percent of Si annealed for about one-half hour at about 200° C. and the equivalent time and temperature in accordance with the Arrhenius relationship.

Claim 16

Dependent Claim 147 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Co, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 17

Dependent Claim 147 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Co, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 18

Dependent Claim 20 words

A film in accordance with claim 14 wherein said amorphous film includes at least about 14 atomic percent of B.

Claim 19

Dependent Claim 56 words

A film in accordance with claim 15 wherein said amorphous film comprises an alloy of Co-Fe and B comprising substantially all of the constituents of the alloy having an anisotropy field H k with its direction in the plane of the film greater than 2 Oersteds and a coercive field H c less than one Oersted.

Claim 20

Dependent Claim 28 words

A film in accordance with claim 16 wherein said anisotropy field is above about 10 Oe. and said coercive field is small and less than about 0.5 Oe.

Claim 21

Dependent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Co, Fe, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 22

Dependent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Co, Fe, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 23

Dependent Claim 57 words

A film in accordance with claim 18 wherein said amorphous film includes at least about 74 atomic percent of Co, about 5% of Fe, and about 14% of B annealed from 1 hour at 325° C. and at temperatures and times comprising the equivalent in accordance with the Arrhenius relationship up to 16 hours at 250° C.

Claim 24

Dependent Claim 51 words

A film in accordance with claim 18 wherein said amorphous film includes a ternary alloy of Co-Fe and B having an anisotropy field H k above about 10 Oersteds with its direction in the plane of the film and a coercive field H c less then or equal to one Oersted.

Claim 25

Dependent Claim 28 words

A film in accordance with claim 20 wherein said anisotropy field is above about 1 Oe. and said coercive field is small and less than about 1 Oe.

Claim 26

Dependent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, Si, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 27

Dependent Claim 148 words

A sputtered thin film of noncrystalline amorphous magnetic material consisting of Fe, Si, B and from zero to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al, said thin film having been annealed in an external magnetic field below the Curie Temperature and the crystallization temperature to stabilize the magnetic easy axis, said thin film possessing a low H c of about one Oersted and below for domains with magnetization in the plane, having a well defined easy axis in that the value of H k exceeds the value of H c and said stabilized magnetic easy axis remaining unchanged in direction in the absence of heating above the Curie point with a high permeability of above 1000 from DC to high frequencies on the order of 100 megahertz.

Claim 28

Dependent Claim 34 words

A film in accordance with claim 22 wherein said amorphous film includes at least about 5 to 17 atomic percent of Si and a ratio of about 3 Fe atoms per atom of B.

Claim 29

Dependent Claim 49 words

A film in accordance with claim 22 wherein said amorphous film includes a ternary alloy of Fe, Si and B having an anisotropy field H k with its direction in the plane of the film greater than 1 Oersted and a coercive field H c less than 1 Oersted.

Claim 30

Dependent Claim 28 words

A film in accordance with claim 24 wherein said anisotropy field is above about 5 Oe. and said coercive field is small and less than about 0.3 Oe.

Claim 31

Dependent Claim 16 words

A film in accordance with claim 18 wherein said film includes a small percentage of Mo.

Claim 32

Dependent Claim 16 words

A film in accordance with claim 1 wherein said film includes a small percentage of Cr.

Claim 33

Dependent Claim 37 words

A film in accordance with claim 20 wherein said film has been annealed at about 250° C. for several hours up to on the order of 15 hours and more to produce a relative permeability above 4,000.

Claim 34

Dependent Claim 21 words

A film in accordance with claim 28 wherein said annealing time and temperature are varied in accordance with the Arrhenius relationship.

Claim 35

Independent Claim 141 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing upon a surface of an object a thin film of an amorphous alloy consisting essentially of the composition represented by X Y where X is at least one element selected from the group consisting of Fe, Co and Ni and Y is at least one element selected from the group consisting of Si and B, and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 36

Independent Claim 141 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing upon a surface of an object a thin film of an amorphous alloy consisting essentially of the composition represented by X Y where X is at least one element selected from the group consisting of Fe, Co and Ni and Y is at least one element selected from the group consisting of Si and B, and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 37

Independent Claim 123 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and substantially 17 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy and the maximum annealing temperature is on the order of 350° C. and less than 400° C. for consecutive annealing to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 38

Independent Claim 123 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and substantially 17 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy and the maximum annealing temperature is on the order of 350° C. and less than 400° C. for consecutive annealing to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 39

Independent Claim 125 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and substantially 21-32 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy and the annealing temperature is a maximum of about 400° C. and less than 450° C. for consecutive annealing at increasing temperatures to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 40

Independent Claim 125 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and substantially 21-32 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy and the annealing temperature is a maximum of about 400° C. and less than 450° C. for consecutive annealing at increasing temperatures to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 41

Independent Claim 122 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and and in the range of 37 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy where the maximum annealing temperature is about 450° C. for consecutive annealing at increasing temperatures to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 42

Independent Claim 122 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and and in the range of 37 atomic percent B and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy where the maximum annealing temperature is about 450° C. for consecutive annealing at increasing temperatures to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 43

Independent Claim 127 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and on the order of 28 atomic percent Si annealed for a relatively short time and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature in the range from 225° C. to 275° C. provided by consecutive annealing in increments below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 44

Independent Claim 127 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and on the order of 28 atomic percent Si annealed for a relatively short time and then annealing said thin film in an atmosphere of an inert gas and in an external magnetic field at a temperature in the range from 225° C. to 275° C. provided by consecutive annealing in increments below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 45

Independent Claim 115 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and on the order of 33 atomic percent of Si said thin film annealed for about one hour in an atmosphere of an inert gas and in an external magnetic field at a temperature in the range of 200°-225° C. below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 46

Independent Claim 115 words

A method of making amorphous magnetic thin films with a highly stable easy axis comprising depositing a thin film of an amorphous alloy consisting essentially of Fe and on the order of 33 atomic percent of Si said thin film annealed for about one hour in an atmosphere of an inert gas and in an external magnetic field at a temperature in the range of 200°-225° C. below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 47

Dependent Claim 117 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of Fe and on the order of 36 atomic percent of Si, said thin film annealed for about one-half hour at about 200° C. and the equivalent time and temperature in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 48

Dependent Claim 117 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of Fe and on the order of 36 atomic percent of Si, said thin film annealed for about one-half hour at about 200° C. and the equivalent time and temperature in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 49

Dependent Claim 120 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of at least about 74 atomic percent of Co, about 5% of Fe, and about 14% of B said thin film annealed from 1 hour at 250° C. and at temperatures and times comprising the equivalent in an atmosphere of an inert gas and in an external magnetic field below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 50

Dependent Claim 120 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of at least about 74 atomic percent of Co, about 5% of Fe, and about 14% of B said thin film annealed from 1 hour at 250° C. and at temperatures and times comprising the equivalent in an atmosphere of an inert gas and in an external magnetic field below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 51

Dependent Claim 119 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of Fe, B, and at least about 5 to 17 atomic percent of Si with a ratio of about 3 Fe atoms per atom of B and then said thin film annealed in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 52

Dependent Claim 119 words

An amorphous magnetic thin film with a highly stable easy axis fabricated by sputtering a thin film of an amorphous alloy consisting essentially of Fe, B, and at least about 5 to 17 atomic percent of Si with a ratio of about 3 Fe atoms per atom of B and then said thin film annealed in an atmosphere of an inert gas and in an external magnetic field at a temperature below the Curie temperature and below the crystallization temperature for said alloy to stabilize the magnetic easy axis of said film for a period of time in excess of one hour sufficient to provide substantially increased stabilization of the magnetic anisotropy direction in the plane of the film.

Claim 53

Dependent Claim 16 words

A method in accordance with claim 37 wherein said film includes a small percentage of Mo.

Claim 54

Dependent Claim 16 words

A method in accordance with claim 30 wherein said film includes a small percentage of Cr.

Claim 55

Dependent Claim 28 words

A method in accordance with claim 37 wherein said film has been annealed at about 250° C. for several hours up to on the order of 15 hours.

Claim 56

Dependent Claim 41 words

A method in accordance with claim 30 wherein said alloy includes up to ten percent of a transition metal selected from the group consisting of Cr, Mo, V, Ti, Cu, Pd, Pt, Re, Ru, Ta, Zr, Hf, Rh, Y, and Al.

Claim 57

Dependent Claim 25 words

A method in accordance with claim 30, 31, 32, 33, 34 or 35 wherein said depositing step is performed by sputtering in a vacuum chamber.

Claim 58

Dependent Claim 34 words

A method in accordance with claim 30, 31, 32, 33, 34 or 35 wherein said depositing step is performed by sputtering in a vacuum chamber, and said annealing is performed in an evacuated chamber.

Claim 59

Dependent Claim 34 words

A method in accordance with claim 30, 31, 32, 33, 34 or 35 wherein a step of pre-annealing stabilization is employed by heating a film in an external magnetic field for easy axis stabilization.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	1983-12-02	1984-06-02	1984-12-02	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	1987-12-02	1988-06-02	1988-12-02	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	1991-12-02	1992-06-02	1992-12-02	$7700.00	Window Closed / Lapsed

Amorphous magnetic thin films with highly stable easy axis

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