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Patent US4173522A successfully refreshed from Google Patents.
US4173522A
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Method and apparatus for producing carbon coatings by sputtering
Assignee: Balzers Patent und Beteiligungs AG
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Filing: 1977-09-07
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Granted: 1979-11-06
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Expires: 1997-09-07
Abstract
Abstract A method for producing carbon coatings by sputtering comprises placing the target material to be sputtered which is made of a fibrous carbon material such as paper, velvet, wood, etc. which has been charred on the cathode. The apparatus comprises an electrode forming an anode which is arranged in spaced relationship to a cathode.
Inventors
- 👤 Hans K. Pulker
- 👤 Reinhard Staffler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 08:07
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/0605; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
57 words
A method of forming a carbon coating on a substrate comprising placing a fibrous carbon material having a density of less than 2 grams per cubic centimeter on an electrode forming a cathode which is spaced away from an electrode forming an anode and energizing the electrodes to deposit the carbon material on the substrate by sputtering.
Claim 2
Independent Claim
57 words
A method of forming a carbon coating on a substrate comprising placing a fibrous carbon material having a density of less than 2 grams per cubic centimeter on an electrode forming a cathode which is spaced away from an electrode forming an anode and energizing the electrodes to deposit the carbon material on the substrate by sputtering.
References Cited (Backward Citations)
US3813282A
Cited
US3846294A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1982-11-05 | 1983-05-07 | 1983-11-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1986-11-05 | 1987-05-07 | 1987-11-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1990-11-05 | 1991-05-07 | 1991-11-06 | $7700.00 | Window Closed / Lapsed |