Patent DE4005743A1 successfully refreshed from Google Patents.
Patent DE3302567A1 successfully refreshed from Google Patents.
US3918396A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Container for the production of semiconductor bodies
Assignee: Siemens AG
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Filing: 1974-03-04
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Granted: 1975-11-11
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Expires: 1994-03-04
Abstract
Abstract Semiconductor material, in particular silicon, is deposited onto heated carrier members from gaseous semiconductor compounds within a chamber formed by a glass or quartz dome and a base member. Breakage of the dome is avoided by a pressure chamber surrounding the glass dome.
Inventors
- 👤 Wolfgang Dietze
- 👤 Herbert Sandmann
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 04:06
CPC Classifications
B; B01; B01J; B01J3/00; B01J3/004; C; C01; C01B; C01B33/00; C01B33/02; C01B33/021; C01B33/027; C01B33/035; C23; C23C; C23C16/00; C23C16/22
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
113 words
An apparatus for the deposition of semiconductor material from a gaseous compound onto a workpiece, comprising a base plate having means to support at least one workpiece thereon, including means to heat the workpiece, a dome covering a portion of said base plate and the means supporting the workpiece, an outer container mounted on said base plate and enclosing said dome to define a closed pressure chamber therewith, gas inlet means connected to said outer container for introducing a gas under pressure into said pressure chamber defined by said dome and outer container, whereby when gas under pressure is introduced into said pressure chamber said dome is positively sealed onto said base plate.
Claim 2
Independent Claim
113 words
An apparatus for the deposition of semiconductor material from a gaseous compound onto a workpiece, comprising a base plate having means to support at least one workpiece thereon, including means to heat the workpiece, a dome covering a portion of said base plate and the means supporting the workpiece, an outer container mounted on said base plate and enclosing said dome to define a closed pressure chamber therewith, gas inlet means connected to said outer container for introducing a gas under pressure into said pressure chamber defined by said dome and outer container, whereby when gas under pressure is introduced into said pressure chamber said dome is positively sealed onto said base plate.
Claim 3
Dependent Claim
27 words
An apparatus in accordance with claim 1 wherein said pressure-gas container serves as a safety feature capturing escaping reaction compound gas in the case of a leak.
Claim 4
Dependent Claim
17 words
An apparatus in accordance with claim 1 wherein an inert gas is introduced into said pressure-gas container.
Claim 5
Dependent Claim
15 words
An apparatus in accordance with claim 1 wherein nitrogen is introduced into said pressure-gas container.
Claim 6
Dependent Claim
27 words
An apparatus in accordance with claim 1 wherein a layer of sealing grease is placed between said dome and said base plate to form a gas-tight connection.
Claim 7
Dependent Claim
27 words
An apparatus in accordance with claim 1 wherein a resilient temperature resisTant material is placed between said dome and said base plate to form a gas-tight connection.
References Cited (Backward Citations)
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Cited
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US3293074A
Cited
US3391270A
Cited
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Cited
US3705567A
Cited
US3690290A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-11-10 | 1979-05-12 | 1979-11-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-11-10 | 1983-05-12 | 1983-11-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-11-10 | 1987-05-12 | 1987-11-11 | $7700.00 | Window Closed / Lapsed |