US3705567A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for indiffussing dopants into semiconductor wafers
Assignee: Siemens AG
•
Filing: 1971-01-22
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Granted: 1972-12-12
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Expires: 1991-01-22
Abstract
Abstract A silicon ampule is provided at its open end with a planar ground section, to which is pressed with the aid of a vacuum pump, a quartz tube provided with a planar ground section. Porosity caused through various thermal expansion coefficients, or thermal stresses does not occur, therefor. The silicon tube is carried only by the quartz tube and does not contact with any other material. To prevent the possible penetration of foreign substances, the planar ground section is rinsed from the outside with a protective gas. According to another embodiment, a lid provided with a planar ground section is placed upon the vertically positioned tube, after the tube was rinsed with protective gas.
Inventors
- 👤 Reimer Emels
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 15:07
CPC Classifications
C; C30; C30B; C30B31/00; C30B31/06; C30B31/10; Y; Y10; Y10S; Y10S118/00; Y10S118/90
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
21 words
The device of claim 1, wherein the tube is of silicon and the suction tube is of quartz or aluminum oxide.
Claim 2
Dependent Claim
37 words
The device of claim 2, having means whereby the ground sections and the suction tube are at lower temperature than that portion of the tube where the semiconductor wafers are located when the device is in operation.
Claim 3
Dependent Claim
24 words
The device of claim 3, wherein at least that portion of the tube wherein the semiconductor wafers are located is situated within a furnace.
Claim 4
Dependent Claim
11 words
The device of claim 4, whereby the tube is positioned perpendicularly.
Claim 5
Dependent Claim
22 words
The device of claim 5, wherein at least the ground sections are enclosed by another tube through which a protective gas flows.
Claim 6
Dependent Claim
34 words
The device of claim 6, wherein a sealing disc is provided in the tube on the side facing the suction means, said sealing disc acting as a throttle for a dopant, when in operation.
References Cited (Backward Citations)
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Cited
US3367303A
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US3293074A
Cited
US3486933A
Cited
US3472684A
Cited
US3394390A
Cited
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Cited
US3492969A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1975-12-12 | 1976-06-12 | 1976-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1979-12-12 | 1980-06-12 | 1980-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1983-12-12 | 1984-06-12 | 1984-12-12 | $7700.00 | Window Closed / Lapsed |