Patent US3886896A successfully refreshed from Google Patents.
US3886896A
Expired / Lapsed
US
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Device for plasma depositing of thin layers onto substrates
Assignee: Alcatel CIT SA
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Filing: 1974-07-09
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Granted: 1975-06-03
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Expires: 1994-07-09
Abstract
Abstract Improved device for depositing under vacuum thin layers onto substrates comprising a vacuum container and a cylindrical hollow body lined on its inside with the substance to be deposited. A high-frequency electromagnetic field is concentrated inside said hollow body by two conductive cylinders connected to a highfrequency exciting means, promoting a plasma inside said hollow body in presence of an injected gas at a predetermined low pressure.
Inventors
- 👤 Cakenberghe Jean Van
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 12:35
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/228; C23C14/24; C23C14/32; C23C14/34; C23C14/56; C23C14/562
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
183 words
Device for vapor depositing a thin layer under vacuum onto a substrate, comprising: a chamber kept under vacuum, limited by an insulating wall, one part of which is cylindrical; means supporting at least one substrate in an upper section of said chamber; a cylindrical hollow body arranged axially in the cylindrical part of the chamber, lined on its inside with the substance to be deposited, connected to a source of gas arriving in the hollow body at a predetermined pressure and in alignment with said at least one substrate; an induction coil placed on the outside of the chamber, arranged round the cylindrical part of the chamber, in the vicinity of the latter, at the height of the hollow body and connected to a high-frequency voltage source whereby to generate a plasma to evaporate said substance; means for concentrating the electromagnetic field inside the hollow body formed by two concentric conductive cylinders (14 and 15) electrically connected together, constituting the secondary winding of an impedance transformer whose primary winding is formed by the induction coil; and means to cool said cylindrical hollow body.
Claim 2
Dependent Claim
183 words
Device for vapor depositing a thin layer under vacuum onto a substrate, comprising: a chamber kept under vacuum, limited by an insulating wall, one part of which is cylindrical; means supporting at least one substrate in an upper section of said chamber; a cylindrical hollow body arranged axially in the cylindrical part of the chamber, lined on its inside with the substance to be deposited, connected to a source of gas arriving in the hollow body at a predetermined pressure and in alignment with said at least one substrate; an induction coil placed on the outside of the chamber, arranged round the cylindrical part of the chamber, in the vicinity of the latter, at the height of the hollow body and connected to a high-frequency voltage source whereby to generate a plasma to evaporate said substance; means for concentrating the electromagnetic field inside the hollow body formed by two concentric conductive cylinders (14 and 15) electrically connected together, constituting the secondary winding of an impedance transformer whose primary winding is formed by the induction coil; and means to cool said cylindrical hollow body.
Claim 3
Dependent Claim
183 words
Device for vapor depositing a thin layer under vacuum onto a substrate, comprising: a chamber kept under vacuum, limited by an insulating wall, one part of which is cylindrical; means supporting at least one substrate in an upper section of said chamber; a cylindrical hollow body arranged axially in the cylindrical part of the chamber, lined on its inside with the substance to be deposited, connected to a source of gas arriving in the hollow body at a predetermined pressure and in alignment with said at least one substrate; an induction coil placed on the outside of the chamber, arranged round the cylindrical part of the chamber, in the vicinity of the latter, at the height of the hollow body and connected to a high-frequency voltage source whereby to generate a plasma to evaporate said substance; means for concentrating the electromagnetic field inside the hollow body formed by two concentric conductive cylinders (14 and 15) electrically connected together, constituting the secondary winding of an impedance transformer whose primary winding is formed by the induction coil; and means to cool said cylindrical hollow body.
Claim 4
Dependent Claim
183 words
Device for vapor depositing a thin layer under vacuum onto a substrate, comprising: a chamber kept under vacuum, limited by an insulating wall, one part of which is cylindrical; means supporting at least one substrate in an upper section of said chamber; a cylindrical hollow body arranged axially in the cylindrical part of the chamber, lined on its inside with the substance to be deposited, connected to a source of gas arriving in the hollow body at a predetermined pressure and in alignment with said at least one substrate; an induction coil placed on the outside of the chamber, arranged round the cylindrical part of the chamber, in the vicinity of the latter, at the height of the hollow body and connected to a high-frequency voltage source whereby to generate a plasma to evaporate said substance; means for concentrating the electromagnetic field inside the hollow body formed by two concentric conductive cylinders (14 and 15) electrically connected together, constituting the secondary winding of an impedance transformer whose primary winding is formed by the induction coil; and means to cool said cylindrical hollow body.
Claim 5
Dependent Claim
46 words
Device according to claim 1, wherein the two concentric cylinders are split by a radial half-plane (17), the homologous lips being connected together by portions of conductive radial planes (23 and 24) so that the two concentric conductive cylinders (14 and 15) constitute a single circuit.
Claim 6
Dependent Claim
47 words
Device according to claim 2, one of the concentric conductive cylinders (14) being arranged in the immediate vicinity of the wall of the cylindrical hollow body (6) and the second conductive cylinder (15) being placed in the vicinity of the wall 1 of the vacuum chamber (13).
Claim 7
Dependent Claim
27 words
Device according to claim 3, wherein the concentric conductive cylinder (14) placed in the vicinity of the cylindrical hollow body is cooled by a water pipe (16).
Claim 8
Dependent Claim
36 words
Device according to claim 4, wherein the electromagnetic field concentration means additionally comprises a conductive cylinder (26) arranged in vicinity of the wall (1) of the chamber (13), inside the latter, below the hollow body (6).
Claim 9
Dependent Claim
32 words
Device according to claim 5, wherein the concentration means additionally comprises a conductive cylinder (27) arranged in the vicinity of the wall (1) of the chamber (13) above the hollow body (6).
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1978-06-02 | 1978-12-02 | 1979-06-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1982-06-02 | 1982-12-02 | 1983-06-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1986-06-02 | 1986-12-02 | 1987-06-03 | $7700.00 | Window Closed / Lapsed |