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US3749658A
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US
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Method of fabricating transparent conductors
Assignee: RCA Corp
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Filing: 1972-03-29
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Granted: 1973-07-31
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Expires: 1992-03-29
Abstract
Abstract A SPUTTERING TARGET OF 80 MOLE PERCENT INDIUM OXIDE AND 20 MOLE PERCENT TIN OXIDE IS RADIO-FREQUENCY SPUTTER DEPOSITED ON A SUBSTRATE IN AN INERT GAS ATMOSPHERE TO PROVIDE A HIGH CONDUCTIVITY, ANION DEFICIENT, TIN DOPED IN2O3 FILM. THE FILM IS THEN HEATED IN AN OXYGEN ATMOSPHERE FOR A PERIOD OF TIME SUFFICIENT TO FORM A STOICHIOMETRIC, ANION-FULL, OXIDE LAYER ON THE SURFACE OF THE FILM, WHERE THE THICKNESS OF THE OXIDE LAYER IS SELF-LIMITING WITH TEMPERATURE SO THAT THE REMAINDER OF THE ANION DEFICIENT, HIGH CONDUCTIVITY FILM UNDER THE OXIDE LAYER IS NOT OXIDIZED WITH FURTHER OPERATION OF THE FILM IN AN OXIDIZING ATMOSPHERE AT ALL LOWER TEMPERATURES.
Inventors
- 👤 J Vossen
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 10:15
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/08; C23C14/086; C23C14/58; C23C14/5806; C23C14/5846; C23C14/5853; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1343; G02F1/13439; H; H01; H01B; H01B1/00; C03; C03C; C03C2217/00; C03C2217/20; C03C2217/21; C03C2217/215; C03C2217/23; C03C2217/231; C03C2217/24; C03C2217/244; C03C2218/00; C03C2218/10; C03C2218/15; C03C2218/154; C03C2218/30; C03C2218/32; C03C2218/322
Claims Analysis
Total Claims: 0
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References Cited (Backward Citations)
No citation records indexed.
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-07-30 | 1977-01-29 | 1977-07-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-07-30 | 1981-01-29 | 1981-07-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-07-30 | 1985-01-29 | 1985-07-31 | $7700.00 | Window Closed / Lapsed |