US3739315A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor transducers having h shaped cross-sectional configurations
Assignee: Kulite Semiconductor Products Inc
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Filing: 1972-05-18
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Granted: 1973-06-12
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Expires: 1992-05-18
Abstract
Abstract There is disclosed a piezoresistive transducer assembly having a thin force collecting diaphragm interposed between two annular rims to afford a H shaped cross-sectional configuration to the assembly for providing mechanical stability and temperature compensation.
Inventors
- 👤 C Gravel
- 👤 A Kurtz
- 👤 J Mallon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-22 19:37
CPC Classifications
H; H03; H03H; H03H9/00; H03H9/02; H03H9/125
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
192 words
An electromechanical transducer for responding to the magnitude of an applied force comprising, a. a first annular shaped member fabricated from an integral piece of silicon and having a central hollow and a closed bottom surface, said bottom surface being relatively thin and surrounded by a thicker side surface, said member having a U shaped cross-section, said bottom surface defining a force collecting diaphragm and having deposited thereon at least one piezoresistive element, said element being deposited on the side of said bottom surface not surrounded by said thicker side surface but within the area defined by said central hollow, b. a annular ring fabricated from silicon and having a continuous central aperture approximately congruent with said bottom surface of said first member as enclosed by said thicker side surface, c. means for coupling said second annular ring to said first member with the thickness of said sides of said second annular ring underlying the side of said first annular member, to form an H shaped cross-sectional composite member, with said force collector diaphragm positioned as the center arm of said H, and said piezoresistive element surrounded by said second annular ring.
Claim 2
Dependent Claim
192 words
An electromechanical transducer for responding to the magnitude of an applied force comprising, a. a first annular shaped member fabricated from an integral piece of silicon and having a central hollow and a closed bottom surface, said bottom surface being relatively thin and surrounded by a thicker side surface, said member having a U shaped cross-section, said bottom surface defining a force collecting diaphragm and having deposited thereon at least one piezoresistive element, said element being deposited on the side of said bottom surface not surrounded by said thicker side surface but within the area defined by said central hollow, b. a annular ring fabricated from silicon and having a continuous central aperture approximately congruent with said bottom surface of said first member as enclosed by said thicker side surface, c. means for coupling said second annular ring to said first member with the thickness of said sides of said second annular ring underlying the side of said first annular member, to form an H shaped cross-sectional composite member, with said force collector diaphragm positioned as the center arm of said H, and said piezoresistive element surrounded by said second annular ring.
Claim 3
Dependent Claim
108 words
An electromechanical transducer comprising, a. a cup shaped member fabricated from an integral piece of silicon and having a thin bottom area, defining a force collecting diaphragm and having located on said bottom surface at least one piezoresistive element, said cup member having a continuous thicker side section surrounding the bottom surface opposite to that portion containing said element, b. an annular ring having a central continuous aperture of a diameter approximately equal to the diameter of said bottom area, said ring fabricated from the same material as said cup and secured thereto, to surround said piezoresistive element, thereby forming a composite transducer having an H shaped cross-section.
Claim 4
Dependent Claim
108 words
An electromechanical transducer comprising, a. a cup shaped member fabricated from an integral piece of silicon and having a thin bottom area, defining a force collecting diaphragm and having located on said bottom surface at least one piezoresistive element, said cup member having a continuous thicker side section surrounding the bottom surface opposite to that portion containing said element, b. an annular ring having a central continuous aperture of a diameter approximately equal to the diameter of said bottom area, said ring fabricated from the same material as said cup and secured thereto, to surround said piezoresistive element, thereby forming a composite transducer having an H shaped cross-section.
Claim 5
Dependent Claim
53 words
The transducer assembly according to claim 2 further comprising, a. a longitudinal tubular housing member having at least one wire accommodating slot in a side surface thereof, b. means for coupling said annular ring to the top of said housing member with said central aperture communicating with the aperture of said tubular member.
Claim 6
Dependent Claim
35 words
The apparatus according to claim 3, further including, a. at least one conductor coupled to said force responsive element and directed from said bottom surface and located within said wire accommodating slot in said housing.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-06-11 | 1976-12-11 | 1977-06-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-06-11 | 1980-12-11 | 1981-06-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-06-11 | 1984-12-11 | 1985-06-12 | $7700.00 | Window Closed / Lapsed |