Patent US3734620A successfully refreshed from Google Patents.
US3734620A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Multiple band atomic absorption apparatus for simultaneously measuring different physical parameters of a material
Assignee: International Business Machines Corp
•
Filing: 1971-04-01
•
Granted: 1973-05-22
•
Expires: 1991-04-01
Abstract
Abstract An apparatus for measuring certain properties of a material; such as, temperature and density, by monitoring the atomic absorption of two absorbable spectral lines of the material. The apparatus is based on a complete instrumental system composed of an apparatus for producing an atomic vapor; e.g., a sputtering apparatus, an emitter system capable of producing frequencies absorbable by the atomic vapor; e.g., a light source parallel systems of spectral selection, e.g., optical filters, parallel systems for converting optical information into electrical signals; e.g. photo-electric transducers; and, finally a measurement system which displays the electrical signals, from the parallel transducers, in terms of density and temperatuer of the atomic vapor or in terms of the rate of deposition of material on a work piece in the sputtering apparatus. The apparatus, in conjunction with an emission spectrometer, can also be used to determine the composition of an atomic vapor.
Inventors
- 👤 P Cade
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 19:56
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/54; C23C14/542; C23C14/544; G; G01; G01K; G01K1/00; G01N; G01N21/00; G01N21/17; G01N21/25; G01N21/31; G01N21/3103
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
81 words
An apparatus for simultaneously measuring different physical parameters of particles in a vapor state comprising means for producing first and second frequency bands of radiant energy, both bands being partially absorbable by each of said particles, means for directing the produced bands through said vapor, means for measuring the total amount of absorption of each band by ssaid particles, and means for converting the measured amount of absorption of said first and second bands into selected physical parameters of the particles.
Claim 2
Independent Claim
81 words
An apparatus for simultaneously measuring different physical parameters of particles in a vapor state comprising means for producing first and second frequency bands of radiant energy, both bands being partially absorbable by each of said particles, means for directing the produced bands through said vapor, means for measuring the total amount of absorption of each band by ssaid particles, and means for converting the measured amount of absorption of said first and second bands into selected physical parameters of the particles.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1 additionally comprising means for utilizing the converted measured amounts of absorption to control the state of the particle.
Claim 4
Independent Claim
165 words
An apparatus for controlling the thickness of a material deposited on a substrate from an atomic vapor by monitoring the atomic line-width modulation of first and second absorbable spectral lines of a vapor of the material comprising, means for producing a vapor of the material, a source emitting a beam of light containing at least said two lines, means for directing the beam of light through the vapor, means for detecting the light beam after it has passed through the vapor, means for converting said first and second lines of said detected light beam into first and second electrical signals, means for translating said first and second electrical signals into a third electrical signal indicative of the temperature of the vapor and into a fourth electrical signal indicative of the density of the vapor, and feedback means, coupling said third and fourth signal from said translating means to said vapor producing means, for controlling the amount of material deposited from the vapor onto the substrate.
Claim 5
Independent Claim
165 words
An apparatus for controlling the thickness of a material deposited on a substrate from an atomic vapor by monitoring the atomic line-width modulation of first and second absorbable spectral lines of a vapor of the material comprising, means for producing a vapor of the material, a source emitting a beam of light containing at least said two lines, means for directing the beam of light through the vapor, means for detecting the light beam after it has passed through the vapor, means for converting said first and second lines of said detected light beam into first and second electrical signals, means for translating said first and second electrical signals into a third electrical signal indicative of the temperature of the vapor and into a fourth electrical signal indicative of the density of the vapor, and feedback means, coupling said third and fourth signal from said translating means to said vapor producing means, for controlling the amount of material deposited from the vapor onto the substrate.
Claim 6
Independent Claim
124 words
An apparatus for measuring the temperature and density of a material by monitoring the atomic line-width modulation of two absorbable spectral lines of the material comprising, a system containing a known material, a source emitting a beam of light containing at least two wave lengths absorbable by the atoms of the material to be measured, means for passing the beam through the material, means for converting the amount of absorption of each of said two wave lengths into a first and into a second electrical signal, a non-linear amplifier-comparator responsive to said signals coupled to said converting means for operating on said first and second signals to translate said signals into third and fourth signals indicative of the temperature and density of the material.
Claim 7
Independent Claim
124 words
An apparatus for measuring the temperature and density of a material by monitoring the atomic line-width modulation of two absorbable spectral lines of the material comprising, a system containing a known material, a source emitting a beam of light containing at least two wave lengths absorbable by the atoms of the material to be measured, means for passing the beam through the material, means for converting the amount of absorption of each of said two wave lengths into a first and into a second electrical signal, a non-linear amplifier-comparator responsive to said signals coupled to said converting means for operating on said first and second signals to translate said signals into third and fourth signals indicative of the temperature and density of the material.
Claim 8
Independent Claim
183 words
An apparatus for measuring the temperature and density of a material by monitoring the atomic line-width modulation of two absorbable spectral lines of the material comprising, a system containing a known material to be measured, a source of light emitting a beam of modulated light containing at least two wave lengths partially absorbable by the atoms of the material to be measured, means for directing the beam of light through the material, means for resolving the light beam after it has passed through the material into its respective wave lengths, means for analyzing each wave length of the resolved light, means for converting each analyzed wave length into a modulated electrical signal, having the same rate of modulation as tthe light, means for demodulating each electrical signal, and means for amplifyng each demodulated electrical signal and feeding each amplified signal to a non-linear amplifier-comparator, said comparator operating on each of said signals to combine said signals and convert said signals into one output signal which defines the temperature of the material and into another output signal which defines the density of the material.
Claim 9
Independent Claim
183 words
An apparatus for measuring the temperature and density of a material by monitoring the atomic line-width modulation of two absorbable spectral lines of the material comprising, a system containing a known material to be measured, a source of light emitting a beam of modulated light containing at least two wave lengths partially absorbable by the atoms of the material to be measured, means for directing the beam of light through the material, means for resolving the light beam after it has passed through the material into its respective wave lengths, means for analyzing each wave length of the resolved light, means for converting each analyzed wave length into a modulated electrical signal, having the same rate of modulation as tthe light, means for demodulating each electrical signal, and means for amplifyng each demodulated electrical signal and feeding each amplified signal to a non-linear amplifier-comparator, said comparator operating on each of said signals to combine said signals and convert said signals into one output signal which defines the temperature of the material and into another output signal which defines the density of the material.
Claim 10
Independent Claim
93 words
A system for determining temperature and density of a fluid material having first and second light waves absorbable by said material comprising, means for producing said fluid material, means for passing said first and second light wave through said material, means for determining the amount of said first and second light waves absorbed by said material, means for producing first and second electrical signals indicative of said absorbed first and second light waves, and means responsive to said first and second electrical signals for deriving the temperature and density of said fluid material.
Claim 11
Independent Claim
93 words
A system for determining temperature and density of a fluid material having first and second light waves absorbable by said material comprising, means for producing said fluid material, means for passing said first and second light wave through said material, means for determining the amount of said first and second light waves absorbed by said material, means for producing first and second electrical signals indicative of said absorbed first and second light waves, and means responsive to said first and second electrical signals for deriving the temperature and density of said fluid material.
Claim 12
Dependent Claim
115 words
A system as set forth in claim 6 wherein said first and second electrical signals responsive means include a first electrical channel, responsive to said first signal, having an output, a second channel, responsive to said second signal, having an output, a summing circuit for comparing the Outputs of said first and second channels, a reference source coupled to the first channel, the second channel and the summing circuit to equalize the outputs of the channels, means connected to the output of one of the channels to derive a measurement of the density of the material, means connected to the output of the reference source to derive a measurement of the temperature of the material.
Claim 13
Dependent Claim
73 words
A system as set forth in claim 7 wherein said first and second channel means each comprises a first summing circuit having an output equal to the amount of absorbed light, a second summing circuit having an output proportional to the density and to the temperature of said fluid material, a logarithmic amplifier means for reducing the output of the second summing circuit to its logarithm, and feedback means from said reference source.
Claim 14
Independent Claim
100 words
A system for determining temperature and density of the gaseous material having first and second absorbable spectral lines comprising sputtering apparatus for producing said gaseous material, means for passing a given amount of radiation having said spectral lines into said gaseous material, means for detecting said first and second spectral lines after passage through said gaseous material and for converting said detected spectral lines into first and second electrical signals, and non-linear amplifier-comparator means coupled to said detecting and converting means for translating said first and second electrical signals into measurements of the temperature and density of said gaseous material.
Claim 15
Independent Claim
100 words
A system for determining temperature and density of the gaseous material having first and second absorbable spectral lines comprising sputtering apparatus for producing said gaseous material, means for passing a given amount of radiation having said spectral lines into said gaseous material, means for detecting said first and second spectral lines after passage through said gaseous material and for converting said detected spectral lines into first and second electrical signals, and non-linear amplifier-comparator means coupled to said detecting and converting means for translating said first and second electrical signals into measurements of the temperature and density of said gaseous material.
Claim 16
Dependent Claim
114 words
A system as set forth in claim 9 wherein said non-linear amplifier-comparator means comprises a first channel means responsive to said first signal, a second channel means responsive to said second signal, a summing circuit for comparing the outputs of said first channel to said second channel and for controlling the output of a voltage source, said voltage source having an output related to the temperature of the material, feedback means for said voltage source to said first channel and said second channel, means connected to the output of one of said channels to derive the density of the material, and means connected to the voltage source for deriving the temperature of the material.
Claim 17
Dependent Claim
83 words
A system as set forth in claim 10 wherein said means connected to said voltage source for deriving the temperature of the material comprises a summing circuit connected to said voltage source, to a reference voltage source and through an inverter and an amplifier to a squaring circuit, said amplifier being coupled to said means connected to the output of the other of said channels and to said squaring circuit, said squaring circuit having an electrical output defining the temperature of the material.
References Cited (Backward Citations)
US2973686A
Cited
US2960002A
Cited
US3117024A
Cited
US3347701A
Cited
US3400687A
Cited
US3413482A
Cited
US3586854A
Cited
US3654109A
Cited
US3590255A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1976-05-21 | 1976-11-20 | 1977-05-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1980-05-21 | 1980-11-20 | 1981-05-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1984-05-21 | 1984-11-20 | 1985-05-22 | $7700.00 | Window Closed / Lapsed |